摘要:
To detect the density of a measurement component of a sample gas, infrared light is directed alternately through a measuring-light optical system and a reference-light optical system to a heated light sensor. The measuring-light optical system includes a sample cell, a first filter for transmitting infrared rays of a fixed wave-length band, and a temperature compensating cell having a gas which has a part of its absorption wave-length band within the transmission wave-length band of the first filter but has a spectrum different from the spectrum of the measurement component. The reference-light optical system includes a light throttle, an interference cell having a gas containing a fixed density of the measurement component, an adjustable-length interference compensating cell filled with the sample gas, and a second filter for transmitting rays of a wave-length band that includes the major part of the transmission wave-length band of the first filter. The compensating cell is set such that, with temperature fluctuations, variations in absorption by the temperature compensating cell in the wave-length band of the first filter are equal to variations in absorption by the interference cell within the wave-length band of the second filter.
摘要:
A particle component analyzing apparatus and method using a microwave induced plasma to perform element analysis of particles, such as particles existing in a clean room; wherein an aspirator scans a filter to draw particles collected on the filter, and using the microwaves to excite the drawn particles to cause generation of an emission spectrum having a plurality of wavelengths indicative of the elements of the particle, which are measured by a plurality of monochrometers, and converted by an optoelectric converter into electrical signals to identify the different elements in the particle. The invention uses means for obtaining the cube roots of the outputs from the optoelectric converter. By obtaining the ratio of cube root outputs corresponding to the diameters of particles preprocessed into spherical shape of a reference element and of an element to be measured, and then by obtaining the cube root of an output from an element in a measurement sample and by multiplying it by the ratio of cube roots with respect to the reference element, there is obtained an equivalent particle diameter corrected for differences in sensitivity between the elements. Means are provided for determining the composition of a particle from the emission spectrum and for calculating the composition ratios of a plurality of elements from the different emission intensities.
摘要:
A particle analyzer system that reduces size and cost, wherein particles are introduced into a cell, then the particles are irradiate in the cell with a laser beam, then atomic emission of the particles generated by the irradiation of the laser beam is transmitted, then a spectrum is obtained of the photo emission so transmitted, and the spectrum of the photo emission is detected and the wavelength of the laser beam is, other than the wavelength of the emission of the particles, is used to provide a filter to block the intrusion of the wavelength of the laser beam in a stage proceeding the photo emission.
摘要:
A particle component analyzing apparatus and method using a microwave induced plasma to perform element analysis of particles, such as particles existing in a clean room; wherein an aspirator scans a filter to draw particles collected on the filter, and using the microwaves to excite the drawn particles to cause generation of an emission spectrum having a plurality of wavelengths indicative of the elements of the particle, which are measured by a plurality of monochrometers, and converted by an optoelectric converter into electrical signals to identify the different elements in the particle. The invention uses means for obtaining the cube roots of the outputs from the optoelectric converter. By obtaining the ratio of cube root outputs corresponding to the diameters of particles preprocessed into spherical shape of a reference element and of an element to be measured, and then by obtaining the cube root of an output from an element in a measurement sample and by multiplying it by the ratio of cube roots with respect to the reference element, there is obtained an equivalent particle diameter corrected for differences in sensitivity between the elements. Means are provided for determining the composition of a particle from the emission spectrum and for calculating the composition ratios of a plurality of elements from the different emission intensities.