-
1.发明授权Microfluidic-device systems and methods for manufacturing microfluidic-device systems 有权用于制造微流体装置系统的微流体装置系统和方法公开(公告)号：US08353682B2
公开(公告)日：2013-01-15
申请号：US12274120
申请日：2008-11-19
IPC分类号： F04B17/00
CPC分类号： F04B43/043 , F04B43/046 , F04B43/06 , Y10T29/49002
摘要： A microfluidic device is described. The microfluidic device comprises at least one transport channel and at least one working chamber, wherein the at least one transport channel and the at least one working chamber are separated from each other by a common deformable wall. The at least one transport channel is for containing a transport fluid and the at least one working chamber is for containing a working fluid. The microfluidic device comprises at least one pair of electrodes for changing the pressure on the working fluid such that when the pressure on the working fluid is changed, the deformable wall deforms, resulting in a change of the cross-section of the at least one transport channel. The working chamber comprises a flexible wall different from the common deformable wall and at least one electrode of the at least one pair of electrodes is provided on the flexible wall.
摘要翻译： 描述微流体装置。 所述微流体装置包括至少一个输送通道和至少一个工作室，其中所述至少一个输送通道和所述至少一个工作室通过共同的可变形壁彼此分开。 所述至少一个输送通道用于容纳输送流体，并且所述至少一个工作室用于容纳工作流体。 微流体装置包括至少一对电极，用于改变工作流体上的压力，使得当工作流体上的压力改变时，可变形壁变形，导致至少一个输送器的横截面的变化 渠道。 工作室包括与公共可变形壁不同的柔性壁，并且至少一对电极的至少一个电极设置在柔性壁上。
-
公开(公告)号：US20090129952A1
公开(公告)日：2009-05-21
申请号：US12274120
申请日：2008-11-19
CPC分类号： F04B43/043 , F04B43/046 , F04B43/06 , Y10T29/49002
摘要： A microfluidic device is described. The microfluidic device comprises at least one transport channel and at least one working chamber, wherein the at least one transport channel and the at least one working chamber are separated from each other by a common deformable wall. The at least one transport channel is for containing a transport fluid and the at least one working chamber is for containing a working fluid. The microfluidic device comprises at least one pair of electrodes for changing the pressure on the working fluid such that when the pressure on the working fluid is changed, the deformable wall deforms, resulting in a change of the cross-section of the at least one transport channel. The working chamber comprises a flexible wall different from the common deformable wall and at least one electrode of the at least one pair of electrodes is provided on the flexible wall.
摘要翻译： 描述微流体装置。 所述微流体装置包括至少一个输送通道和至少一个工作室，其中所述至少一个输送通道和所述至少一个工作室通过共同的可变形壁彼此分开。 所述至少一个输送通道用于容纳输送流体，并且所述至少一个工作室用于容纳工作流体。 微流体装置包括至少一对电极，用于改变工作流体上的压力，使得当工作流体上的压力改变时，可变形壁变形，导致至少一个输送器的横截面的变化 渠道。 工作室包括与公共可变形壁不同的柔性壁，并且至少一对电极的至少一个电极设置在柔性壁上。
-
公开(公告)号：US20120049694A1
公开(公告)日：2012-03-01
申请号：US13217118
申请日：2011-08-24
申请人： Rob van Schaijk , Martijn Goedbloed
发明人： Rob van Schaijk , Martijn Goedbloed
CPC分类号： H01L41/1136 , H01L41/22 , H02N2/186 , Y10T29/42
摘要： A micromachined piezoelectric energy harvester and methods of fabricating a micromachined piezoelectric energy harvester are disclosed. In one embodiment, the micromachined piezoelectric energy harvester comprises a resonating beam formed of a polymer material, at least one piezoelectric transducer embedded in the resonating beam, and at least one mass formed on the resonating beam. The resonating beam is configured to generate mechanical stress in the at least one piezoelectric transducer, and the at least one piezoelectric transducer is configured to generate electrical energy in response to the mechanical stress.
摘要翻译： 公开了一种微加工的压电能量收集器和制造微加工的压电能量收集器的方法。 在一个实施例中，微加工的压电能量收集器包括由聚合物材料形成的谐振梁，嵌入在谐振梁中的至少一个压电换能器和形成在谐振梁上的至少一个质量。 谐振梁被配置为在至少一个压电换能器中产生机械应力，并且至少一个压电换能器被配置为响应于机械应力产生电能。
-
公开(公告)号：US09190936B2
公开(公告)日：2015-11-17
申请号：US13703151
申请日：2011-07-04
申请人： Yasuyuki Naito , Rob Van Schaijk , Martijn Goedbloed , Christine De Nooijer , Dennis Hohlfeld , Geert Altena
发明人： Yasuyuki Naito , Rob Van Schaijk , Martijn Goedbloed , Christine De Nooijer , Dennis Hohlfeld , Geert Altena
摘要： Disclosed is a highly reliable inductive vibration power generator wherein mechanical damping caused by the phenomenon of electrostatic pulling-in (stiction) and the like is suppressed even if the potential of an electret is increased and/or the gap between an electrode and the electret is reduced in order to increase the amount of power generation. The two surfaces of a movable substrate are respectively provided with first electrets and second electrets. By means of providing first electrodes and second electrodes to a lower substrate and an upper substrate and facing the respective electrets with a predetermined gap therebetween, electrostatic force is caused to arise on both sides of the movable substrate, and the pulling of the movable substrate in only one direction is prevented.
