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    Angular velocity detector, method of detection of angular velocities using angular velocity detector, and method of fabricating angular velocity detector
    1.
    发明授权
    Angular velocity detector, method of detection of angular velocities using angular velocity detector, and method of fabricating angular velocity detector 失效
    角速度检测器，使用角速度检测器检测角速度的方法以及制造角速度检测器的方法

    公开(公告)号：US07469603B2

    公开(公告)日：2008-12-30

    申请号：US10595430

    申请日：2004-10-20

    申请人： Masaya Nagata ,  Hiroshi Nishitake ,  Koji Fukumoto ,  Kazuhiro Matsuhisa ,  Atsuhito Yasui

    发明人： Masaya Nagata ,  Hiroshi Nishitake ,  Koji Fukumoto ,  Kazuhiro Matsuhisa ,  Atsuhito Yasui

    IPC分类号： G01L3/02

    CPC分类号： G01C19/5712

    摘要： An angular velocity detector using a vibrator made of an annular thin film. The detector also has electrodes arranged ingeniously to have high detection sensitivity for angular velocities. The detector can detect angular velocities in two axial directions simultaneously. The detector has support portions (1105), (1106) which are formed over a first substrate (1123) and poised above the surface of the first substrate (1100) at a certain spacing therefrom. Resilient support bodies are supported to the support portions and include outer springs (1102) and inner springs (1103). A vibrator (1101) is mounted via the resilient support. An exciting means consisting of a magnet (1124) and an exciting electrode (1108) excites the vibrator to vibrate in a certain direction of vibrations. When the vibrator (1101) is excited to vibrate in the direction of vibrations by the exciting means and an angular velocity acts from the outside, a displacement detection means consisting of a detection electrode (1109) and electrodes (1120) detects the displacement of the vibrator (1101) in a direction perpendicular to the direction of vibrations in response to the angular velocity. The vibrator (1101) or an angular velocity detection portion including the vibrator (1101) is electromagnetically driven to vibrate.

    摘要翻译： 一种使用由环形薄膜制成的振动器的角速度检测器。 检测器还具有巧妙地设置为具有高的角速度检测灵敏度的电极。 检测器可同时检测两个轴向的角速度。 检测器具有形成在第一基板（1123）上并且以与其一定间隔从第一基板（1100）的表面上方定位的支撑部分（1106）。 弹性支撑体支撑在支撑部分上并且包括外弹簧（1102）和内弹簧（1103）。 振动器（1101）经由弹性支撑件安装。 由磁体（1124）和激励电极（1108）组成的激励装置激励振动器在某个振动方向上振动。 当激励振动器（1101）被激励装置振动的方向振动并且角速度从外部作用时，由检测电极（1109）和电极（1120）组成的位移检测装置检测位移检测装置 振动器（1101）在垂直于振动方向的方向上响应于角速度。 振动器（1101）或包括振动器（1101）的角速度检测部分被电磁驱动以振动。

    Angular velocity detector, method of detection of angular velocities using angular velocity detector, and method of fabricating angular velocity detector
    2.
    发明申请
    Angular velocity detector, method of detection of angular velocities using angular velocity detector, and method of fabricating angular velocity detector 失效
    角速度检测器，使用角速度检测器检测角速度的方法以及制造角速度检测器的方法

    公开(公告)号：US20070151332A1

    公开(公告)日：2007-07-05

    申请号：US10595430

    申请日：2004-10-20

    申请人： Masaya Nagata ,  Hiroshi Nishitake ,  Koji Fukumoto ,  Kazuhiro Matsuhisa ,  Atsuhito Yasui

    发明人： Masaya Nagata ,  Hiroshi Nishitake ,  Koji Fukumoto ,  Kazuhiro Matsuhisa ,  Atsuhito Yasui

    IPC分类号： G01M1/00

    CPC分类号： G01C19/5712

    摘要： An angular velocity detector using a vibrator made of an annular thin film. The detector also has electrodes arranged ingeniously to have high detection sensitivity for angular velocities. The detector can detect angular velocities in two axial directions simultaneously. The detector has support portions (1105), (1106) which are formed over a first substrate (1123) and poised above the surface of the first substrate (1100) at a certain spacing therefrom. Resilient support bodies are supported to the support portions and include outer springs (1102) and inner springs (1103). A vibrator (1101) is mounted via the resilient support. An exciting means consisting of a magnet (1124) and an exciting electrode (1108) excites the vibrator to vibrate in a certain direction of vibrations. When the vibrator (1101) is excited to vibrate in the direction of vibrations by the exciting means and an angular velocity acts from the outside, a displacement detection means consisting of a detection electrode (1109) and electrodes (1120) detects the displacement of the vibrator (1101) in a direction perpendicular to the direction of vibrations in response to the angular velocity. The vibrator (1101) or an angular velocity detection portion including the vibrator (1101) is electromagnetically driven to vibrate.

