公开(公告)号：US20100248092A1

公开(公告)日：2010-09-30

申请号：US12797304

申请日：2010-06-09

申请人： Masaru TANABE ,  Atsushi KAWAGUCHI ,  Hiroyuki AKAGAWA ,  Akihiro KAWAHARA

发明人： Masaru TANABE ,  Atsushi KAWAGUCHI ,  Hiroyuki AKAGAWA ,  Akihiro KAWAHARA

IPC分类号： G03F7/20 ,  G03F1/00

CPC分类号： G03F1/60 ,  G03F1/50 ,  Y10T428/31616

摘要： In a mask blank substrate to be chucked by a mask stage of an exposure system, the flatness of a rectangular flatness measurement area excluding an area of 2 mm inward from an outer peripheral end surface on a main surface of the mask blank substrate on its side to be chucked by the mask stage is 0.6 μm or less, and at least three of four corner portions of the flatness measurement area each have a shape that rises toward the outer peripheral side.

摘要翻译： 在通过曝光系统的掩模台夹持的掩模基板中，除了掩模基板的主面的外周端面外侧的2mm外侧的矩形平坦度测量区域的平坦度 被掩模台夹持的面积为0.6μm以下，平坦度测量区域的四个角部中的至少三个角分别具有朝向外周侧上升的形状。

公开(公告)号：US20100173232A1

公开(公告)日：2010-07-08

申请号：US12725032

申请日：2010-03-16

申请人： Osamu SUZUKI ,  Hiroyuki AKAGAWA ,  Masaru TANABE ,  Atsushi KAWAGUCHI ,  Naozumi ISHIBASHI

发明人： Osamu SUZUKI ,  Hiroyuki AKAGAWA ,  Masaru TANABE ,  Atsushi KAWAGUCHI ,  Naozumi ISHIBASHI

IPC分类号： G03F1/00

CPC分类号： G03F1/60 ,  G03F1/50 ,  Y10T428/31616

摘要： A mask blank manufacturing department manufactures a mask blank by forming a thin film to be a mask pattern on a mask blank transparent substrate. When providing the mask blank to a mask manufacturing department, the mask blank manufacturing department provides optical characteristic information (transmittance variation) of the mask blank transparent substrate and optical characteristic information (transmittance variation and/or phase difference variation) of the mask blank to the mask manufacturing department. The optical characteristic information of the mask blank transparent substrate is provided to the mask blank manufacturing department from a materials processing department that manufactures mask blank transparent substrates.

摘要翻译： 掩模制造部门通过在掩模板透明基板上形成作为掩模图案的薄膜来制造掩模坯料。 当掩模制造部门提供掩模坯料时，掩模制造部门提供掩模毛坯透明基板的光学特性信息（透射率变化）和掩模毛坯的光学特性信息（透射率变化和/或相位差变化） 面具制造部门。 掩模坯料透明基板的光学特性信息由制造掩模板透明基板的材料加工部门提供给掩模坯料制造部。

公开(公告)号：US20120247859A1

公开(公告)日：2012-10-04

申请号：US13432740

申请日：2012-03-28

申请人： Atsushi KAWAGUCHI ,  Yoshitaka Kobayashi ,  Masahiro Nakashima ,  Takashi Tominaga

发明人： Atsushi KAWAGUCHI ,  Yoshitaka Kobayashi ,  Masahiro Nakashima ,  Takashi Tominaga

IPC分类号： B62M7/12 ,  B62K11/10

CPC分类号： B62M6/65 ,  B62K2204/00 ,  B62M7/12

摘要： An electric vehicle includes a double-sided swing arm that supports a motor shaft, an axle, and a wheel by supporting a motor on one side of the wheel and a reduction mechanism on the other side of the wheel. In this case, the swing arm is composed of, on the one side of the wheel, plural separable arm portions. The arm portions have respective separation points on an outside or outer periphery of the wheel. With the components arranged in this manner, weight balance of the electric vehicle is easily achieved, and the operational efficiency of mounting, removal, and replacement of the wheel and the motor is improved.

摘要翻译： 一种电动车辆包括通过在车轮的一侧支撑马达和在车轮的另一侧上的减速机构来支撑电动机轴，轴和车轮的双面摆臂。 在这种情况下，摆臂由轮的一侧构成多个可分离臂部。 臂部在轮的外周或外周具有相应的分离点。 通过以这种方式布置的部件，容易实现电动车辆的重量平衡，并且提高了车轮和电动机的安装，拆卸和更换的操作效率。