公开(公告)号：US06183930B2

公开(公告)日：2001-02-06

申请号：US09218632

申请日：1998-12-22

申请人： Shigenori Ueda ,  Junichiro Hashizume ,  Makoto Aoki

发明人： Shigenori Ueda ,  Junichiro Hashizume ,  Makoto Aoki

IPC分类号： G03G2100

CPC分类号： G03G21/0017 ,  G03G5/08285 ,  G03G5/14704

摘要： For stably obtaining high-quality images with good cleaning properties, with neither occurrence of uneven scraping of a surface layer of a light receiving member nor fusion of a toner, and without occurrence of an image defect even without provision of a heater, the wear loss of the surface layer of a non-monocrystalline hydrogenated carbon film is made not less than 1 Å/10,000 sheets nor more than 10 Å/10,000 sheets after completion of copying processes of A4-size transfer sheets, each copying process including developing an image on a light receiving member with a developer having an average grain diameter of 5 to 8 &mgr;m, then transferring the developer image onto a transfer medium, and thereafter scrape-cleaning the surface of the light receiving member with an elastic rubber blade having the hardness of not less than 70 nor more than 80.

摘要翻译： 为了稳定地获得具有良好清洁性能的高质量图像，即使没有加热器也不会发生光接收部件的表面层的不均匀刮擦，也不会发生调色剂的熔融，并且即使没有加热器也不会发生图像缺陷，磨损 的非单晶氢化碳膜的表面层在A4尺寸转印纸的复印过程完成之后不小于1 / 10,000张，不大于10埃/ 10,000张，每个复印过程包括显影图像 具有平均粒径为5〜8μm的显影剂的光接收元件，然后将显影剂图像转印到转印介质上，然后用硬度不高的弹性橡胶刮刀刮擦光接收元件的表面 小于70，不超过80。

公开(公告)号：US06282400B1

公开(公告)日：2001-08-28

申请号：US09321126

申请日：1999-05-27

申请人： Makoto Aoki ,  Shigenori Ueda ,  Junichiro Hashizume ,  Ryuji Okamura

发明人： Makoto Aoki ,  Shigenori Ueda ,  Junichiro Hashizume ,  Ryuji Okamura

IPC分类号： G03G2100

CPC分类号： G03G21/0011 ,  G03G5/005 ,  G03G5/08214 ,  G03G5/08285

摘要： An image forming apparatus and method uses an electrophotographic photosensitive member that includes a conductive substrate. The photosensitive member has a photoconductive layer thereon formed of a non-single-crystal material mainly composed of at least silicon atoms. Charging, exposure, development and cleaning in the image forming arrangement are repeated while the photosensitive member rotates. The dynamic frictional force (unit: gf) produced when the photosensitive member surface is cleaned by a cleaning blade to remove a developer remaining on that surface is so set that its standard deviation in its change with time is 2 gf or below per 1 gf/cm of linear pressure of the cleaning blade. No melt-adhesion of toner results and durability is high enough to stably obtain images of high quality.

摘要翻译： 图像形成装置和方法使用包括导电基板的电子照相感光构件。 感光构件具有由主要由至少硅原子组成的非单晶材料形成的光电导层。 在感光构件旋转的同时，重复图像形成装置中的充电，曝光，显影和清洁。 当通过清洁刮板清洁感光构件表面以除去在该表面上残留的显影剂时产生的动态摩擦力（单位：gf）被设定为使得其随时间变化的标准偏差为2gf或更低，每1g / 厘米的清洁刮板的线性压力。 没有调色剂的熔融粘附和耐久性足够高以稳定地获得高质量的图像。

公开(公告)号：US06238832B1

公开(公告)日：2001-05-29

申请号：US09220072

申请日：1998-12-23

申请人： Junichiro Hashizume ,  Shigenori Ueda ,  Makoto Aoki

发明人： Junichiro Hashizume ,  Shigenori Ueda ,  Makoto Aoki

IPC分类号： G03G1504

CPC分类号： G03G5/08285 ,  G03G5/08221

摘要： For achieving satisfactory electrical characteristics and high image quality without peeling, damage or abrasion in a long use term the present invention provides an electrophotographic photosensitive member which comprises, on a conductive substrate, a photoconductive layer composed of a non-single-crystalline material containing silicon atoms as a matrix, and a surface layer composed of non-single-crystalline carbon containing at least hydrogen, wherein the surface layer has a surface roughness Rz within a range from 500 Å to 2000 Å for a reference length of 5 &mgr;m and contains at least oxygen, nitrogen, fluorine and boron atoms.

