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公开(公告)号：US06677565B1
公开(公告)日：2004-01-13
申请号：US09135734
申请日：1998-08-18
IPC分类号： G02B704
CPC分类号： G02B7/346 , G02B21/245
摘要： The present invention provides a method and apparatus for high-speed autofocus and tilt of an inspection surface in a microscope system. The method and apparatus herein described projects an array of spots, lines, circles, grids or other shapes on the surface to be adjusted. The superposition of the array on the surface is imaged by a CCD camera and captured for subsequent analysis. Analysis of the captured image determines both the distance and angle through which the surface must be adjusted to bring it into the focal plane of the optical system. Focus and tilt error is estimated by comparing image dilation and distortion with calibrated data.
摘要翻译： 本发明提供了一种用于显微镜系统中的检查表面的高速自动对焦和倾斜的方法和装置。 这里描述的方法和装置在要调节的表面上投射一系列点，线，圆，网格或其它形状。 表面上阵列的叠加由CCD照相机成像，并被捕获用于随后的分析。 拍摄图像的分析确定了必须调整表面以使其进入光学系统的焦平面的距离和角度。 通过将图像扩张和失真与校准数据进行比较来估计焦点和倾斜误差。
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公开(公告)号：US06314212B1
公开(公告)日：2001-11-06
申请号：US09260599
申请日：1999-03-02
IPC分类号： G06K936
CPC分类号： G01B11/02
摘要： The present invention provides a method and apparatus for high precision image metrology. A feature dimension from the image is determined by measuring corresponding features in the Fourier power spectrum of the image with substantially improved precision due to immunity from noise and system response. Operationally, a digital image of the sample is acquired at sufficient resolution to capture the feature of interest. A sample widow is chosen which substantially isolates the feature of interest. The feature window is then piecewise extended to a predetermined window size for effective Fourier Transform interpolation. A Fourier Power Spectrum of the sample widow is generated at high sample density such that the loci of extremal points indicative of a feature dimension is identified with high precision. The relative spacing of the extremal points is measured and related to the desired feature dimension. Utilizing the power spectrum of the image feature in the manner herein disclosed advantageously provides a way to measure feature dimensions with high precision. The method of the present invention is substantially independent of variations in image system performance, typical system noise and sample optical properties.
摘要翻译： 本发明提供了一种用于高精度图像计量的方法和装置。 通过从噪声和系统响应的抗扰度以大大提高的精度测量图像的傅里叶功率谱中的对应特征来确定来自图像的特征维度。 在操作上，以足够的分辨率获取样本的数字图像以捕获感兴趣的特征。 选择基本上分离感兴趣特征的样本遗。。 然后将特征窗口分段扩展到预定的窗口大小以进行有效傅立叶变换内插。 在高样本密度下产生样本遗A的傅里叶功率谱，使得以高精度识别指示特征维度的极值点的位点。 测量极值点的相对间距并与期望的特征尺寸相关。 以本文公开的方式利用图像特征的功率谱有利地提供了以高精度测量特征尺寸的方式。 本发明的方法基本上独立于图像系统性能，典型系统噪声和样品光学性质的变化。
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