Method and apparatus for controlling film deposition
    1.
    发明授权
    Method and apparatus for controlling film deposition 有权
    用于控制膜沉积的方法和装置

    公开(公告)号:US08962073B2

    公开(公告)日:2015-02-24

    申请号:US13778072

    申请日:2013-02-26

    Abstract: The disclosure relates to a method for depositing films on a substrate which may form part of an LED or other types of display. In one embodiment, the disclosure relates to an apparatus for depositing ink on a substrate. The apparatus includes a chamber for receiving ink; a discharge nozzle having an inlet port and an outlet port, the discharge nozzle receiving a quantity of ink from the chamber at the inlet port and dispensing the quantity of ink from the outlet port; and a dispenser for metering the quantity of ink from the chamber to the inlet port of the discharge nozzle; wherein the chamber receives ink in liquid form having a plurality of suspended particles and the quantity of ink is pulsatingly metered from the chamber to the discharge nozzle; and the discharge nozzle evaporates the carrier liquid and deposits the solid particles on the substrate.

    Abstract translation: 本公开涉及一种用于在可以形成LED或其他类型的显示器的一部分的衬底上沉积膜的方法。 在一个实施例中,本公开涉及一种用于在基底上沉积墨的装置。 该装置包括用于接收墨水的腔室; 具有入口和出口的排出喷嘴,所述排出喷嘴在所述入口处从所述室接收一定量的墨,并从所述出口分配墨水量; 以及分配器,用于计量从所述腔室到所述排放喷嘴的入口的墨水量; 其中所述腔室容纳具有多个悬浮颗粒的液体形式的墨水,并且所述墨水量从所述腔室脉动地计量到所述排放喷嘴; 并且排出喷嘴使载液蒸发并将固体颗粒沉积在基板上。

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