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公开(公告)号:US20240125736A1
公开(公告)日:2024-04-18
申请号:US18090950
申请日:2022-12-29
Applicant: Ming Chi University of Technology
Inventor: Sajal BIRING , Sheng-Chi Chen , Annada Sankar SADHU , Min-Chen Chuang , Kuan-Yu Chien
IPC: G01N27/622 , G01N33/18 , H01L21/02
CPC classification number: G01N27/622 , G01N33/1813 , H01L21/02186 , H01L21/02381
Abstract: The present invention relates to a Cu ion sensor, which greatly improves the sensitivity to Cu by a nitrogen-rich surface of a copper nitride thin film doped with a metal material. The present invention also relates to a Cu ion sensing method, in which Cu2+ is detected by contacting the Cu ion sensor of the present invention with the solution to be tested, and using the change in electrical conductivity of a copper nitride film doped with a metal material in the presence of Cu2+ in the solution.