公开(公告)号：US09157888B2

公开(公告)日：2015-10-13

申请号：US14115818

申请日：2011-05-05

申请人： Mike Andersson ,  Lars Hultman ,  Anita Lloyd Spetz ,  Ruth Pearce ,  Rositsa Yakimova

发明人： Mike Andersson ,  Lars Hultman ,  Anita Lloyd Spetz ,  Ruth Pearce ,  Rositsa Yakimova

IPC分类号： H01L29/06 ,  G01N27/414

CPC分类号： G01N27/4146 ,  G01N27/4141 ,  H01L29/0673

摘要： A field effect transistor (20) for chemical sensing, comprising an electrically conducting and chemically sensitive channel (2) extending between drain (5) and source (6) electrodes. A gate electrode (7) is separated from the channel (2) by a gap (10) through which a chemical to be sensed can reach the channel (2) which comprises a continuous monocrystalline graphene layer (2a) arranged on an electrically insulating graphene layer substrate (1). The graphene layer (2a) extends between and is electrically connected to the source electrode (5) and the drain electrode (6). The substrate supports the graphene layer, allowing it to stay 2-dimensional and continuous, and enables it to be provided on a well defined surface, and be produced and added to the transistor as a separate part. This is beneficial for reproducibility and reduces the risk of damage to the graphene layer during production and after. Low detection limits with low variability between individual transistors are also enabled. There is also provided a chemical sensor (30) using the transistor (20) and a method for providing the transistor (20).

摘要翻译： 一种用于化学感测的场效应晶体管（20），包括在漏极（5）和源极（6）之间延伸的导电和化学敏感的通道（2）。 栅电极（7）通过间隙（10）与通道（2）分开，待检测的化学物质可通过该间隙（10）到达通道（2），通道（2）包括布置在电绝缘石墨烯上的连续单晶石墨烯层（2a） 层基板（1）。 石墨烯层（2a）在源电极（5）和漏电极（6）之间延伸并电连接。 衬底支撑石墨烯层，使其保持2维和连续，并使其能够在良好限定的表面上提供，并作为单独部分产生并添加到晶体管。 这有利于重现性，并降低在生产和之后石墨烯层损坏的风险。 单个晶体管之间的低可变性的低检测限也可实现。 还提供了使用晶体管（20）的化学传感器（30）和用于提供晶体管（20）的方法。