公开(公告)号：US10438968B2

公开(公告)日：2019-10-08

申请号：US15924143

申请日：2018-03-16

Applicant: Micron Technology, Inc.

Inventor： John M. Meldrin ,  Yushi Hu ,  Rita J. Klein ,  John D. Hopkins ,  Hongbin Zhu ,  Gordon A. Haller ,  Luan C. Tran

IPC: H01L27/115 ,  H01L27/11582 ,  H01L29/49 ,  H01L27/11524 ,  H01L27/11556 ,  H01L27/1157 ,  H01L21/28

Abstract: Some embodiments include a memory array which has a stack of alternating first and second levels. Channel material pillars extend through the stack, and vertically-stacked memory cell strings are along the channel material pillars. A common source is under the stack and electrically coupled to the channel material pillars. The common source has conductive protective material over and directly against metal silicide, with the conductive protective material being a composition other than metal silicide. Some embodiments include methods of fabricating integrated structures.