Driving apparatus, industrial instrument, exposure apparatus, and device manufacturing method
    2.
    发明授权
    Driving apparatus, industrial instrument, exposure apparatus, and device manufacturing method 有权
    驱动装置,工业仪器,曝光装置和装置制造方法

    公开(公告)号:US08115425B2

    公开(公告)日:2012-02-14

    申请号:US12267965

    申请日:2008-11-10

    申请人: Yasuhiro Motegi

    发明人: Yasuhiro Motegi

    IPC分类号: H02K41/00 H02P1/00 H02P3/00

    摘要: A driving apparatus electrically drives first and second components built in an industrial instrument. The first component drives a first element, and the second component drives a second element at a velocity higher than that of the first component. The driving apparatus includes a housing including a supply inlet and an exhaust outlet. A fan forms an air current so that air is taken into the housing through the supply inlet and is exhausted from inside the housing through the exhaust outlet. A driving circuit block is accommodated in the housing so as to be cooled by the air current, and includes a first driving circuit to electrically drive the first component, and a second driving circuit to electrically drive the second component. The second driving circuit is inserted upstream of the first driving circuit along the air current in the housing. A cooling unit regulates a temperature of the air exhausted from inside the housing through the exhaust outlet so as to decrease a temperature difference between the air taken into the housing through the supply inlet and the air exhausted from inside the housing through the exhaust outlet.

    摘要翻译: 驱动装置电驱动内置在工业仪器中的第一和第二部件。 第一部件驱动第一元件,第二部件以比第一元件的速度高的速度驱动第二元件。 驱动装置包括具有供给口和排气口的壳体。 风扇形成气流,使得空气通过供应入口进入壳体,并且通过排气出口从壳体内部排出。 驱动电路块容纳在壳体中以便被气流冷却,并且包括用于电驱动第一部件的第一驱动电路和用于电驱动第二部件的第二驱动电路。 第二驱动电路沿着壳体中的气流插入第一驱动电路的上游。 冷却单元调节通过排气出口从壳体内部排出的空气的温度,以便通过供应入口减少进入壳体的空气与通过排气出口从壳体内排出的空气之间的温差。

    DRIVING APPARATUS, INDUSTRIAL INSTRUMENT, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
    3.
    发明申请
    DRIVING APPARATUS, INDUSTRIAL INSTRUMENT, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD 有权
    驱动装置,工业仪器,曝光装置和装置制造方法

    公开(公告)号:US20090218964A1

    公开(公告)日:2009-09-03

    申请号:US12267965

    申请日:2008-11-10

    申请人: Yasuhiro Motegi

    发明人: Yasuhiro Motegi

    IPC分类号: H02K41/02 H05K7/20

    摘要: A driving apparatus which electrically drives a component built in an industrial instrument, comprises a housing including a supply inlet and an exhaust outlet, a fan configured to form an air current so that air is taken into the housing through the supply inlet and exhausted from inside the housing through the exhaust outlet, a driving circuit block which is accommodated in the housing so as to be cooled by the air current, and configured to electrically drive the component, and a cooling unit configured to regulate a temperature of the air exhausted from inside the housing through the exhaust outlet so as to decrease a temperature difference between the air taken into the housing through the supply inlet and the air exhausted from inside the housing through the exhaust outlet.

    摘要翻译: 一种用于驱动内置在工业仪器中的部件的驱动装置,包括:壳体,包括供应入口和排气出口,风扇构造成形成气流,使得空气通过供应入口进入壳体并从内部排出 所述壳体通过所述排气口,驱动电路块,其容纳在所述壳体中以被所述气流冷却,并且构造成电驱动所述部件;以及冷却单元,其构造成调节从内部排出的空气的温度 所述壳体通过所述排气出口减小通过所述供应入口吸入所述壳体的空气与通过所述排气出口从所述壳体内部排出的空气之间的温度差。