摘要翻译： 为了实现令人满意的电气特性和高图像质量而不剥离，损坏或磨损长期使用，本发明提供一种电子照相感光构件，其在导电基板上包括由含有硅的非单晶材料构成的光电导层 原子作为基体，以及由至少含有氢的非单晶碳组成的表层，其中表面层的表面粗糙度Rz在500埃至2000埃的范围内，参考长度为5毫米，并包含在 最少氧，氮，氟和硼原子。

公开(公告)号：US06322943B1

公开(公告)日：2001-11-27

申请号：US09057554

申请日：1998-04-09

申请人： Makoto Aoki ,  Shigenori Ueda ,  Junichiro Hashizume

发明人： Makoto Aoki ,  Shigenori Ueda ,  Junichiro Hashizume

IPC分类号： G03G5147

CPC分类号： G03G5/0433 ,  G03G5/08285 ,  G03G5/14704

摘要： There is provided a light-receiving member comprising a photoconductive layer provided on an electroconductive substrate, and a surface layer provided on the photoconductive layer, the surface layer comprising non-single-crystal carbon containing at least fluorine, wherein the surface layer has a ratio of the area of a peak having center in the vicinity of 1200 cm−1 or 1120 cm−1 in the infrared absorption spectrum to the area of a peak having center in the vicinity of 2920 cm−1 being in a range from 0.1 to 50. The light-receiving member allows to obtain a high-quality image without faint image or smeared image in any ambient conditions without use of heating means for the light-receiving member, and has high durability enough for maintaining such high quality characteristics. It can also prevent, by the absence of the heating means, the adhesion of low melting toners such as color toners and the unevenness in image density, generated at the rotating interval of the developer. Besides, it has a high sensitivity, is free from image defects resulting from charge leaking, and is capable of stably providing high-quality images without change with elapse of time.

摘要翻译： 提供了一种光接收元件，其包括设置在导电基底上的光电导层，以及设置在光电导层上的表面层，该表面层包含至少含有氟的非单晶碳，其中该表面层的比例 在红外吸收光谱中具有中心在1200cm -1或1120cm -1附近的具有中心在2920cm -1附近的峰的区域的面积的面积在0.1至50的范围内 光接收部件允许在任何环境条件下获得高质量的图像，而不会对光接收部件使用加热装置，并且具有足够高的耐久性以保持这种高质量特性。 也可以通过不加热装置防止在显影剂的旋转间隔产生的低熔点调色剂如彩色调色剂的粘附和图像浓度不均匀。 此外，它具有高灵敏度，没有由于充电泄漏而导致的图像缺陷，并且能够随着时间的推移稳定地提供高质量的图像而不改变。

公开(公告)号：US06280895B1

公开(公告)日：2001-08-28

申请号：US09361804

申请日：1999-07-27

申请人： Shigenori Ueda ,  Junichiro Hashizume ,  Makoto Aoki ,  Shinji Tsuchida

发明人： Shigenori Ueda ,  Junichiro Hashizume ,  Makoto Aoki ,  Shinji Tsuchida

IPC分类号： G03G1504

CPC分类号： C23C16/44 ,  G03G5/08235 ,  G03G5/08264 ,  G03G5/08278

摘要： In a reactor capable of reducing an internal pressure thereof, a non-single-crystalline material layer containing at least one kind of carbon atoms, hydrogen atoms or nitrogen atoms is formed and etched on a non-single-crystalline photoconductive layer mainly composed of silicon atoms, formed on a substrate, under application of a high-frequency power of 50 MHz to 450 MHz, and the formation and the etching are alternately repeated plural times to form a surface layer. A light-receiving member having such a surface layer does not damage cleaning performance over a long period of time, hardly allows adhesion of corona discharge products, and can be free from faint images, smeared images and uneven image density even if no heating means for the drum is provided.

