Appearance inspecting jig for small parts and inspecting method employing the same jig
    1.
    发明授权
    Appearance inspecting jig for small parts and inspecting method employing the same jig 失效
    小零件外观检查夹具及采用相同夹具的检验方法

    公开(公告)号:US06628380B1

    公开(公告)日:2003-09-30

    申请号:US09897183

    申请日:2001-07-02

    IPC分类号: G01N2100

    CPC分类号: G01N21/8806 G11B5/4806

    摘要: A jig for inspecting the appearance of small parts with an optical microscope, the jig is equipped with a base, having an upper flat surface which becomes a mounting stage of the optical microscope, and is also provided with a member for moving the upper flat surface at least in a direction approximately parallel to a direction of an optical axis of an objective lens of the optical microscope in order to focus the optical microscope on an inspection portion of the small parts mounted on the upper flat surface. The jig is also equipped with an inspection-object supporting portion, provided with a member for supporting the small parts at the predetermined portion on the base. Furthermore, the jig is equipped with reflecting mirrors which have a mirrorlike surface with an inclined angle of approximately 45 degrees to the upper flat surface of the base.

    摘要翻译: 一种用光学显微镜检查小部件的外观的夹具,该夹具具有基部,具有成为光学显微镜的安装台的上部平坦面,并且还设置有用于使上部平坦面 至少在与光学显微镜的物镜的光轴的方向大致平行的方向上,以将光学显微镜聚焦在安装在上平坦表面上的小部件的检查部分上。 该夹具还配备有检查对象支撑部,该检查对象支撑部设置有用于在基部上的预定部分处支撑小部件的部件。 此外,夹具配备有反射镜,反射镜具有与基座的上平坦表面大约45度的倾斜角的镜面。

    Wired suspension assembly in disk storage device method for assembly
head suspension assembly
    2.
    发明授权
    Wired suspension assembly in disk storage device method for assembly head suspension assembly 失效
    用于组装头悬挂组件的磁盘存储装置方法中的有线悬架组件

    公开(公告)号:US5754370A

    公开(公告)日:1998-05-19

    申请号:US893446

    申请日:1997-07-11

    摘要: The present invention provides a new tab structure for a head suspension assembly in a magnetic storage system. In the prior art method of assembly, a harness temporarily holds a wire assembly. The present invention eliminates the need for the harness, thereby reducing the number of parts and steps as well as improving productivity and quality. A flexure of a suspension assembly must be manufactured very precisely. The present invention provides a new tab structure either integral with or separate from the flexure. Wires bridge over to an extension on the tab structure at a predetermined distance from the end of the load beam. Positioning holes, using the extreme flatness of the tab structure, align the wires with the bonding pads of a head. The suspension assembly is subsequently bonded to the head, and the unwanted tab structure is removed to complete the head suspension assembly.

    摘要翻译: 本发明提供了一种用于磁存储系统中的磁头悬挂组件的新的凸片结构。 在现有技术的组装方法中,线束暂时保持线组件。 本发明消除了对线束的需要,从而减少了部件和步骤的数量,并且提高了生产率和质量。 必须非常精确地制造悬架组件的弯曲。 本发明提供了与弯曲部一体或与挠曲件分离的新的凸片结构。 导线在距离负载梁的端部预定距离处跨接到翼片结构上的延伸部。 使用突片结构的极度平坦度的定位孔将导线与头部的接合垫对准。 悬挂组件随后结合到头部,并且去除不需要的翼片结构以完成头部悬挂组件。

    Magnetic slider, head gimbal assembly and method for manufacturing the same
    3.
    发明申请
    Magnetic slider, head gimbal assembly and method for manufacturing the same 有权
    磁性滑块,头万向架组件及其制造方法

    公开(公告)号:US20080062565A1

    公开(公告)日:2008-03-13

    申请号:US11899605

    申请日:2007-09-05

    IPC分类号: G11B5/60

    CPC分类号: G11B5/4853

    摘要: Embodiments of the present invention provide a magnetic slider of which terminals have a sufficiently large process margin for the laser condition in the SBB process. According to one embodiment, a magnetic slider comprises: a read element and a write element; plural wiring lines which are connected to the read element and the write element; a protective film which covers the read element, the write element and the plural-wiring lines; plural slider pads formed on the protective film; and plural studs which respectively connect the slider pads and the wiring lines and are covered by the protective film, wherein each of the slider pads comprises a chromium film, a nickel iron film and a gold film, the nickel iron film is formed between the chromium film and the gold film, and the chromium film is formed between the nickel iron film and one of the studs and is in contact with the protective film.

