专利检索 ap:("Martinus Hendrikus Antonius LEENDERS" OR "Youri Johannes Laurentius Van Dommelen" OR "Hans Jansen" OR "Robert Douglas Watso" OR "Anthonius Martinus Petrus De Jong" OR "Jan Willem Cromwijk" OR "Thomas Laursen") AND inv:"Anthonius Martinus Petrus De Jong" 第 1 页

1.

发明申请
Lithographic Apparatus, Reflective Member And A Method of Irradiating The Underside Of A Liquid Supply System 有权
标题翻译：平版印刷设备，反射构件和喷射液体供应系统的下方的方法

公开(公告)号：US20090027636A1

公开(公告)日：2009-01-29

申请号：US11862855

申请日：2007-09-27

申请人： Martinus Hendrikus Antonius LEENDERS , Youri Johannes Laurentius Van Dommelen , Hans Jansen , Robert Douglas Watso , Anthonius Martinus Petrus De Jong , Jan Willem Cromwijk , Thomas Laursen

发明人： Martinus Hendrikus Antonius LEENDERS , Youri Johannes Laurentius Van Dommelen , Hans Jansen , Robert Douglas Watso , Anthonius Martinus Petrus De Jong , Jan Willem Cromwijk , Thomas Laursen

IPC分类号： G03B27/70 , G03B27/52

CPC分类号： G03F7/70925 , G03F7/2041 , G03F7/70341

摘要： A lithographic apparatus that includes a reflector configured to reflect a cleaning beam of radiation projected through a projection system onto an underside of a liquid retrieval system is disclosed. The construction of the reflector is also disclosed as is a method for irradiating the underside of a liquid supply system for use in cleaning.

摘要翻译： 公开了一种光刻设备，其包括被配置为将通过投影系统投射的清洁光束反射到液体回收系统的下侧上的反射器。还公开了用于照射用于清洁的液体供应系统的下侧的方法。