公开(公告)号：US4992728A

公开(公告)日：1991-02-12

申请号：US454677

申请日：1989-12-21

申请人： Mark A. McCord ,  Leonard Berenbaum

发明人： Mark A. McCord ,  Leonard Berenbaum

IPC分类号： G01B7/34 ,  G01B21/30 ,  G01N37/00 ,  G01Q10/04 ,  G01Q20/00 ,  G01Q30/02 ,  G01Q60/04 ,  G01Q60/24 ,  G01Q60/30 ,  G01R1/06 ,  G01R31/308 ,  H01J37/28

CPC分类号： G01Q60/30 ,  B82Y35/00 ,  G01Q10/04 ,  G01Q30/025 ,  G01R31/308

摘要： An electrical probe which incorporates a scanning proximity microscope for probing the sub-micron features of an integrated circuit. An optical microscope is provided to find the general region of interest, and a piezoelectric tube scanner which controls the position of the probe is disposed at an acute angle to the substrate, so as not to obscure the view of the optical microscope. A number of such probes may be located around the integrated circuit.