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公开(公告)号：US09591696B2
公开(公告)日：2017-03-07
申请号：US14351489
申请日：2013-01-23
摘要： An object is to provide an induction heating method having a high power factor in which when thermal processing is performed through a plurality of heating coils receiving the supply of the current to generate mutual induction. In an induction heating method using an induction heating device that includes self-resonant circuits which feeds currents of equal frequency to a plurality of heating coils receiving the supply of the current to generate mutual induction is connected, wherein adjustment or control is performed to carry out an operation such that a first ratio of a reactance component of a mutual induction impedance to a resistance component of the mutual induction impedance between the adjacent self-resonant circuits and a second ratio of a reactance component of a self-impedance to a resistance component of the self-impedance in the self-resonant circuit are made equal to each other.
摘要翻译： 目的是提供一种具有高功率因数的感应加热方法，其中当通过接收电流供应的多个加热线圈进行热处理以产生互感时。 在使用感应加热装置的感应加热方法中，连接有包括馈送等于频率的多个加热线圈的电流的自谐振电路，该加热线圈接收电流的供给以产生互感，其中进行调节或控制 互相感应阻抗的电抗分量与相邻自谐振电路之间的互感阻抗的电阻分量的第一比率与自阻抗的电抗分量的第二比率与电阻分量的第二比率 使自谐振电路中的自身阻抗相等。
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2.发明申请INDUCTIVE HEATING DEVICE, METHOD FOR CONTROLLING INDUCTIVE HEATING DEVICE, AND PROGRAM 审中-公开电感加热装置，控制加热装置的方法和程序公开(公告)号：US20150289321A1
公开(公告)日：2015-10-08
申请号：US14439457
申请日：2013-10-30
发明人： Naoki Uchida
CPC分类号： H05B6/06 , H02M5/4585 , H05B6/04 , H05B6/104 , H05B6/44
摘要： A control is performed so that phase angles of outputs from resonant inverters fall within a predetermined range under a mutual induction environment. An inductive heating device (100) includes: a plurality of resonant inverters (30a, 30b) that supply power to a plurality of inductive heating coils (La, Lb), respectively, under a mutual induction environment; and a control circuit (40) that aligns drive frequencies so as to be in common among the resonant inverters and controls the drive frequencies commonly so that phase angles of the outputs from the plurality of the resonant inverters fall within a predetermined range. In addition, the control circuit individually controls coil currents flowing through the inductive heating coils so that the phase angles fall within a predetermined range.
摘要翻译： 执行控制，使得来自谐振逆变器的输出的相位角在相互感应环境下落在预定范围内。 感应加热装置（100）包括：在相互感应环境下分别向多个感应加热线圈（La，Lb）供电的多个谐振逆变器（30a，30b） 以及控制电路（40），其将驱动频率对准以使得谐振逆变器之间相同，并且共同地控制驱动频率，使得来自多个谐振逆变器的输出的相位角落在预定范围内。 此外，控制电路单独地控制流过感应加热线圈的线圈电流，使得相位角落在预定范围内。
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公开(公告)号：US10136476B2
公开(公告)日：2018-11-20
申请号：US14439457
申请日：2013-10-30
发明人： Naoki Uchida
摘要： A control is performed so that phase angles of outputs from resonant inverters fall within a predetermined range under a mutual induction environment. An inductive heating device (100) includes: a plurality of resonant inverters (30a, 30b) that supply power to a plurality of inductive heating coils (La, Lb), respectively, under a mutual induction environment; and a control circuit (40) that aligns drive frequencies so as to be in common among the resonant inverters and controls the drive frequencies commonly so that phase angles of the outputs from the plurality of the resonant inverters fall within a predetermined range. In addition, the control circuit individually controls coil currents flowing through the inductive heating coils so that the phase angles fall within a predetermined range.
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公开(公告)号：US20150108118A1
公开(公告)日：2015-04-23
申请号：US14351489
申请日：2013-01-23
摘要： [Object] An object is to provide an induction heating method having a high power factor in which when thermal processing is performed through a plurality of heating coils receiving the supply of the current to generate mutual induction, it is possible to easily and rapidly perform synchronization control on a coil current and in which when the current is varied, even if the speed of control on the current value is increased, this little affects an inverter phase angle.[Solving means] In an induction heating method using an induction heating device that heats an item to be heated and includes a plurality of self-resonant circuits to which a resonant high-frequency power supply feeding currents of equal frequency to a plurality of heating coils receiving the supply of the current to generate mutual induction is connected, the phases of impedances within a system are made to coincide with each other to minimize the phases. From the time of starting up, the phase is made to become an inverter phase that can bring the phase difference of the currents close to zero. Control on the frequency and the current value is performed so that the inverter phase is controlled within a given range.
摘要翻译： 本发明的目的是提供一种具有高功率因数的感应加热方法，其中当通过接收电流供应的多个加热线圈进行热处理以产生互感时，可以容易且快速地执行同步 控制线圈电流，并且当电流变化时，即使当前值的控制速度增加，这几乎不影响逆变器相位角。 [解决方案]在使用加热待加热物品的感应加热装置的感应加热方法中，包括多个自谐振电路，多个自谐振电路具有与多个加热线圈相同频率的谐振高频电源 接收电流供应以产生相互感应的连接，系统内的阻抗相互相互重合以使相位最小化。 从启动时起，相位变为可以使电流的相位差接近零的逆变器相位。 执行对频率和电流值的控制，使得逆变器相位被控制在给定范围内。
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公开(公告)号：US09674898B2
公开(公告)日：2017-06-06
申请号：US14564690
申请日：2014-12-09
发明人： Naoki Uchida , Yoshihiro Okazaki , Kazuhiro Ozaki
CPC分类号： H05B6/06 , H01L21/67109 , H05B6/105 , H05B6/44
摘要： A semiconductor substrate thermal treatment apparatus enables excellent heating control in suppressing influence of mutual induction between induction heating coils even when the induction heating coils are arranged in the vertical direction while providing horizontal magnetic flux to susceptors. The apparatus indirectly heats wafers mounted on horizontally-arranged susceptors including induction heating coils to form alternate-current magnetic flux in a direction parallel to a mount face of the susceptor. The wafer are arranged at an outer circumferential side of the susceptor. The induction heating coils are structured with at least one main heating coil and subordinate heating coils electromagnetically coupled with the main heating coil. Inverse coupling coils inversely-coupled to the subordinate heating coils are provided to the main heating coil, and zone control means separately controls a power ratio while synchronizing frequencies and current waveforms of current to the main heating coil and adjacent subordinate heating coils.
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