摘要翻译： 在能够降低其内部压力的反应器中，形成含有至少一种碳原子，氢原子或氮原子的非单晶材料层，并在主要由硅构成的非单晶光电导层上进行蚀刻 原子，形成在基板上，在施加50MHz至450MHz的高频功率下，并且形成和蚀刻交替重复多次以形成表面层。具有这种表面层的光接收元件 不会长时间损坏清洁性能，即使没有提供用于鼓的加热装置，几乎不允许电晕放电产物的粘附，并且可以没有微弱的图像，模糊图像和不均匀的图像密度。

公开(公告)号：US6001521A

公开(公告)日：1999-12-14

申请号：US178884

申请日：1998-10-27

申请人： Junichiro Hashizume ,  Shigenori Ueda ,  Makoto Aoki

发明人： Junichiro Hashizume ,  Shigenori Ueda ,  Makoto Aoki

IPC分类号： G03G5/082 ,  G03G5/147 ,  G03G5/047

CPC分类号： G03G5/08221 ,  G03G5/08285 ,  G03G5/14704

摘要： For providing an electrophotographic photosensitive member that can always maintain good images without occurrence of fusion of toner, independent of the circumstances and the combination of urging pressure of a cleaner, process speed, components contained in toner, etc. and that can always maintain good images of high resolution and even density without occurrence of uneven shaving against a cleaning system or toner, the outermost surface thereof is comprised of a non-monocrystalline carbon film comprising hydrogen and having a dynamic hardness not less than 300 kgf/mm.sup.2 nor more than 1300 kgf/mm.sup.2 measured using a diamond stylus of a triangular pyramid having a tip of a radius not more than 0.1 .mu.m and an edge-to-edge angle of 115.degree., or the outermost surface thereof is comprised of a non-monocrystalline carbon film comprising hydrogen and having a critical load at rupture of the film not less than 50 mN and not more than 700 mN measured when exerting a load on a diamond stylus having a tip of a radius not more than 15 .mu.m while moving the stylus at an amplitude of 20 to 100 .mu.m, an oscillation frequency of 30 Hz, and a feed rate of 2 to 20 .mu.m/sec.

摘要翻译： 为了提供电子照相感光构件，其可以始终保持良好的图像，而不会发生调色剂的融合，而与情况无关，并且清洁剂的施加压力，处理速度，包含在调色剂中的组分等的组合并且可以始终保持良好的图像 高分辨率和均匀的密度，而不会对清洁系统或调色剂产生不均匀的剃刮，其最外表面由包含氢的非单晶碳膜组成，动态硬度不小于300kgf / mm2，不大于1300kgf / mm2由具有半径不大于0.1μm的尖端和115°的边缘到边缘角度的三角锥形金刚石触针测量，或其最外表面由非单晶碳膜组成，所述非单晶碳膜包括 氢气，并且当在金刚石触针板上施加负载时测量的薄膜破裂时的临界负载不小于50mN且不大于700mN 在20至100微米的振幅移动触针，振荡频率为30Hz，进给速度为2至20微米/秒的同时，将半径不超过15微米的尖端。

