TECHNIQUES FOR CHARACTERIZING FILMS ON OPTICALLY CLEAR SUBSTRATES USING ELLIPSOMETRY

    公开(公告)号:US20230025649A1

    公开(公告)日:2023-01-26

    申请号:US17382134

    申请日:2021-07-21

    Abstract: Various embodiments set forth techniques for characterizing films on optically clear substrates using ellipsometry. In some embodiments, a spectroscopic ellipsometer is configured to generate a light beam that has a relatively small spot size and is substantially absorbed by an optically clear substrate, thereby reducing or eliminating reflections from an interface between the substrate and air. Optical simulations can be performed to determine values for various parameters associated with the ellipsometer that minimize the reflections from the interface between the substrate and air and maximize reflections from an interface between a film and the substrate. In addition, graded films that include multiple layers can be analyzed using models of multiple layers.

    METHODS FOR FABRICATING SURFACE-RELIEF GRATING BASED ARCHITECTURES USING FUSION BONDING

    公开(公告)号:US20250093560A1

    公开(公告)日:2025-03-20

    申请号:US18825830

    申请日:2024-09-05

    Abstract: A method of fabricating a layered waveguide display comprises imprinting a surface-relief grating (SRG) on a first substrate, filling grating grooves of the SRG with a backfill material, depositing a first layer of an index-matching material on the SRG, and bonding the first layer of the index-matching material on the SRG to a first side of a second substrate. The first substrate and the SRG are characterized by a first refractive index and a second refractive index, respectively. The backfill material is characterized by a third refractive index greater than the first refractive index and the second refractive index. The index-matching material is characterized by a fourth refractive index greater than the first refractive index and the second refractive index. In some embodiments, the backfill material is the same as the index-matching material. The second substrate is characterized by a fifth refractive index matching the fourth refractive index.

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