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公开(公告)号：US07605965B2
公开(公告)日：2009-10-20
申请号：US12355044
申请日：2009-01-16
IPC分类号： G02B26/08
CPC分类号： G02B26/105 , B81B3/0051 , B81B7/0016 , G02B26/0858
摘要： An optical deflector includes a mirror having a reflective plane; a torsion bar extending outwardly from a side of said mirror; a support surrounding said mirror; a piezoelectric cantilever including a supporting body and a piezoelectric body formed on the supporting body, one end of said piezoelectric cantilever being connected to said torsion bar, the other end of the piezoelectric cantilever being connected to said support, said piezoelectric cantilever, upon application of a driving voltage to the piezoelectric body, exhibiting a bending deformation due to piezoelectricity so as to rotate said torsion bar, thereby rotarily driving said mirror through said torsion bar; and an impact attenuator connected to said support, the impact attenuator being disposed in a gap between said mirror and said support.
摘要翻译： 光学偏转器包括具有反射面的反射镜; 从所述反射镜的一侧向外延伸的扭杆; 围绕所述镜子的支撑件; 压电悬臂，其包括支撑体和形成在所述支撑体上的压电体，所述压电悬臂的一端连接到所述扭杆，所述压电悬臂的另一端连接到所述支撑件，所述压电悬臂在施加时 对压电体的驱动电压，由于压电性而呈现弯曲变形，从而使所述扭杆旋转，从而通过所述扭杆旋转驱动所述反射镜; 以及连接到所述支撑件的冲击衰减器，所述冲击衰减器设置在所述反射镜和所述支撑件之间的间隙中。
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公开(公告)号：US20090323151A1
公开(公告)日：2009-12-31
申请号：US12554636
申请日：2009-09-04
IPC分类号： G02B26/08
CPC分类号： G02B26/105 , B81B3/0051 , B81B7/0016 , G02B26/0858
摘要： An optical deflector includes a mirror having a reflective plane; a torsion bar extending outwardly from a side of said mirror; a support surrounding said mirror; a piezoelectric cantilever including a supporting body and a piezoelectric body formed on the supporting body, one end of said piezoelectric cantilever being connected to said torsion bar, the other end of the piezoelectric cantilever being connected to said support, said piezoelectric cantilever, upon application of a driving voltage to the piezoelectric body, exhibiting a bending deformation due to piezoelectricity so as to rotate said torsion bar, thereby rotarily driving said mirror through said torsion bar; and an impact attenuator connected to said support, the impact attenuator being disposed in a gap between said mirror and said support.
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公开(公告)号：US07773282B2
公开(公告)日：2010-08-10
申请号：US12554636
申请日：2009-09-04
IPC分类号： G02B26/08
CPC分类号： G02B26/105 , B81B3/0051 , B81B7/0016 , G02B26/0858
摘要： An optical deflector includes a mirror having a reflective plane; a torsion bar extending outwardly from a side of said mirror; a support surrounding said mirror; a piezoelectric cantilever including a supporting body and a piezoelectric body formed on the supporting body, one end of said piezoelectric cantilever being connected to said torsion bar, the other end of the piezoelectric cantilever being connected to said support, said piezoelectric cantilever, upon application of a driving voltage to the piezoelectric body, exhibiting a bending deformation due to piezoelectricity so as to rotate said torsion bar, thereby rotarily driving said mirror through said torsion bar; and an impact attenuator connected to said support, the impact attenuator being disposed in a gap between said mirror and said support.
摘要翻译： 光学偏转器包括具有反射面的反射镜; 从所述反射镜的一侧向外延伸的扭杆; 围绕所述镜子的支撑件; 压电悬臂，其包括支撑体和形成在所述支撑体上的压电体，所述压电悬臂的一端连接到所述扭杆，所述压电悬臂的另一端连接到所述支撑件，所述压电悬臂在施加时 对压电体的驱动电压，由于压电性而呈现弯曲变形，从而使所述扭杆旋转，从而通过所述扭杆旋转驱动所述反射镜; 以及连接到所述支撑件的冲击衰减器，所述冲击衰减器设置在所述反射镜和所述支撑件之间的间隙中。
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公开(公告)号：US20090185253A1
公开(公告)日：2009-07-23
申请号：US12357106
申请日：2009-01-21
IPC分类号： G02B26/08
CPC分类号： G02B26/0858
摘要： An optical deflector includes a mirror having a reflective plane; a torsion bar extending outwardly from an end of said mirror; a support surrounding said mirror; a first piezoelectric element, one end of said first piezoelectric element being connected to said torsion bar, the other end of the first piezoelectric element being connected to and supported by said support, said first piezoelectric element having at least one piezoelectric cantilever, the cantilever including a supporting body and a piezoelectric body formed on the supporting body to exhibit bending deformation due to piezoelectricity when a driving voltage is applied to the piezoelectric body, said piezoelectric element rotarily driving said mirror through said torsion bar when said driving voltage is applied; and a second piezoelectric element, one end of said second piezoelectric element being connected to said torsion bar, the other end of the second piezoelectric element being connected to and supported by said mirror.
