Deposition process windage calibration
    1.
    发明授权
    Deposition process windage calibration 失效
    沉积过程风量校准

    公开(公告)号:US5876264A

    公开(公告)日:1999-03-02

    申请号:US845339

    申请日:1997-04-25

    摘要: Disclosed is an apparatus and method for calibrating the deposition windage of deposited thin film resistive elements, such as magnetoresistive read elements for magnetic heads which are to be lapped, comprising one set of at least three resistive elements having different nominal height dimensions, a resistance detector for measuring the resistance of each of the resistive elements, and a windage calculator responsive to the nominal height dimensions and to the measured resistances of each of the resistive elements for calculating the windage of the one set of resistive elements.

    摘要翻译: 公开了用于校准沉积的薄膜电阻元件的沉积风阻的装置和方法,例如要研磨的磁头的磁阻读取元件,包括一组至少三个具有不同标称高度尺寸的电阻元件,电阻检测器 用于测量每个电阻元件的电阻,以及响应于标称高度尺寸的风阻计算器和用于计算一组电阻元件的风阻的每个电阻元件的测量电阻。