Abstract:
A method for analyzing liquid samples may comprise applying a liquid to a cMUT device having a plurality of sensors, drying the plurality of sensors, electronically detecting an agent bound to each of the plurality of sensors, wherein the electrical circuit provides a sensor output responsive to a mechanical resonance frequency of the sensor, wherein the mechanical resonance frequency of the sensor is responsive to the binding of an agent to the functionalized membrane, and determining the mass of the agent bound to each of the plurality of sensors.
Abstract:
Surface modifications to sensors in an array give the sensors different functionalities for adsorbing or binding molecules. A first sensor in the array includes a first resonating member having a first surface comprising a polymer receptor material coated over a first underlying material. A second sensor includes a second resonating member having a second surface comprising the polymer receptor material coated over a second underlying material that is different than the first underlying material. The first underlying material, the second underlying material, and the polymer receptor material are selected such that the first resonating member, having a combination of the polymer receptor material and the first underlying material, has a different ability to adsorb or bind a mass of one or more analytes than does the second resonating member having a combination of the polymer receptor material with the second underlying material. Methods for fabricating sensors with surface modifications are also provided.