摘要翻译： 光学偏转器包括具有反射面的反射镜; 从所述反射镜的端部向外延伸的扭杆; 围绕所述镜子的支撑件; 第一压电元件，所述第一压电元件的一端连接到所述扭杆，所述第一压电元件的另一端连接并由所述支撑件支撑，所述第一压电元件具有至少一个压电悬臂，所述悬臂包括 支撑体和压电体，形成在所述支撑体上，以在向所述压电体施加驱动电压时由于压电性而呈现弯曲变形，所述压电元件在施加所述驱动电压时通过所述扭杆旋转驱动所述反射镜; 以及第二压电元件，所述第二压电元件的一端连接到所述扭杆，所述第二压电元件的另一端连接并由所述反射镜支撑。
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公开(公告)号：US07605966B2
公开(公告)日：2009-10-20
申请号：US12357106
申请日：2009-01-21
IPC分类号： G02B26/08
CPC分类号： G02B26/0858
摘要： An optical deflector includes a mirror having a reflective plane; a torsion bar extending outwardly from an end of said mirror; a support surrounding said mirror; a first piezoelectric element, one end of said first piezoelectric element being connected to said torsion bar, the other end of the first piezoelectric element being connected to and supported by said support, said first piezoelectric element having at least one piezoelectric cantilever, the cantilever including a supporting body and a piezoelectric body formed on the supporting body to exhibit bending deformation due to piezoelectricity when a driving voltage is applied to the piezoelectric body, said piezoelectric element rotarily driving said mirror through said torsion bar when said driving voltage is applied; and a second piezoelectric element, one end of said second piezoelectric element being connected to said torsion bar, the other end of the second piezoelectric element being connected to and supported by said mirror.
摘要翻译： 光学偏转器包括具有反射面的反射镜; 从所述反射镜的端部向外延伸的扭杆; 围绕所述镜子的支撑件; 第一压电元件，所述第一压电元件的一端连接到所述扭杆，所述第一压电元件的另一端连接并由所述支撑件支撑，所述第一压电元件具有至少一个压电悬臂，所述悬臂包括 支撑体和压电体，形成在所述支撑体上，以在向所述压电体施加驱动电压时由于压电性而呈现弯曲变形，所述压电元件在施加所述驱动电压时通过所述扭杆旋转驱动所述反射镜; 以及第二压电元件，所述第二压电元件的一端连接到所述扭杆，所述第二压电元件的另一端连接并由所述反射镜支撑。
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公开(公告)号：US20090180167A1
公开(公告)日：2009-07-16
申请号：US12355044
申请日：2009-01-16
IPC分类号： G02B26/08
CPC分类号： G02B26/105 , B81B3/0051 , B81B7/0016 , G02B26/0858
摘要： An optical deflector includes a mirror having a reflective plane; a torsion bar extending outwardly from a side of said mirror; a support surrounding said mirror; a piezoelectric cantilever including a supporting body and a piezoelectric body formed on the supporting body, one end of said piezoelectric cantilever being connected to said torsion bar, the other end of the piezoelectric cantilever being connected to said support, said piezoelectric cantilever, upon application of a driving voltage to the piezoelectric body, exhibiting a bending deformation due to piezoelectricity so as to rotate said torsion bar, thereby rotarily driving said mirror through said torsion bar; and an impact attenuator connected to said support, the impact attenuator being disposed in a gap between said mirror and said support.