摘要翻译： 公开了一种高度可靠的感应振动发电机，其中即使驻极体的电位增加和/或电极与驻极体之间的间隙是静电引入（静电）等现象也引起的机械阻尼是 减少以增加发电量。 可移动基板的两个表面分别设置有第一驻极体和第二驻极体。 通过向下基板和上基板设置第一电极和第二电极并且以其间具有预定间隙的方式面对相应的驻极体，在可移动基板的两侧上产生静电力，并且可移动基板的拉动 只有一个方向被阻止。
-
公开(公告)号：US08658512B2
公开(公告)日：2014-02-25
申请号：US13382335
申请日：2010-07-01
申请人： Tom Sterken , Geert Altena , Martijn Goedbloed , Robert Puers
发明人： Tom Sterken , Geert Altena , Martijn Goedbloed , Robert Puers
IPC分类号： H01L21/20
摘要： A method for fabricating an out-of-plane variable overlap MEMS capacitor comprises: providing a substrate (40) comprising a first layer (41), a second layer (42), and a third layer (43) stacked on top of one another; and etching a plurality of first trenches (70) through the third layer (43), through the second layer (42), and into the first layer (41) using a single etching mask. Etching the plurality of first trenches (70) defines a plurality of first fingers (51) in the third layer (43) and a plurality of second fingers (52) in the first layer (41). By using a single mask, the process is self-aligned. The method further comprises removing the second layer (42) in a first region where the plurality of first trenches (70) are provided, thereby forming a spacing or gap between the plurality of first fingers (51) and the plurality of second fingers (52).
摘要翻译： 一种用于制造面外可变重叠MEMS电容器的方法包括：提供包括第一层（41），第二层（42）和堆叠在彼此顶部的第三层（43）的衬底（40） ; 以及通过所述第三层（43）通过所述第二层（42）蚀刻多个第一沟槽（70），并使用单个蚀刻掩模蚀刻到所述第一层（41）中。 蚀刻多个第一沟槽（70）在第三层（43）中限定多个第一指状物（51）和第一层（41）中的多个第二指状物（52）。 通过使用单个掩模，该过程是自对准的。 该方法还包括在设置有多个第一沟槽（70）的第一区域中移除第二层（42），从而在多个第一指状物（51）和多个第二指状物（52）之间形成间隔或间隙 ）。
-
公开(公告)号：US20120171836A1
公开(公告)日：2012-07-05
申请号：US13382335
申请日：2010-07-01
申请人： Tom Sterken , Geert Altena , Martijn Goedbloed , Robert Puers
发明人： Tom Sterken , Geert Altena , Martijn Goedbloed , Robert Puers
IPC分类号： H01L21/02
摘要： A method for fabricating an out-of-plane variable overlap MEMS capacitor comprises: providing a substrate (40) comprising a first layer (41), a second layer (42), and a third layer (43) stacked on top of one another; and etching a plurality of first trenches (70) through the third layer (43), through the second layer (42), and into the first layer (41) using a single etching mask. Etching the plurality of first trenches (70) defines a plurality of first fingers (51) in the third layer (43) and a plurality of second fingers (52) in the first layer (41). By using a single mask, the process is self-aligned. The method further comprises removing the second layer (42) in a first region where the plurality of first trenches (70) are provided, thereby forming a spacing or gap between the plurality of first fingers (51) and the plurality of second fingers (52).
