公开(公告)号：US07469603B2

公开(公告)日：2008-12-30

申请号：US10595430

申请日：2004-10-20

申请人： Masaya Nagata ,  Hiroshi Nishitake ,  Koji Fukumoto ,  Kazuhiro Matsuhisa ,  Atsuhito Yasui

发明人： Masaya Nagata ,  Hiroshi Nishitake ,  Koji Fukumoto ,  Kazuhiro Matsuhisa ,  Atsuhito Yasui

IPC分类号： G01L3/02

CPC分类号： G01C19/5712

摘要： An angular velocity detector using a vibrator made of an annular thin film. The detector also has electrodes arranged ingeniously to have high detection sensitivity for angular velocities. The detector can detect angular velocities in two axial directions simultaneously. The detector has support portions (1105), (1106) which are formed over a first substrate (1123) and poised above the surface of the first substrate (1100) at a certain spacing therefrom. Resilient support bodies are supported to the support portions and include outer springs (1102) and inner springs (1103). A vibrator (1101) is mounted via the resilient support. An exciting means consisting of a magnet (1124) and an exciting electrode (1108) excites the vibrator to vibrate in a certain direction of vibrations. When the vibrator (1101) is excited to vibrate in the direction of vibrations by the exciting means and an angular velocity acts from the outside, a displacement detection means consisting of a detection electrode (1109) and electrodes (1120) detects the displacement of the vibrator (1101) in a direction perpendicular to the direction of vibrations in response to the angular velocity. The vibrator (1101) or an angular velocity detection portion including the vibrator (1101) is electromagnetically driven to vibrate.

摘要翻译： 一种使用由环形薄膜制成的振动器的角速度检测器。 检测器还具有巧妙地设置为具有高的角速度检测灵敏度的电极。 检测器可同时检测两个轴向的角速度。 检测器具有形成在第一基板（1123）上并且以与其一定间隔从第一基板（1100）的表面上方定位的支撑部分（1106）。 弹性支撑体支撑在支撑部分上并且包括外弹簧（1102）和内弹簧（1103）。 振动器（1101）经由弹性支撑件安装。 由磁体（1124）和激励电极（1108）组成的激励装置激励振动器在某个振动方向上振动。 当激励振动器（1101）被激励装置振动的方向振动并且角速度从外部作用时，由检测电极（1109）和电极（1120）组成的位移检测装置检测位移检测装置 振动器（1101）在垂直于振动方向的方向上响应于角速度。 振动器（1101）或包括振动器（1101）的角速度检测部分被电磁驱动以振动。

公开(公告)号：US20070151332A1

公开(公告)日：2007-07-05

申请号：US10595430

申请日：2004-10-20

申请人： Masaya Nagata ,  Hiroshi Nishitake ,  Koji Fukumoto ,  Kazuhiro Matsuhisa ,  Atsuhito Yasui

发明人： Masaya Nagata ,  Hiroshi Nishitake ,  Koji Fukumoto ,  Kazuhiro Matsuhisa ,  Atsuhito Yasui

IPC分类号： G01M1/00

CPC分类号： G01C19/5712

摘要： An angular velocity detector using a vibrator made of an annular thin film. The detector also has electrodes arranged ingeniously to have high detection sensitivity for angular velocities. The detector can detect angular velocities in two axial directions simultaneously. The detector has support portions (1105), (1106) which are formed over a first substrate (1123) and poised above the surface of the first substrate (1100) at a certain spacing therefrom. Resilient support bodies are supported to the support portions and include outer springs (1102) and inner springs (1103). A vibrator (1101) is mounted via the resilient support. An exciting means consisting of a magnet (1124) and an exciting electrode (1108) excites the vibrator to vibrate in a certain direction of vibrations. When the vibrator (1101) is excited to vibrate in the direction of vibrations by the exciting means and an angular velocity acts from the outside, a displacement detection means consisting of a detection electrode (1109) and electrodes (1120) detects the displacement of the vibrator (1101) in a direction perpendicular to the direction of vibrations in response to the angular velocity. The vibrator (1101) or an angular velocity detection portion including the vibrator (1101) is electromagnetically driven to vibrate.

摘要翻译： 一种使用由环形薄膜制成的振动器的角速度检测器。 检测器还具有巧妙地设置为具有高的角速度检测灵敏度的电极。 检测器可同时检测两个轴向的角速度。 检测器具有形成在第一基板（1123）上并且以与其一定间隔从第一基板（1100）的表面上方定位的支撑部分（1106）。 弹性支撑体支撑在支撑部分上并且包括外弹簧（1102）和内弹簧（1103）。 振动器（1101）经由弹性支撑件安装。 由磁体（1124）和激励电极（1108）组成的激励装置激励振动器在某个振动方向上振动。 当激励振动器（1101）被激励装置振动的方向振动并且角速度从外部作用时，由检测电极（1109）和电极（1120）组成的位移检测装置检测位移检测装置 振动器（1101）在垂直于振动方向的方向上响应于角速度。 振动器（1101）或包括振动器（1101）的角速度检测部分被电磁驱动以振动。