    摘要翻译： 一种使用由环形薄膜制成的振动器的角速度检测器。 检测器还具有巧妙地设置为具有高的角速度检测灵敏度的电极。 检测器可同时检测两个轴向的角速度。 检测器具有形成在第一基板（1123）上并且以与其一定间隔从第一基板（1100）的表面上方定位的支撑部分（1106）。 弹性支撑体支撑在支撑部分上并且包括外弹簧（1102）和内弹簧（1103）。 振动器（1101）经由弹性支撑件安装。 由磁体（1124）和激励电极（1108）组成的激励装置激励振动器在某个振动方向上振动。 当激励振动器（1101）被激励装置振动的方向振动并且角速度从外部作用时，由检测电极（1109）和电极（1120）组成的位移检测装置检测位移检测装置 振动器（1101）在垂直于振动方向的方向上响应于角速度。 振动器（1101）或包括振动器（1101）的角速度检测部分被电磁驱动以振动。

    MEMS sensor driving device, MEMS sensor driving method, and active sensor using MEMS
    3.
    发明授权
    MEMS sensor driving device, MEMS sensor driving method, and active sensor using MEMS 失效
    MEMS传感器驱动装置，MEMS传感器驱动方法和使用MEMS的有源传感器

    公开(公告)号：US07451647B2

    公开(公告)日：2008-11-18

    申请号：US11539743

    申请日：2006-10-09

    申请人： Kazuhiro Matsuhisa ,  Koji Fukumoto ,  Masaya Nagata ,  Atsuhito Yasui

    发明人： Kazuhiro Matsuhisa ,  Koji Fukumoto ,  Masaya Nagata ,  Atsuhito Yasui

    IPC分类号： G01P15/13

    CPC分类号： G01P15/0888 ,  G01C19/56 ,  G01P15/08

    摘要： A MEMS sensor driving device drives a MEMS sensor including a supporter provided on a surface of a substrate, an elastic member having one end connected to the supporter, and an oscillator which is supported by another end of the elastic member in a suspended state over the surface of the substrate and which is displaceable for the substrate. The MEMS sensor driving device includes a detecting unit for detecting an oscillation of the oscillator, and a feedback unit for amplifying a signal representing the oscillation detected by the detecting unit and inputting the amplified signal as a driving signal to the MEMS sensor.

    摘要翻译： MEMS传感器驱动装置驱动MEMS传感器，其包括设置在基板的表面上的支撑件，具有连接到支撑件的一端的弹性构件，以及振动器，该弹性构件以悬挂状态被支撑在弹性构件的另一端上 该基板的表面并且可移动到该基板。 MEMS传感器驱动装置包括用于检测振荡器的振荡的检测单元和用于放大表示由检测单元检测到的振荡的信号并将放大的信号作为驱动信号输入到MEMS传感器的反馈单元。

    MEMS SENSOR DRIVING DEVICE, MEMS SENSOR DRIVING METHOD, AND ACTIVE SENSOR USING MEMS
    4.
    发明申请
    MEMS SENSOR DRIVING DEVICE, MEMS SENSOR DRIVING METHOD, AND ACTIVE SENSOR USING MEMS 失效
    MEMS传感器驱动装置，MEMS传感器驱动方法和使用MEMS的主动传感器

    公开(公告)号：US20070089512A1

    公开(公告)日：2007-04-26

    申请号：US11539743

    申请日：2006-10-09

    申请人： Kazuhiro Matsuhisa ,  Koji Fukumoto ,  Masaya Nagata ,  Atsuhito Yasui

    发明人： Kazuhiro Matsuhisa ,  Koji Fukumoto ,  Masaya Nagata ,  Atsuhito Yasui

    IPC分类号： G01P15/00

    CPC分类号： G01P15/0888 ,  G01C19/56 ,  G01P15/08

    摘要： A MEMS sensor driving device drives a MEMS sensor including a supporter provided on a surface of a substrate, an elastic member having one end connected to the supporter, and an oscillator which is supported by another end of the elastic member in a suspended state over the surface of the substrate and which is displaceable for the substrate. The MEMS sensor driving device includes a detecting unit for detecting an oscillation of the oscillator, and a feedback unit for amplifying a signal representing the oscillation detected by the detecting unit and inputting the amplified signal as a driving signal to the MEMS sensor.