摘要翻译： 一种用于制造面外可变重叠MEMS电容器的方法包括：提供包括第一层（41），第二层（42）和堆叠在彼此顶部的第三层（43）的衬底（40） ; 以及通过所述第三层（43）通过所述第二层（42）蚀刻多个第一沟槽（70），并使用单个蚀刻掩模蚀刻到所述第一层（41）中。 蚀刻多个第一沟槽（70）在第三层（43）中限定多个第一指状物（51）和第一层（41）中的多个第二指状物（52）。 通过使用单个掩模，该过程是自对准的。 该方法还包括在设置有多个第一沟槽（70）的第一区域中移除第二层（42），从而在多个第一指状物（51）和多个第二指状物（52）之间形成间隔或间隙 ）。
-
公开(公告)号：US20130076202A1
公开(公告)日：2013-03-28
申请号：US13703151
申请日：2011-07-04
申请人： Yasuyuki Naito , Rob Van Schaijk , Martijn Goedbloed , Christine De Nooijer , Dennis Hohlfeld , Geert Altena
发明人： Yasuyuki Naito , Rob Van Schaijk , Martijn Goedbloed , Christine De Nooijer , Dennis Hohlfeld , Geert Altena
IPC分类号： H02N1/00
摘要： Disclosed is a highly reliable inductive vibration power generator wherein mechanical damping caused by the phenomenon of electrostatic pulling-in (stiction) and the like is suppressed even if the potential of an electret is increased and/or the gap between an electrode and the electret is reduced in order to increase the amount of power generation. The two surfaces of a movable substrate are respectively provided with first electrets and second electrets. By means of providing first electrodes and second electrodes to a lower substrate and an upper substrate and facing the respective electrets with a predetermined gap therebetween, electrostatic force is caused to arise on both sides of the movable substrate, and the pulling of the movable substrate in only one direction is prevented.
摘要翻译： 公开了一种高度可靠的感应振动发电机，其中即使驻极体的电位增加和/或电极与驻极体之间的间隙为静电引入（静电）等现象也引起的机械阻尼是 减少以增加发电量。 可移动基板的两个表面分别设置有第一驻极体和第二驻极体。 通过向下基板和上基板设置第一电极和第二电极并且以其间具有预定间隙的方式面对相应的驻极体，在可移动基板的两侧上产生静电力，并且可移动基板的拉动 只有一个方向被阻止。
-
8.发明授权Microstructure with enlarged mass and electrode area for kinetic to electrical energy conversion 有权微观结构具有扩大的质量和电极面积，用于动力学和电能转换公开(公告)号：US07880246B2
公开(公告)日：2011-02-01
申请号：US12324113
申请日：2008-11-26
申请人： Dennis Hohlfeld , Martijn Goedbloed
发明人： Dennis Hohlfeld , Martijn Goedbloed
IPC分类号： H01L27/14
CPC分类号： H02N1/06 , B81B3/0021 , H02N11/002
摘要： A microstructure has a substrate, a fixed electrode having a plurality of fixed fingers fixed to the substrate, a movable electrode having a body (28) and a plurality of fingers (22) extending from the body, the movable electrode being movable relative to the fixed fingers to vary a capacitance of the electrodes. The fixed fingers (21) extend in a first plane parallel to a main surface of the substrate, wherein the body of the movable electrode extends in a second plane adjacent to the first plane so that the body faces at least some of the plurality of fixed fingers. Such vertical integration can help enable such devices to be made more compact.
摘要翻译： 微结构具有基板，具有固定在基板上的多个固定指状物的固定电极，具有主体（28）和从主体延伸的多个指状物（22）的可动电极，所述可动电极相对于所述主体 固定的手指以改变电极的电容。 固定指状物（21）在平行于基底的主表面的第一平面中延伸，其中可移动电极的主体在与第一平面相邻的第二平面中延伸，使得主体面对多个固定的 手指。 这种垂直整合可以帮助使得这样的设备变得更加紧凑。
-
9.发明申请Microstructure with Enlarged Mass and Electrode Area for Kinetic to Electrical Energy Conversion 有权具有扩大质量的微结构和用于动能到电能转换的电极面积公开(公告)号：US20090140443A1
公开(公告)日：2009-06-04
申请号：US12324113
申请日：2008-11-26
申请人： Dennis Hohlfeld , Martijn Goedbloed
发明人： Dennis Hohlfeld , Martijn Goedbloed
CPC分类号： H02N1/06 , B81B3/0021 , H02N11/002
摘要： A microstructure has a substrate, a fixed electrode having a plurality of fixed fingers fixed to the substrate, a movable electrode having a body (28) and a plurality of fingers (22) extending from the body, the movable electrode being movable relative to the fixed fingers to vary a capacitance of the electrodes. The fixed fingers (21) extend in a first plane parallel to a main surface of the substrate, wherein the body of the movable electrode extends in a second plane adjacent to the first plane so that the body faces at least some of the plurality of fixed fingers. Such vertical integration can help enable such devices to be made more compact.
摘要翻译： 微结构具有基板，具有固定在基板上的多个固定指状物的固定电极，具有主体（28）和从主体延伸的多个指状物（22）的可动电极，所述可动电极相对于所述主体 固定的手指以改变电极的电容。 固定指状物（21）在平行于基底的主表面的第一平面中延伸，其中可移动电极的主体在与第一平面相邻的第二平面中延伸，使得主体面对多个固定的 手指。 这种垂直整合可以帮助使得这样的设备变得更加紧凑。
-
-
-
-
-
-
-
-
搜索结果
9 条记录 (耗时 0.02 秒)