摘要翻译： 光学偏转器包括具有反射面的反射镜; 从所述反射镜的一侧向外延伸的扭杆; 围绕所述镜子的支撑件; 压电悬臂，其包括支撑体和形成在所述支撑体上的压电体，所述压电悬臂的一端连接到所述扭杆，所述压电悬臂的另一端连接到所述支撑件，所述压电悬臂在施加时 对压电体的驱动电压，由于压电性而呈现弯曲变形，从而使所述扭杆旋转，从而通过所述扭杆旋转驱动所述反射镜; 以及连接到所述支撑件的冲击衰减器，所述冲击衰减器设置在所述反射镜和所述支撑件之间的间隙中。
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公开(公告)号：US20080225363A1
公开(公告)日：2008-09-18
申请号：US12048694
申请日：2008-03-14
申请人： Tetsurou SAITOH , Eiji Mochizuki , Yukito Sato , Yoshiaki Yasuda , Masahiro Akamatsu , Masanao Tani
发明人： Tetsurou SAITOH , Eiji Mochizuki , Yukito Sato , Yoshiaki Yasuda , Masahiro Akamatsu , Masanao Tani
IPC分类号： G02B26/10
CPC分类号： G02B26/0858
摘要： An optical deflector includes a plurality of piezoelectric unimorph oscillating bodies (210a to 210d) that cause a reflecting plate (1) to oscillate rotationally, centering upon a pair of flexible support units (2a and 2b). The optical deflector forms a single structure of the oscillating plates (23a to 23b), the reflecting plate (1), the flexible support units (2a and 2b), and a support body (9), by connecting one set of the terminals of the oscillating plates (23a to 23d) of the suite of piezoelectric unimorph oscillating bodies (210a to 210d) to the flexible support units (2a and 2b), and connecting the other set of terminals to the support body (9). Furthermore, the plurality of piezoelectric unimorph oscillating bodies (210a to 210d) each respectively comprise a plurality of parallel oscillating bodies (23a1 to 23a-3, 23b-1 to 23b-3, 23c-1 to 23c-3), and (23d-1 to 23d-3), and a suite of parallel actuators (28a-1 to 28a-3, 28c-1 to 28c-3, and 28d-1 to 28d-3).
摘要翻译： 光学偏转器包括使得反射板（1）以一对柔性支撑单元（2a和2b）为中心旋转地摆动的多个压电单晶振荡体（210a至210d）。 光学偏转器通过连接一组振动板（23a至23b），反射板（1），柔性支撑单元（2a和2b）和支撑体（9）形成单一结构 将压电单晶振荡体（210a至210d）的振动板（23a至23d）的端子连接到柔性支撑单元（2a和2b），并将另一组端子连接到 支撑体（9）。 此外，多个压电单晶体振荡体（210a〜210d）各自分别包括多个平行的振荡体（23a，1〜23a-3,23b-1〜23b-3,23c-1〜 23c-3）和（23d-1至23d-3）以及一组平行致动器（28a-1至28a-3,28c-1至28c-3和28d- 1〜28d-3）。
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公开(公告)号：US08553306B2
公开(公告)日：2013-10-08
申请号：US12048694
申请日：2008-03-14
申请人： Tetsurou Saitoh , Eiji Mochizuki , Yukito Sato , Yoshiaki Yasuda , Masahiro Akamatsu , Masanao Tani
发明人： Tetsurou Saitoh , Eiji Mochizuki , Yukito Sato , Yoshiaki Yasuda , Masahiro Akamatsu , Masanao Tani
IPC分类号： G02B26/08
CPC分类号： G02B26/0858
摘要： An optical deflector includes a plurality of piezoelectric unimorph oscillating bodies (210a to 210d) that cause a reflecting plate (1) to oscillate rotationally, centering upon a pair of flexible support units (2a and 2b). The optical deflector forms a single structure of the oscillating plates (23a to 23b), the reflecting plate (1), the flexible support units (2a and 2b), and a support body (9), by connecting one set of the terminals of the oscillating plates (23a to 23d) of the suite of piezoelectric unimorph oscillating bodies (210a to 210d) to the flexible support units (2a and 2b), and connecting the other set of terminals to the support body (9). Furthermore, the plurality of piezoelectric unimorph oscillating bodies (210a to 210d) each respectively comprise a plurality of parallel oscillating bodies (23a1 to 23a-3, 23b-1 to 23b-3, 23c-1 to 23c-3), and (23d-1 to 23d-3), and a suite of parallel actuators (28a-1 to 28a-3, 28c-1 to 28c-3, and 28d-1 to 28d-3).
