Method for forming thin solid lubricious films and film articles made
thereby
    1.
    发明授权
    Method for forming thin solid lubricious films and film articles made thereby 失效
    由此形成薄的固体润滑膜和薄膜制品的方法

    公开(公告)号:US5002798A

    公开(公告)日:1991-03-26

    申请号:US335406

    申请日:1989-04-10

    摘要: Thin films of solid lubricious metal chalcogenides, such as MoS.sub.2, are grown on stainless steel substrates by pulsed laser evaporation (P.L.E.). X-ray photoelectron spectroscopy of PLE deposited MoS.sub.2 films grown at substrate temperatures up to 300.degree. C. have the same stoichiometry as bulk MoS.sub.2. MoS.sub.2 PLE deposited films grown at 450.degree. C. are sulfur rich. These laser-deposited films have a granular structure and exhibit none of the dendritic structures typically observed in sputter-deposited films. The coefficients of friction of PLE films were measured in laboratory air and ranged from 0.09-0.25; the majority of values were between 0.16 and 0.20. These frictional coefficients are in the appropriate range for a solid lubricant.

    摘要翻译: 固体润滑金属硫属化物如MoS2的薄膜通过脉冲激光蒸发(P.L.E.)在不锈钢衬底上生长。 在高达300℃的衬底温度下生长的PLE沉积的MoS 2膜的X射线光电子能谱具有与体MoS2相同的化学计量。 在450℃生长的MoS2 PLE沉积膜是富含硫的。 这些激光沉积膜具有颗粒结构,并且在溅射沉积膜中通常没有观察到树状结构。 在实验室空气中测量PLE膜的摩擦系数,范围为0.09-0.25; 大多数值在0.16和0.20之间。 这些摩擦系数在固体润滑剂的适当范围内。