公开(公告)号：US20240329290A1

公开(公告)日：2024-10-03

申请号：US18529322

申请日：2023-12-05

Applicant: Meta Platforms Technologies, LLC

Inventor： Richard Farrell ,  Bo Zhao ,  Siddharth Buddhiraju ,  Nihar Ranjan Mohanty ,  Keith Rozenburg ,  Zhaohui Yang

IPC: F21V8/00 ,  G02B27/01

CPC classification number: G02B6/0016 ,  G02B6/0035 ,  G02B6/0065 ,  G02B27/0172 ,  G02B2027/0178

Abstract: A bilayer binary 2D surface relief grating includes a primary grating layer having an array of primary grating elements, and a secondary grating layer having an array of secondary grating elements overlying the primary grating layer, where the secondary grating elements are at least partially laterally offset from the primary grating elements. A method of manufacturing such a surface relief grating includes forming a low refractive index layer over a substrate, the low refractive index layer including a primary sub-layer having an array of primary openings and a secondary sub-layer overlying the primary sub-layer and having an array of secondary openings, where the secondary openings are at least partially laterally offset from the primary openings, and forming a high refractive index layer within the primary and secondary openings.