    摘要翻译： MEMS传感器驱动装置驱动MEMS传感器，其包括设置在基板的表面上的支撑件，具有连接到支撑件的一端的弹性构件，以及振动器，该弹性构件以悬挂状态被支撑在弹性构件的另一端上 该基板的表面并且可移动到该基板。 MEMS传感器驱动装置包括用于检测振荡器的振荡的检测单元和用于放大表示由检测单元检测到的振荡的信号并将放大的信号作为驱动信号输入到MEMS传感器的反馈单元。

    SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
    5.
    发明申请
    SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE 有权
    半导体器件及制造半导体器件的方法

    公开(公告)号：US20120298993A1

    公开(公告)日：2012-11-29

    申请号：US13468457

    申请日：2012-05-10

    申请人： Masaya Nagata

    发明人： Masaya Nagata

    IPC分类号： H01L23/58 ,  H01L21/66

    CPC分类号： H01L23/481 ,  H01L21/76898 ,  H01L22/30 ,  H01L22/32 ,  H01L27/14618 ,  H01L2224/02372 ,  H01L2224/0401 ,  H01L2224/05 ,  H01L2224/05548 ,  H01L2224/13022 ,  H01L2224/13024 ,  H01L2224/131 ,  H01L2924/00 ,  H01L2924/014 ,  H01L2924/1461 ,  H01L21/768

    摘要： A semiconductor device including: a base material portion that includes a semiconductor substrate and an insulating film that is formed on one face of the semiconductor substrate and on which a vertical hole is formed along the thickness direction of the semiconductor substrate; a vertical hole wiring portion that includes a vertical hole electrode formed on a side wall of the base material portion that forms the vertical hole; a metallic film that is formed within the insulating film and that is electrically connected to the vertical hole wiring portion; and a conductive protective film that is formed to be in contact with the metallic film within the insulating film and that is formed in a region that includes a contact region of a probe during a probe test that is performed in the middle of manufacture on a film face of the metallic film.

    摘要翻译： 一种半导体器件，包括：基材部分，其包括半导体衬底和绝缘膜，所述绝缘膜形成在所述半导体衬底的一个面上，并且沿着所述半导体衬底的厚度方向形成有垂直孔; 垂直孔布线部分，其包括形成在形成垂直孔的基材部分的侧壁上的垂直孔电极; 金属膜，其形成在所述绝缘膜内并与所述垂直孔布线部电连接; 以及导电保护膜，其形成为与绝缘膜内的金属膜接触，并且形成在包括在制造中间在膜的中间进行的探针测试期间的探针的接触区域的区域 金属薄膜的表面。

    Machine managing method, machine managed by such method, machine managing device, machine managing system, and machine managing program
    6.
    发明授权
    Machine managing method, machine managed by such method, machine managing device, machine managing system, and machine managing program 有权
    机器管理方法，通过这种方法管理的机器，机器管理装置，机器管理系统和机器管理程序

    公开(公告)号：US06798995B2

    公开(公告)日：2004-09-28

    申请号：US10112878

    申请日：2002-04-02

    申请人： Masaya Nagata

    发明人： Masaya Nagata

    IPC分类号： G03G1500

    CPC分类号： G03G15/55 ,  B41J2/17566 ,  G03G15/5079 ,  G03G15/553 ,  G03G2215/00109 ,  G06Q10/087

    摘要： A terminal of a service provider is characterized in that it includes: a storage unit for registering unique information on a machine of a contract signer; a communications unit for detecting information on a remaining amount of a consumable article in the machine via telephone lines as a network; and a processing unit for making an instruction to dispatch a new machine to the contract signer if the remaining amount of the consumable article has reached a specified value. A comprehensive and essential service is provided covering from sales to continuous use of the machine, by which consumable articles are managed, replaced, and collected without requiring any work done by machine users or any financial burden borne by manufacturers selling the machine.