    摘要翻译: 本发明的实施例提供了一种磁性滑块,其端子在SBB过程中具有足够大的处理余量用于激光条件。 根据一个实施例,磁性滑块包括:读取元件和写入元件; 连接到读取元件和写入元件的多个布线; 覆盖读取元件,写入元件和多个布线的保护膜; 形成在保护膜上的多个滑块; 以及分别连接滑块和布线并被保护膜覆盖的多个螺栓,其中每个滑块包括铬膜,镍铁膜和金膜,镍铁膜形成在铬 膜和金膜,并且在镍铁膜和其中一个螺柱之间形成铬膜,并与保护膜接触。

    Magnetic slider, head gimbal assembly and method for manufacturing the same
    4.
    发明授权
    Magnetic slider, head gimbal assembly and method for manufacturing the same 有权
    磁性滑块,头万向架组件及其制造方法

    公开(公告)号:US08125734B2

    公开(公告)日:2012-02-28

    申请号:US11899605

    申请日:2007-09-05

    IPC分类号: G11B5/60 G11B5/31 G11B15/64

    CPC分类号: G11B5/4853

    摘要: Embodiments of the present invention provide a magnetic slider of which terminals have a sufficiently large process margin for the laser condition in the SBB process. According to one embodiment, a magnetic slider comprises: a read element and a write element; plural wiring lines which are connected to the read element and the write element; a protective film which covers the read element, the write element and the plural-wiring lines; plural slider pads formed on the protective film; and plural studs which respectively connect the slider pads and the wiring lines and are covered by the protective film, wherein each of the slider pads comprises a chromium film, a nickel iron film and a gold film, the nickel iron film is formed between the chromium film and the gold film, and the chromium film is formed between the nickel iron film and one of the studs and is in contact with the protective film.

    摘要翻译: 本发明的实施例提供了一种磁性滑块,其端子在SBB过程中具有足够大的处理余量用于激光条件。 根据一个实施例,磁性滑块包括:读取元件和写入元件; 连接到读取元件和写入元件的多个布线; 覆盖读取元件,写入元件和多个布线的保护膜; 形成在保护膜上的多个滑块; 以及分别连接滑块和布线并被保护膜覆盖的多个螺柱,其中每个滑块包括铬膜,镍铁膜和金膜,镍铁膜形成在铬 膜和金膜,并且在镍铁膜和其中一个螺柱之间形成铬膜,并与保护膜接触。

    Coating process and equipment for reduced resist consumption
    5.
    发明授权
    Coating process and equipment for reduced resist consumption 有权
    降低抗蚀剂消耗的涂层工艺和设备

    公开(公告)号:US07803720B2

    公开(公告)日:2010-09-28

    申请号:US12019981

    申请日:2008-01-25

    申请人: Seiji Nakagawa

    发明人: Seiji Nakagawa

    IPC分类号: H01L21/31

    摘要: A coating system and method of coating semiconductor wafers is disclosed that is able to maintain a wet condition on the outer portion of the semiconductor wafer to provide ease of spreading for a photo-resist or anti-reflective coating (ARC) that is being dispensed. The system can include a plurality of nozzles on a movable arm. A first nozzle dispenses a pre-wet solvent onto the semiconductor wafer. A second nozzle then dispenses the photo-resist or ARC coating onto the semiconductor wafer. A third nozzle dispenses additional pre-wet solvent onto the outer edge of the semiconductor wafer as the photo-resist or ARC coating is being dispensed. The nozzles dispense solutions onto the semiconductor wafer as it rotates. The system produces semiconductor wafers with few coating defects and uses less photo-resist or ARC coating.