摘要翻译： 光学偏转器包括使反射板（1）以一对柔性支撑单元（2a和2b）为中心旋转摆动的多个压电单晶振荡体（210a至210d）。 光学偏转器通过将一组端子连接在一起，形成振荡板（23a至23b），反射板（1），柔性支撑单元（2a和2b）和支撑体（9）的单一结构 压电单晶振荡体（210a〜210d）组合到柔性支撑单元（2a和2b）的振动板（23a至23d），并将另一组端子连接到支撑体（9）上。 此外，多个压电单晶振荡体（210a〜210d）分别分别包括多个并联振荡体（23a1〜23a-3,23b-1〜23b-3，23c-1〜23c-3），（23d -1〜23d-3）和一组平行的致动器（28a-1〜28a-3,28c-1〜28c-3，以及28d-1〜28d-3）。
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公开(公告)号：US5352536A
公开(公告)日：1994-10-04
申请号：US49561
申请日：1993-04-19
申请人： Masahiro Akamatsu , Osamu Tohya , Tohru Yukumoto
发明人： Masahiro Akamatsu , Osamu Tohya , Tohru Yukumoto
IPC分类号： B29C51/14 , B29K25/00 , B29K55/00 , B29L22/00 , B32B27/00 , B32B27/08 , B32B27/28 , B32B27/30 , B65D65/40 , B32B33/00
CPC分类号： B32B27/08 , B32B27/30 , Y10S264/65 , Y10T428/31855 , Y10T428/31928 , Y10T428/31935
摘要： Disclosed is a laminated resin sheet consisting of (a) at least one layer of an ethylene-vinyl alcohol copolymeric resin (EVOH resin), (b) at least one layer of a hot-melt adhesive resin and (c) at least one layer of a polystyrene-based resin, the layer (b) being interposed between the layers (a) and (c) to serve to adhesively bond them together. The laminated sheet has excellent moldability only when the EVOH resin has a thermal characteristic specified in terms of the integrated value of the peak areas in a diagram obtained by the DSC (differential scanning calorimetry) measurement in the course of temperature elevation.
摘要翻译： 公开了一种层压树脂片，其由（a）至少一层乙烯 - 乙烯醇共聚树脂（EVOH树脂），（b）至少一层热熔性粘合剂树脂和（c）至少一层 的聚苯乙烯类树脂，层（b）插入在层（a）和（c）之间以用于将它们粘合在一起。 只有当EVOH树脂具有在通过DSC（差示扫描量热法）测量在温度升高过程中获得的图中的峰面积的积分值所确定的热特性时，该层压片材具有优异的成型性。
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公开(公告)号：US5952061A
公开(公告)日：1999-09-14
申请号：US996197
申请日：1997-12-22
CPC分类号： C23C14/325 , C23C14/14
摘要： The present invention is an apparatus and method for the fabrication of high quality silicon films by deposition of a silicon vapor onto a substrate. The silicon film fabrication apparatus includes a chamber, a crucible having an anode for melting a silicon metal, an anode for generating a DC arc discharge plasma, a substrate holder facing the crucible, and a heater for heating a substrate arranged in the substrate holder. The apparatus also includes a variable DC power supply, a cathode element including an electrode plate for generating the DC arc discharge plasma, a gas intake pipe penetrating through the electrode plate into the chamber, and an exhaust pipe having a valve facing the gas intake pipe. The silicon film is fabricated by disposing a substrate in a chamber, introducing hydrogen gas into the chamber, generating the DC arc discharge plasma, evaporating the silicon metal in the chamber, and depositing the silicon vapor on the substrate after the vapor passes through the DC arc discharge plasma.
摘要翻译： 本发明是通过将硅蒸气沉积到基板上来制造高质量硅膜的装置和方法。 硅膜制造装置包括：室，具有用于熔融硅金属的阳极的坩埚，用于产生直流电弧放电等离子体的阳极，面对坩埚的基板保持架，以及用于加热布置在基板支架中的基板的加热器。 该装置还包括可变直流电源，包括用于产生直流电弧放电等离子体的电极板的阴极元件，穿过电极板进入腔室的进气管，以及具有面对气体吸入管的阀的排气管 。 硅膜通过在室内设置基板，将氢气引入室内，产生直流电弧放电等离子体，蒸发室中的硅金属，并在蒸汽通过DC后将硅蒸气沉积在基板上， 电弧放电等离子体。
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