MULTI-NOZZLE TUBULAR PLASMA DEPOSITION BURNER FOR PRODUCING PREFORMS AS SEMI-FINISHED PRODUCTS FOR OPTICAL FIBERS
    1.
    发明申请
    MULTI-NOZZLE TUBULAR PLASMA DEPOSITION BURNER FOR PRODUCING PREFORMS AS SEMI-FINISHED PRODUCTS FOR OPTICAL FIBERS 审中-公开
    多喷嘴管式等离子体沉积式燃烧器,用于生产用于光纤纤维的半成品产品

    公开(公告)号:US20110220027A1

    公开(公告)日:2011-09-15

    申请号:US13130198

    申请日:2009-12-17

    IPC分类号: C23C4/12 C23C4/04

    摘要: The invention relates to a multi-nozzle, tubular plasma deposition burner (1) for producing preforms as semi-finished products for optical fibers, wherein a media stream containing glass starting material and a carrier gas is fed to the burner (1), means for feeding at least one dopant using at least one precursor gas and a substantially perpendicular orientation of the burner gas longitudinal axis relative to the center axis of the substrate (4). According to the invention, a first partial stream of a first gas or gas mixture, in particular a precursor gas, is fed to the plasma and to the substrate (4) by way of at least one nozzle running in the burner longitudinal axis and a second partial stream of the first gas or of another gas or gas mixture, in particular a precursor gas, is fed to the plasma and the substrate by way of another nozzle (5); said gases or gas mixtures are fed in such a way that said partial streams combine in the vicinity of the substrate.

    摘要翻译: 本发明涉及一种用于生产作为光纤半成品的预成型件的多喷嘴管状等离子体沉积燃烧器(1),其中含有玻璃原料和载气的介质流被供给到燃烧器(1),装置 用于使用燃烧器气体纵向轴线相对于基板(4)的中心轴线的至少一个前体气体和基本上垂直的取向来供给至少一种掺杂剂。 根据本发明,通过在燃烧器纵向轴线上运行的至少一个喷嘴将第一气体或气体混合物,特别是前体气体的第一部分流供给到等离子体和衬底(4),并且 第一气体或另一种气体或气体混合物,特别是前体气体的第二部分流通过另一个喷嘴(5)供给到等离子体和基板; 所述气体或气体混合物以这样的方式进料,使得所述部分流在基底附近结合。