公开(公告)号：US20090173896A1

公开(公告)日：2009-07-09

申请号：US11720638

申请日：2005-11-29

申请人： Michael Loeken ,  Jakob Willi Neff ,  Juergen Klen ,  Sven Probst

发明人： Michael Loeken ,  Jakob Willi Neff ,  Juergen Klen ,  Sven Probst

IPC分类号： G01J3/10 ,  H05G2/00

CPC分类号： H05G2/003 ,  B82Y10/00 ,  G03F7/70033 ,  G03F7/70916

摘要： The present invention relates to a method of operating an electrical discharge device (12) comprising at least one first electrode (14) and at least one second electrode (16) at a distance therefrom, which electrodes are electrically connected to a power supply (18) and, upon ignition of a first gas discharge (22) between the electrodes (14, 16), transmit an electrical current (1), as a result of which a plasma (24) is produced in a working gas (26), which plasma emits radiation (28), in particular extreme ultraviolet and/or soft X-ray radiation, which is passed via a solid angle (30) into a chamber (32) outside the electrodes (14, 16). In order to prevent erosion at the electrodes (14, 16), it is proposed that the formation of a secondary plasma (34) in the chamber (32) is suppressed by a device (42).

摘要翻译： 本发明涉及一种操作放电装置（12）的方法，该放电装置包括至少一个第一电极（14）和至少一个第二电极（16），该电极与电源（18）电连接 ），并且在电极（14,16）之间的第一气体放电（22）点燃时，传输电流（1），结果在工作气体（26）中产生等离子体（24）， 该等离子体发射辐射（28），特别是经由立体角（30）通过电极（14,16）外部的室（32）中的极紫外线和/或软X射线辐射。 为了防止电极（14,16）的侵蚀，建议通过装置（42）抑制在室（32）中形成二级等离子体（34）。

公开(公告)号：US08227777B2

公开(公告)日：2012-07-24

申请号：US11720638

申请日：2005-11-29

申请人： Michael Loeken ,  Jakob Willi Neff ,  Juergen Klein ,  Sven Probst

发明人： Michael Loeken ,  Jakob Willi Neff ,  Juergen Klein ,  Sven Probst

IPC分类号： A61N2/00

CPC分类号： H05G2/003 ,  B82Y10/00 ,  G03F7/70033 ,  G03F7/70916

摘要： The present invention relates to a method of operating an electrical discharge device (12) comprising at least one first electrode (14) and at least one second electrode (16) at a distance therefrom, which electrodes are electrically connected to a power supply (18) and, upon ignition of a first gas discharge (22) between the electrodes (14, 16), transmit an electrical current (I), as a result of which a plasma (24) is produced in a working gas (26), which plasma emits radiation (28), in particular extreme ultraviolet and/or soft X-ray radiation, which is passed via a solid angle (30) into a chamber (32) outside the electrodes (14, 16). In order to prevent erosion at the electrodes (14, 16), it is proposed that the formation of a secondary plasma (34) in the chamber (32) is suppressed by a device (42).

摘要翻译： 本发明涉及一种操作放电装置（12）的方法，该放电装置包括至少一个第一电极（14）和至少一个第二电极（16），该电极与电源（18）电连接 ），并且在点燃电极（14,16）之间的第一气体放电（22）时，传输电流（I），结果在工作气体（26）中产生等离子体（24）， 该等离子体发射辐射（28），特别是经由立体角（30）通过电极（14,16）外部的室（32）中的极紫外和/或软X射线辐射。 为了防止电极（14,16）的侵蚀，建议通过装置（42）抑制在室（32）中形成二级等离子体（34）。

公开(公告)号：US10542612B2

公开(公告)日：2020-01-21

申请号：US13126256

申请日：2009-11-03

申请人： Anatoli Saveliev ,  Sven Probst

发明人： Anatoli Saveliev ,  Sven Probst

IPC分类号： H05B41/288

摘要： A device (1) for providing an amount of power to a gas discharge lamp (2) comprises a control circuit (3) for controlling a supply circuit (4) for supplying the power according to a power versus voltage graph (10). A calculator (30) calculates a boundary voltage value as a function of a measured voltage value of a voltage signal that has been measured after a predefined time-interval from a cold start of the gas discharge lamp (2). A more accurate boundary voltage value results in more stability and in less time required to reach a steady state. The calculator (30) may be arranged for calculating the boundary voltage value as a function of a minimum voltage value of the voltage signal and of a steady state voltage value of the voltage signal. A memory (31) may store voltage values of the voltage signal and a processor (32) may update these voltage values.

公开(公告)号：US20110204822A1

公开(公告)日：2011-08-25

申请号：US13126256

申请日：2009-11-03

申请人： Anatoli Saveliev ,  Sven Probst

发明人： Anatoli Saveliev ,  Sven Probst

IPC分类号： H05B37/02

CPC分类号： H05B41/288 ,  H05B41/392

摘要： A device (1) for providing an amount of power to a gas discharge lamp (2) comprises a control circuit (3) for controlling a supply circuit (4) for supplying the power according to a power versus voltage graph (10). A calculator (30) calculates a boundary voltage value as a function of a measured voltage value of a voltage signal that has been measured after a predefined time-interval from a cold start of the gas discharge lamp (2). A more accurate boundary voltage value results in more stability and in less time required to reach a steady state. The calculator (30) may be arranged for calculating the boundary voltage value as a function of a minimum voltage value of the voltage signal and of a steady state voltage value of the voltage signal. A memory (31) may store voltage values of the voltage signal and a processor (32) may update these voltage values.

摘要翻译： 一种用于向气体放电灯（2）提供一定量的电力的装置（1）包括控制电路（3），用于根据功率对电压图（10）控制用于供电的供电电路（4）。 计算器（30）根据从气体放电灯（2）的冷启动起预定的时间间隔后测量的电压信号的测量电压值来计算边界电压值。 更准确的边界电压值导致更稳定并且在更短的时间内达到稳定状态。 计算器（30）可以被布置为计算作为电压信号的最小电压值和电压信号的稳态电压值的函数的边界电压值。 存储器（31）可以存储电压信号的电压值，并且处理器（32）可以更新这些电压值。