公开(公告)号：US07239686B2

公开(公告)日：2007-07-03

申请号：US10513403

申请日：2003-05-13

申请人： Magnus Berglund ,  Björn Hansson ,  Oscar Hemberg ,  Hans Hertz ,  Lars Rymell

发明人： Magnus Berglund ,  Björn Hansson ,  Oscar Hemberg ,  Hans Hertz ,  Lars Rymell

IPC分类号： H05G2/00

CPC分类号： H05G2/003 ,  H05G2/008

摘要： A method of producing a radiating plasma with an increased flux stability and uniformity is disclosed. The method comprises the steps of generating a primary target by urging a liquid under pressure through a nozzle; directing an energy pre-pulse onto the primary target to generate a secondary target in the form of a gas or plasma cloud; allowing the thus formed secondary target to expand for a predetermined period of time; and directing a main energy pulse onto the secondary target when the predetermined period of time has elapsed in order to produce a plasma radiating X-ray or EUV radiation. The pre-pulse has a beam waist size that is larger, in at least one dimension, than the corresponding dimension of the primary target.

摘要翻译： 公开了一种产生具有增加的通量稳定性和均匀性的辐射等离子体的方法。 该方法包括以下步骤：通过在压力下迫使液体通过喷嘴产生主要目标; 将能量预脉冲引导到主要目标上以产生气体或等离子体云的形式的次要目标; 允许如此形成的次要靶扩张预定时间段; 并且当经过预定时间段以便产生等离子体辐射X射线或EUV辐射时，将主能量脉冲引导到次目标上。 预脉冲具有比主要目标的对应尺寸更大的至少一个维度的束腰尺寸。

公开(公告)号：US20050129177A1

公开(公告)日：2005-06-16

申请号：US10513403

申请日：2003-05-13

申请人： Magnus Berglund ,  Bjorn Hansson ,  Oscar Hemberg ,  Hans Hertz ,  Lars Rymell

发明人： Magnus Berglund ,  Bjorn Hansson ,  Oscar Hemberg ,  Hans Hertz ,  Lars Rymell

IPC分类号： G21K1/00 ,  G21G4/00 ,  G21K5/02 ,  G21K5/08 ,  G21K7/00 ,  H01J35/00 ,  H01L21/027 ,  H05G2/00 ,  H05H1/00 ,  H05H1/24

CPC分类号： H05G2/003 ,  H05G2/008

摘要： A method of producing a radiating plasma with an increased flux stability and uniformity is disclosed. The method comprises the steps of generating a primary target by urging a liquid under pressure through a nozzle; directing an energy pre-pulse onto the primary target to generate a secondary target in the form of a gas or plasma cloud; allowing the thus formed secondary target to expand for a predetermined period of time; and directing a main energy pulse onto the secondary target when the predetermined period of time has elapsed in order to produce a plasma radiating X-ray or EUV radiation. The pre-pulse has a beam waist size that is larger, in at least one dimension, than the corresponding dimension of the primary target.

摘要翻译： 公开了一种产生具有增加的通量稳定性和均匀性的辐射等离子体的方法。 该方法包括以下步骤：通过在压力下迫使液体通过喷嘴产生主要目标; 将能量预脉冲引导到主要目标上以产生气体或等离子体云的形式的次要目标; 允许如此形成的次要靶扩张预定时间段; 并且当经过预定时间段以便产生等离子体辐射X射线或EUV辐射时，将主能量脉冲引导到次目标上。 预脉冲具有比主要目标的对应尺寸更大的至少一个维度的束腰尺寸。

公开(公告)号：US06760406B2

公开(公告)日：2004-07-06

申请号：US09974975

申请日：2001-10-12

申请人： Hans Martin Hertz ,  Oscar Ĥemberg ,  Lars Rymell ,  Björn A.M. Hansson ,  Magnus Berglund

发明人： Hans Martin Hertz ,  Oscar Ĥemberg ,  Lars Rymell ,  Björn A.M. Hansson ,  Magnus Berglund

IPC分类号： H01J3500

CPC分类号： H05G2/003 ,  G03F7/70033 ,  H05G2/006 ,  H05G2/008

摘要： In a method of generating X-ray or EUV radiation, a substance is urged through an outlet to generate a jet in a direction from the outlet, at least one energy beam is directed onto the jet, the energy beam interacting with the jet to generate the X-ray or EUV radiation, and the temperature of the outlet is controlled, such that the stability of the jet is improved. An apparatus is also disclosed.

摘要翻译： 在产生X射线或EUV辐射的方法中，通过出口促使物质沿着从出口的方向产生射流，至少一个能量束被引导到射流上，能量束与射流相互作用以产生 X射线或EUV辐射，并且控制出口的温度，从而提高射流的稳定性。 还公开了一种设备。

公开(公告)号：US6002744A

公开(公告)日：1999-12-14

申请号：US175953

申请日：1998-10-21

申请人： Hans M. Hertz ,  Lars Malmqvist ,  Lars Rymell ,  Magnus Berglund

发明人： Hans M. Hertz ,  Lars Malmqvist ,  Lars Rymell ,  Magnus Berglund

IPC分类号： G21K5/00 ,  G03F7/20 ,  G21K5/02 ,  G21K5/08 ,  H01L21/027 ,  H05G2/00 ,  H05H1/00 ,  H01J35/00

CPC分类号： H05G2/003 ,  H05G2/008 ,  H05H1/00

摘要： A method for generating X- or EUV-radiation via laser plasma emission, in which at least one target (17) is generated in a chamber, and at least one pulsed laser beam (3) is focused on the target in the chamber. The target is generated in the form of a jet (17) of a liquid, and the laser beam (3) is focused on a spatially continuous portion of the jet (17). An apparatus for generating X- or EUV-radiation via laser plasma emission according to the method comprises a means for generating at least one laser beam (3), a chamber, a means (10) for generating at least one target (17) in the chamber, and a means (13) for focusing the laser beam (3) on the target (17) in the chamber (8). The target-generating means (10) is adapted to generate a jet (17) of a liquid. The focusing means (13) is adapted to focus the laser beam (3) on a spatially continuous portion of the jet (17).

摘要翻译： 一种用于经由激光等离子体发射产生X射线或EUV辐射的方法，其中在腔室中产生至少一个靶（17），并且至少一个脉冲激光束（3）聚焦在腔室中的靶上。 目标以液体的喷射（17）的形式产生，并且激光束（3）聚焦在射流（17）的空间连续部分上。 根据该方法通过激光等离子体发射产生X射线或EUV辐射的装置包括用于产生至少一个激光束（3），腔室，用于产生至少一个靶（17）的装置（10）的装置， 以及用于将激光束（3）聚焦在腔室（8）中的靶（17）上的装置（13）。 目标产生装置（10）适于产生液体的射流（17）。 聚焦装置（13）适于将激光束（3）聚焦在射流（17）的空间连续部分上。