公开(公告)号：US5976745A

公开(公告)日：1999-11-02

申请号：US924309

申请日：1997-09-05

申请人： Makoto Aoki ,  Shigenori Ueda ,  Junichiro Hashizume

发明人： Makoto Aoki ,  Shigenori Ueda ,  Junichiro Hashizume

IPC分类号： G03G5/08 ,  G03G5/082 ,  G03G5/147

CPC分类号： G03G5/08221 ,  G03G5/08285 ,  G03G5/14704

摘要： With a plasma being generated between a cathode electrode to which a high-frequency power is applied and an electrically conductive substrate opposed to the electrode in a reaction vessel the pressure of which can be reduced, a photoconductive layer having the matrix of silicon atoms is deposited on a substrate to be processed, a surface layer comprised of non-monocrystal carbon containing hydrogen is provided on the photoconductive layer, a surface of the surface layer is etched to fluorinate the surface, the surface roughness Rz by etching is controlled below 1000 .ANG., the fluorine contained in the surface layer is made present within 50 .ANG. from the surface, and the concentration of fluorine to carbon in that region is 20% or more, thereby providing a photosensitive member for electrophotography that can obtain high-quality images free of image faintness and image smearing without using a heating means for the photosensitive member, that has high durability, that shows less change in potential characteristics, that can obtain high-quality images on a stable basis, and that is free of the ghost phenomenon and providing a fabrication process of the photosensitive member.

摘要翻译： 通过在施加高频功率的阴极电极和反应容器内与电极相对的导电基板之间产生等离子体，其压力可以降低，沉积具有硅原子基体的光电导层 在待加工的基板上，在光电导层上设置由非单晶碳构成的表面层，表面层的表面被蚀刻以氟化表面，通过蚀刻将表面粗糙度Rz控制在1000以下， 表面层中所含的氟使表面存在于50以内，并且该区域中氟与碳的浓度为20％以上，从而提供可获得无图像的高质量图像的电子照相用感光体 没有使用用于感光构件的加热装置，具有高耐久性的微弱和图像涂抹，其显示出来 电位特性的变化，可以在稳定的基础上获得高质量的图像，并且没有重影现象并提供感光构件的制造工艺。

公开(公告)号：US06410102B1

公开(公告)日：2002-06-25

申请号：US08874584

申请日：1997-06-13

申请人： Junichiro Hashizume ,  Shigenori Ueda ,  Makoto Aoki

发明人： Junichiro Hashizume ,  Shigenori Ueda ,  Makoto Aoki

IPC分类号： C23C1456

CPC分类号： H01J37/32082 ,  C23C16/4405 ,  C23C16/5093

摘要： A plasma process, which can fabricate a deposition film in short time and at low cost, which can fabricate a deposition film with excellent reproducibility, which can greatly decrease the cleaning time upon cleaning, and which is optimum for fabricating a deposit film, especially a photosensitive member for electrophotography, capable of achieving a high charge potential upon electrification and capable of obtaining clear images with less image defects, is arranged such that a raw-material gas comprising silicon is introduced into a deposition chamber while evacuating the deposition chamber capable of being kept airtight in a vacuum, the raw-material gas is decomposed by high-frequency power in the VHF band, film formation is carried out to form a deposit film on a substrate installed in the deposition chamber, and thereafter cleaning inside the deposition chamber is carried out by etching and removing a deposit film depositing inside the deposition chamber, using a gas containing at least fluorine and using high-frequency power of a frequency lower than the VHF band.

摘要翻译： 一种等离子体工艺，其可以在短时间和低成本下制造沉积膜，其可以制造具有优异再现性的沉积膜，这可以大大降低清洁时的清洗时间，并且其最适于制造沉积膜，特别是 能够在充电时实现高电荷电位并且能够获得具有较少图像缺陷的清晰图像的电子照相用感光构件被布置成使得包含硅的原料气体被引入沉积室，同时抽真空沉积室 在真空中保持气密，原料气体在VHF带中被高频功率分解，进行成膜以在安装在沉积室中的基板上形成沉积膜，然后在沉积室内进行清洗 通过蚀刻和去除沉积在沉积室内的沉积膜，使用含有l的气体进行 东氟，使用频率低于VHF频段的高频功率。