    摘要翻译: 公开了涂覆系统和涂覆半导体晶片的方法,其能够在半导体晶片的外部部分上保持湿润状态,以便于正在分配的光刻胶或抗反射涂层(ARC)的铺展性。 系统可以在可动臂上包括多个喷嘴。 第一喷嘴将预湿溶剂分配到半导体晶片上。 然后,第二喷嘴将光刻胶或ARC涂层分配到半导体晶片上。 当分配光刻胶或ARC涂层时,第三个喷嘴将另外的预湿溶剂分配到半导体晶片的外边缘上。 喷嘴在旋转时将溶液分配到半导体晶片上。 该系统生产具有很少涂层缺陷的半导体晶片,并且使用较少的光刻胶或ARC涂层。

    Device for transmitting speech information
    6.
    发明授权
    Device for transmitting speech information 有权
    用于发送语音信息的装置

    公开(公告)号:US07457741B2

    公开(公告)日:2008-11-25

    申请号:US11091480

    申请日:2005-03-29

    IPC分类号: G10L21/00 H04R25/00

    CPC分类号: G10L21/0364

    摘要: A device (1) for transmitting speech information to the human body, comprising: a microphone (2) for inputting speech from an external source; a speech signal processor (20) that produces a consonant-clarified signal based on the input speech signal; a carrier signal generator (6) that produces a carrier signal; an amplitude modulator (8) that modulates the amplitude of the carrier signal based on the consonant-clarified signal; and a vibrator (12) that transmits mechanical vibrations based on the amplitude-modulated output signal; the speech signal processor (20) comprising: a consonant extracting unit that extracts the consonant parts from the speech signal; and a repetition processing unit that adds the extracted consonant parts to the speech signal to produce a consonant-clarified signal in which each of the consonant parts of the speech signal is repeated two or more times. This speech information transmitting device realizes good discriminability of speech information.

    摘要翻译: 一种用于向人体发送语音信息的装置(1),包括:麦克风(2),用于从外部源输入语音; 语音信号处理器(20),其基于所述输入语音信号产生辅音澄清信号; 载波信号发生器(6),其产生载波信号; 振幅调制器(8),其基于所述辅音清晰的信号来调制载波信号的幅度; 以及基于调幅输出信号传递机械振动的振动器(12); 语音信号处理器(20)包括:辅音提取单元,从语音信号中提取辅音部分; 以及重复处理单元,其将提取的辅音部分添加到语音信号,以产生其中语音信号的每个辅音部分重复两次或更多次的辅音澄清信号。 该语音信息发送装置实现语音信息的良好判别性。

    Audio information transmitting apparatus and the method thereof, and a vibrator holding structure
    7.
    发明授权
    Audio information transmitting apparatus and the method thereof, and a vibrator holding structure 有权
    音频信息发送装置及其方法以及振动器保持结构

    公开(公告)号:US07088224B2

    公开(公告)日:2006-08-08

    申请号:US10792779

    申请日:2004-03-05

    IPC分类号: H04B3/36

    CPC分类号: H04R25/606

    摘要: An audio information transmitting apparatus for transmitting audio information to a human body, comprises an audio signal generating unit in which an audio signal is generated based on inputted audio, an audio information recognizing unit in which the audio signal is recognized as audio information, a vibration signal generating unit in which a vibration signal is generated based on the audio information, a vibration transmitter for transmitting mechanical vibration based on the vibration signal, wherein the vibration signal generating unit modulates a carrier signal having a predetermined frequency based on a predetermined pulse-like pattern corresponding to the audio information so as to generate the vibration signal.

