公开(公告)号：US07786790B2

公开(公告)日：2010-08-31

申请号：US12407390

申请日：2009-03-19

申请人： Naoki Yoshida ,  Masahiro Kanai ,  Asami Kobayashi

发明人： Naoki Yoshida ,  Masahiro Kanai ,  Asami Kobayashi

IPC分类号： H01L35/00

CPC分类号： G05F3/02 ,  G01C19/56

摘要： A temperature compensation circuit performing temperature compensation of an analog reference voltage, includes: a first reference voltage generating circuit generating a first voltage of which a voltage level varies depending on a temperature; a second reference voltage generating circuit generating a second voltage of which a voltage level is independent of a temperature and having a circuit configuration that is same as a circuit configuration of the first reference voltage generating circuit; an inverting amplifier having a gain of 1, which inverts and amplifies a voltage difference between the first voltage and the second voltage so as to generate a third voltage; and a differential amplifier amplifying a voltage difference between the third voltage and the first voltage so as to generate a fourth voltage In the temperature compensation circuit, the differential amplifier includes: a first operational amplifier; a first resistor coupled between a first node and a second node that is an inverting input terminal of the first operational amplifier; a second resistor coupled between a third node and a fourth node that is a non-inverting input terminal of the first operational amplifier; a third resistor coupled between the second node and a fifth node that is an output node of the first operational amplifier; and a fourth resistor coupled between the fourth node and a sixth node to which an analog reference voltage is applied. Further, in the circuit, resistance values of the first resistor and the second resistor are set to be same as each other, and resistance values of the third resistor and the fourth resistor are set to be same as each other.

摘要翻译： 执行模拟参考电压的温度补偿的温度补偿电路包括：第一参考电压产生电路，其产生电压电平根据温度变化的第一电压; 产生第二电压的第二参考电压产生电路，其电压电平与温度无关，并具有与第一参考电压产生电路的电路配置相同的电路配置; 具有增益1的反相放大器，其反转和放大第一电压和第二电压之间的电压差，以产生第三电压; 以及放大第三电压和第一电压之间的电压差以产生第四电压的差分放大器。在所述温度补偿电路中，所述差分放大器包括：第一运算放大器; 耦合在第一节点和第二节点之间的第一电阻器，其是第一运算放大器的反相输入端子; 耦合在第三节点和第四节点之间的第二电阻器，其是第一运算放大器的非反相输入端子; 耦合在所述第二节点和作为所述第一运算放大器的输出节点的第五节点之间的第三电阻器; 以及耦合在所述第四节点和施加了模拟参考电压的第六节点之间的第四电阻器。 此外，在电路中，第一电阻器和第二电阻器的电阻值被设置为彼此相同，并且第三电阻器和第四电阻器的电阻值被设置为彼此相同。

公开(公告)号：US08240204B2

公开(公告)日：2012-08-14

申请号：US12407424

申请日：2009-03-19

申请人： Masahiro Kanai ,  Asami Kobayashi ,  Naoki Yoshida

发明人： Masahiro Kanai ,  Asami Kobayashi ,  Naoki Yoshida

IPC分类号： G01P9/00 ,  G01C19/00

CPC分类号： G01C19/56 ,  G01P15/097

摘要： A synchronous detection circuit includes: an offset compensation circuit which generates an offset compensation voltage to compensate an offset voltage superposed on a direct current voltage signal; and a temperature compensation circuit which generates a temperature compensation voltage to compensate variation of a direct current reference voltage that depends on a temperature in a signal path of a sensing circuit. In the circuit, the synchronous detection circuit synchronously detects an alternating current signal, the offset compensation voltage and the temperature compensation voltage are respectively superposed on the alternating current signal which is input into the synchronous detection circuit, and the synchronous detection circuit synchronously detects the alternating current signal on which the offset compensation voltage and the temperature compensation voltage have been superposed.

摘要翻译： 一种同步检测电路包括：偏移补偿电路，产生偏移补偿电压以补偿叠加在直流电压信号上的偏移电压; 以及温度补偿电路，其生成温度补偿电压，以补偿依赖于感测电路的信号路径中的温度的直流参考电压的变化。 在该电路中，同步检测电路同步检测交流信号，偏移补偿电压和温度补偿电压分别叠加在输入到同步检测电路的交流信号上，同步检测电路同步检测交替 偏移补偿电压和温度补偿电压叠加的电流信号。

公开(公告)号：US06713564B1

公开(公告)日：2004-03-30

申请号：US10070267

申请日：2002-02-26

申请人： Yukikazu Nobuhara ,  Hitoshi Matsumoto ,  Nakamura Mitsuhiro ,  Asami Kobayashi

发明人： Yukikazu Nobuhara ,  Hitoshi Matsumoto ,  Nakamura Mitsuhiro ,  Asami Kobayashi

IPC分类号： C08F29702

CPC分类号： C08G81/021 ,  C08F297/02 ,  C08F297/023

摘要： A novel star block copolymer which can be made to have a high molecular weight and gives a solution having a lower viscosity than solutions of linear polymers having the same molecular weight as the copolymer and which is expected to be used as a resist material; and a process for producing the copolymer. The star block copolymer having alkenylphenol skeletons is obtained by homopolymerizing by living anion polymerization an alkenylphenol compound in which the hydroxyl group of the phenol moiety has been protected by a saturated aliphatic protective group or copolymerizing the alkenylphenol compound with a vinylaromatic compound by living anion polymerization, subsequently copolymerizing the resultant polymer using a polyfunctional coupling agent such as divinylbenzene to obtain a star block copolymer, and eliminating the saturated aliphatic protective groups with an acid reagent.

摘要翻译： 一种新型的星形嵌段共聚物，其可以制备成具有高分子量并且产生具有比具有与共聚物相同的分子量的线性聚合物的溶液的粘度较低的溶液并且预期用作抗蚀剂材料的溶液; 和共聚物的制造方法。 具有烯基苯酚骨架的星形嵌段共聚物通过活性阴离子聚合均聚而得到，其中苯酚部分的羟基被饱和脂族保护基保护或烯基酚化合物与乙烯基芳族化合物通过活性阴离子聚合共聚合的烯基酚化合物， 随后使用二官能偶合剂如二乙烯基苯共聚得到的聚合物，得到星形嵌段共聚物，并用酸试剂除去饱和脂族保护基。