公开(公告)号：US06628380B1

公开(公告)日：2003-09-30

申请号：US09897183

申请日：2001-07-02

申请人： Masashi Fujimori ,  Kenji Itoh ,  Toru Koike ,  Yuhsuke Matsumoto ,  Seiji Nakagawa ,  Tatsumi Tsuchiya ,  Tatsushi Yoshida

发明人： Masashi Fujimori ,  Kenji Itoh ,  Toru Koike ,  Yuhsuke Matsumoto ,  Seiji Nakagawa ,  Tatsumi Tsuchiya ,  Tatsushi Yoshida

IPC分类号： G01N2100

CPC分类号： G01N21/8806 ,  G11B5/4806

摘要： A jig for inspecting the appearance of small parts with an optical microscope, the jig is equipped with a base, having an upper flat surface which becomes a mounting stage of the optical microscope, and is also provided with a member for moving the upper flat surface at least in a direction approximately parallel to a direction of an optical axis of an objective lens of the optical microscope in order to focus the optical microscope on an inspection portion of the small parts mounted on the upper flat surface. The jig is also equipped with an inspection-object supporting portion, provided with a member for supporting the small parts at the predetermined portion on the base. Furthermore, the jig is equipped with reflecting mirrors which have a mirrorlike surface with an inclined angle of approximately 45 degrees to the upper flat surface of the base.

摘要翻译： 一种用光学显微镜检查小部件的外观的夹具，该夹具具有基部，具有成为光学显微镜的安装台的上部平坦面，并且还设置有用于使上部平坦面 至少在与光学显微镜的物镜的光轴的方向大致平行的方向上，以将光学显微镜聚焦在安装在上平坦表面上的小部件的检查部分上。 该夹具还配备有检查对象支撑部，该检查对象支撑部设置有用于在基部上的预定部分处支撑小部件的部件。 此外，夹具配备有反射镜，反射镜具有与基座的上平坦表面大约45度的倾斜角的镜面。