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公开(公告)号:US20230320091A1
公开(公告)日:2023-10-05
申请号:US17713913
申请日:2022-04-05
Applicant: Micron Technology, Inc.
Inventor: Collin Howder , Jeffrey Ehorn , John D. Hopkins
IPC: H01L27/11582 , H01L27/11556
CPC classification number: H01L27/11582 , H01L27/11556
Abstract: A memory array comprising strings of memory cells comprises laterally-spaced memory-blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers directly above conductor material of a conductor tier. Channel-material-string constructions extend through the insulative and conductive tiers to a lowest of the conductive tiers. The channel-material-string constructions individually comprise a charge-blocking-material string, a storage-material string laterally-inward of the charge-blocking-material string, a charge-passage-material string laterally-inward of the storage-material string, and a channel-material string laterally-inward of the charge-passage-material string. A lowest surface of the charge-blocking-material string that is above a lowest surface of the lowest conductive tier is below a lowest surface of a lowest of the insulative tiers that is immediately-above the lowest conductive tier. Conductive material in the lowest conductive tier directly electrically couples together the channel material of individual of the channel-material strings and the conductor material of the conductor tier. Structure independent of method is disclosed.