    摘要翻译: 一种用于向人体发送音频信息的音频信息发送装置包括:音频信号生成单元,其中基于输入的音频生成音频信号;音频信息识别单元,其中音频信号被识别为音频信息;振动 信号发生单元,其中基于所述音频信息产生振动信号;振动发送器,用于基于所述振动信号发送机械振动,其中所述振动信号产生单元基于预定的脉冲状调制具有预定频率的载波信号 模式对应于音频信息,以产生振动信号。

    FLUID DISPENSE SYSTEM
    8.
    发明申请
    FLUID DISPENSE SYSTEM 审中-公开
    流体歧管系统

    公开(公告)号:US20080199596A1

    公开(公告)日:2008-08-21

    申请号:US11677240

    申请日:2007-02-21

    申请人: Seiji Nakagawa

    发明人: Seiji Nakagawa

    IPC分类号: B05D1/02

    CPC分类号: B05B15/50 B05B14/00

    摘要: A system and method for dispensing fluid onto a surface during a manufacturing process. A fluid storage container holds a chemical, such as resist, used in a semiconductor lithography process. When not dispensing the chemical over the surface of a wafer, a pump and nozzle dispense the chemical into a dedicated dispense receptacle. A drain and pump may return the contents of the dispense receptacle to the fluid storage container for reuse.

    摘要翻译: 一种用于在制造过程中将流体分配到表面上的系统和方法。 流体存储容器容纳用于半导体光刻工艺中的化学品,例如抗蚀剂。 当不将化学品分配在晶片的表面上时,泵和喷嘴将化学品分配到专用分配容器中。 排水和泵可以将分配容器的内容物返回流体储存容器以供重新使用。

    Apparatus and method for heating semiconductor wafers with improved temperature uniformity
    9.
    发明申请
    Apparatus and method for heating semiconductor wafers with improved temperature uniformity 审中-公开
    具有改善温度均匀性的用于加热半导体晶片的装置和方法

    公开(公告)号:US20080076077A1

    公开(公告)日:2008-03-27

    申请号:US11524291

    申请日:2006-09-21

    申请人: Seiji Nakagawa

    发明人: Seiji Nakagawa

    IPC分类号: G03F7/26

    CPC分类号: G03F7/40 H01L21/67109

    摘要: Apparatuses and methods for heating semiconductor wafers with high temperature uniformity are described. In particular, rotation of the hot plate and/or wafer during heating operations such as the post exposure bake (PEB) can compensate for non-circular temperature gradients caused by the random generation of air currents and other non-uniform environmental conditions within the oven chamber. Temperature variations caused by these influences, while not easily corrected through zonal heater adjustment alone, are a major determinant of critical dimension control and consequently the overall semiconductor quality.

    摘要翻译: 描述了用于加热具有高温均匀性的半导体晶片的装置和方法。 特别地,加热操作(例如后曝光烘烤(PEB))中的热板和/或晶片的旋转可以补偿由烤箱内随机产生气流和其它不均匀环境条件引起的非圆形温度梯度 房间。 由这些影响引起的温度变化,虽然不能单独通过区域加热器调节而不容易校正,是关键尺寸控制和总体半导体质量的主要决定因素。

    Correction Of Resist Critical Dimension Variations In Lithography Processes
    10.
    发明申请
    Correction Of Resist Critical Dimension Variations In Lithography Processes 审中-公开
    光刻过程中抵抗关键尺寸变化的修正

    公开(公告)号:US20080044739A1

    公开(公告)日:2008-02-21

    申请号:US11465185

    申请日:2006-08-17

    IPC分类号: G03C5/00 G06F17/50 G03F1/00

    CPC分类号: G03F1/70 G03F1/00

    摘要: According to one aspect, a method is provided for preparing a photoresist mask set adapted to correct for critical dimension variations resulting from topography effects in a semiconductor device. A plurality of rules is established for correcting critical dimension variations resulting from topography effects associated with predetermined structural combinations. A photoresist mask set is then prepared according to rules corresponding to structural combinations present in a semiconductor device to be manufactured.

    摘要翻译: 根据一个方面,提供了一种用于制备适于校正由半导体器件中的形貌效应引起的临界尺寸变化的光致抗蚀剂掩模组的方法。 建立了用于校正由与预定结构组合相关联的地形效应导致的临界尺寸变化的多个规则。 然后根据对应于要制造的半导体器件中存在的结构组合的规则制备光致抗蚀剂掩模组。