公开(公告)号：US06831734B2

公开(公告)日：2004-12-14

申请号：US10093350

申请日：2002-03-07

申请人： Mark Eyolfsou ,  Elton J. Hochhalter ,  Joe Lee Phillips ,  David R. Johnson ,  Peter S. Frank

发明人： Mark Eyolfsou ,  Elton J. Hochhalter ,  Joe Lee Phillips ,  David R. Johnson ,  Peter S. Frank

IPC分类号： G01N2164

CPC分类号： G01N21/6456 ,  G01N21/4738 ,  G01N21/643 ,  G01N21/6458 ,  G01N21/94 ,  G01N21/9501 ,  G01N2021/6421 ,  G01N2021/646 ,  G01N2021/6471

摘要： A method and apparatus for detection of a particular material, such as photo-resist material, on a sample surface. A narrow beam of light is projected onto the sample surface and the fluoresced and/or reflected light intensity at a particular wavelength band is measured by a light detector. The light intensity is converted to a numerical value and transmitted electronically to a logic circuit which determines the proper disposition of the sample. The logic circuit controls a sample-handling robotic device which sequentially transfers samples to and from a stage for testing and subsequent disposition. The method is particularly useful for detecting photo-resist material on the surface of a semiconductor wafer.

摘要翻译： 用于在样品表面上检测诸如光致抗蚀剂材料的特定材料的方法和装置。 将窄光束投影到样品表面上，并且通过光检测器测量在特定波长带处的荧光和/或反射光强度。 光强度被转换为数值，并以电子方式传输到逻辑电路，这决定了样品的正确配置。 逻辑电路控制一个样本处理机器人装置，该装置将样本顺序地传送到用于测试和随后的配置的阶段。 该方法对于在半导体晶片的表面上检测光致抗蚀剂材料特别有用。