    摘要翻译： 服务提供商的终端的特征在于它包括：用于在合同签名者的机器上登记唯一信息的存储单元; 通信单元，用于经由电话线作为网络检测机器中的消耗品的剩余量的信息; 以及处理单元，用于如果所述可消耗品的剩余量已经达到指定值，则向所述合同签名者发出指示来发送新机器。 提供全面而重要的服务，涵盖从销售到机器的连续使用，消耗品被管理，更换和收集，不需要机器使用者的任何工作或出售机器的制造商承担的任何经济负担。

    Semiconductor storage device having a capacitor electrode formed of at least a platinum-rhodium oxide
    7.
    发明授权
    Semiconductor storage device having a capacitor electrode formed of at least a platinum-rhodium oxide 失效
    具有由至少一种铂 - 氧化铑形成的电容器电极的半导体存储装置

    公开(公告)号：US06180974B2

    公开(公告)日：2001-01-30

    申请号：US08986333

    申请日：1997-12-05

    申请人： Akira Okutoh ,  Masaya Nagata ,  Shun Mitarai ,  Yasuyuki Itoh

    发明人： Akira Okutoh ,  Masaya Nagata ,  Shun Mitarai ,  Yasuyuki Itoh

    IPC分类号： H01L27108

    CPC分类号： H01L28/60 ,  H01L28/55

    摘要： In a semiconductor storage device in a stack structure wherein a capacitor section having an upper electrode, a dielectric layer, and a lower electrode is connected with a transistor section by a plug, the lower electrode is formed in contact with the plug. The lower electrode is formed of at least an oxide of a platinum-rhodium alloy. In addition to the oxide of a platinum-rhodium alloy, platinum and/or a platinum-rhodium alloy can be used as materials for forming the lower electrode. The plug is formed of polysilicon or tungsten. When the plug is formed of polysilicon, the lower electrode is formed by sequentially laminating, for example, a film of the oxide of the platinum-rhodium alloy, a film of the platinum-rhodium alloy, and a film of the oxide of the platinum-rhodium alloy on the plug.

    摘要翻译： 在具有上电极，电介质层和下电极的电容器部分通过插头与晶体管部分连接的堆叠结构的半导体存储器件中，下电极形成为与插头接触。 下电极由至少一种铂 - 铑合金的氧化物形成。 除了铂 - 铑合金的氧化物之外，可以使用铂和/或铂 - 铑合金作为形成下电极的材料。 插头由多晶硅或钨制成。 当插塞由多晶硅形成时，下电极通过依次层压例如铂 - 铑合金的氧化物的膜，铂 - 铑合金的膜和铂的氧化物的膜 - 铑合金在插头上。

    Semiconductor device, fabrication process, and electronic device
    10.
    发明授权
    Semiconductor device, fabrication process, and electronic device 有权
    半导体器件，制造工艺和电子器件

    公开(公告)号：US08736027B2

    公开(公告)日：2014-05-27

    申请号：US13412256

    申请日：2012-03-05

    申请人： Masaya Nagata

    发明人： Masaya Nagata

    IPC分类号： H01L31/0232

    CPC分类号： H01L23/49827 ,  H01L21/76898 ,  H01L23/49866 ,  H01L27/14618 ,  H01L27/14683 ,  H01L2924/0002 ,  H01L2924/00

    摘要： A semiconductor device includes: a semiconductor substrate that includes a semiconductor; an electrode layer formed on a first surface side inside the semiconductor substrate; a frame layer laminated on the first surface of the semiconductor substrate; a conductor layer formed in an aperture portion formed by processing the semiconductor substrate and the frame layer in such a manner as to expose the electrode layer on the first surface of the semiconductor substrate; a vertical hole formed through the semiconductor substrate from a second surface of the semiconductor substrate to the conductor layer; and a wiring layer that is electrically connected to the electrode layer via the conductor layer at an end portion of the vertical hole, and that extends to the second surface of the semiconductor substrate.

    摘要翻译： 半导体器件包括：半导体衬底，其包括半导体; 形成在半导体衬底内的第一表面侧的电极层; 层叠在所述半导体衬底的第一表面上的框架层; 形成在通过以半导体衬底的第一表面露出电极层的方式处理半导体衬底和框架层而形成的开口部中的导体层; 从半导体衬底的第二表面到导体层的半导体衬底形成的垂直孔; 以及布线层，其在垂直孔的端部经由导体层电连接到电极层，并且延伸到半导体衬底的第二表面。