公开(公告)号：US5958644A

公开(公告)日：1999-09-28

申请号：US637188

申请日：1996-04-24

申请人： Shigenori Ueda ,  Junichiro Hashizume ,  Makoto Aoki ,  Shinji Tsuchida

发明人： Shigenori Ueda ,  Junichiro Hashizume ,  Makoto Aoki ,  Shinji Tsuchida

IPC分类号： G03G5/08 ,  C23C16/44 ,  C23F4/00 ,  G03G5/082 ,  H01L21/302 ,  H01L21/3065 ,  H01L31/08 ,  G03G5/00

CPC分类号： C23C16/44 ,  G03G5/08235 ,  G03G5/08264 ,  G03G5/08278

摘要： In a reactor capable of reducing an internal pressure thereof, a non-single-crystalline material layer containing at least one kind of carbon atoms, hydrogen atoms or nitrogen atoms is formed and etched on a non-single-crystalline photoconductive layer mainly composed of silicon atoms, formed on a substrate, under application of a high-frequency power of 50 MHz to 450 MHz, and the formation and the etching are alternately repeated plural times to form a surface layer.A light-receiving member having such a surface layer does not damage cleaning performance over a long period of time, hardly allows adhesion of corona discharge products, and can be free from faint images, smeared images and uneven image density even if no heating means for the drum is provided.

摘要翻译： 在能够降低其内部压力的反应器中，形成含有至少一种碳原子，氢原子或氮原子的非单晶材料层，并在主要由硅构成的非单晶光电导层上进行蚀刻 原子，在50MHz〜450MHz的高频功率下，在基板上形成，并且形成和蚀刻交替重复多次以形成表面层。 具有这种表面层的光接收部件长时间不损坏清洗性能，几乎不能使电晕放电产物附着，并且即使没有加热装置，也不会产生微弱的图像，模糊图像和不均匀的图像浓度 提供鼓。

公开(公告)号：US5849446A

公开(公告)日：1998-12-15

申请号：US785862

申请日：1997-01-21

申请人： Junichiro Hashizume ,  Shigenori Ueda ,  Makoto Aoki

发明人： Junichiro Hashizume ,  Shigenori Ueda ,  Makoto Aoki

IPC分类号： G03G5/08 ,  C23C16/26 ,  C23C16/56 ,  G03G5/043 ,  G03G5/082 ,  G03G5/147

CPC分类号： C23C16/56 ,  C23C16/26 ,  G03G5/0433 ,  G03G5/08221 ,  G03G5/08285 ,  G03G5/14704

摘要： A light receiving member comprising a electrically conductive substrate, a photoconductive layer composed of a non-single crystalline material containing at least silicon atoms as a matrix formed on said substrate by decomposing a silicon-containing raw material gas, and a surface protective layer composed of a non-single crystalline carbon material containing hydrogen formed on said photoconductive layer by decomposing a raw material gas comprising at least a hydrocarbon using a high frequency power with an oscillation frequency of 50 MHz to 450 MHz, wherein a 20 .ANG. or more thick surface side layer region of said surface protective layer composed of said non-single crystalline carbon material is etched at an etching speed of 0.1 to 50 .ANG./sec. by means of a fluorine-containing plasma produced by decomposing a fluorine-containing gas using a high frequency power with an oscillation frequency of 50 MHz to 450 MHz such that said surface protective layer has a thickness of 100 to 10000 .ANG. and has an etched surface deposited with fluorine atoms so as to cover said etched surface. And a process for producing said light receiving member.

摘要翻译： 一种光接收元件，包括导电衬底，由至少含有硅原子作为基质的非单晶材料构成的光电导层，其通过分解含硅原料气体而形成在所述衬底上，以及表面保护层由 通过使用振荡频率为50MHz至450MHz的高频功率分解至少包含烃的原料气体，在所述光电导层上形成含有氢的非单晶碳材料，其中20或更厚的表面侧 以0.1至50安培/秒的蚀刻速度蚀刻由所述非单晶碳材料构成的所述表面保护层的层区域。 通过使用振荡频率为50MHz〜450MHz的高频功率分解含氟气体而制成的含氟等离子体，使得所述表面保护层的厚度为100〜10000，具有蚀刻面 沉积有氟原子以覆盖所述蚀刻表面。 以及用于制造所述光接收元件的工艺。