公开(公告)号：US06650461B2

公开(公告)日：2003-11-18

申请号：US10192111

申请日：2002-07-10

申请人： Mitsuro Atobe ,  Hiroshi Koeda ,  Shinichi Yotsuya

发明人： Mitsuro Atobe ,  Hiroshi Koeda ,  Shinichi Yotsuya

IPC分类号： G02B2600

CPC分类号： G02B26/0841

摘要： A spatial light modulator is constructed from a conductive silicon mirror substrate and a glass electrode substrate including sodium, anode-bonded together. The silicon mirror substrate has micromirrors arranged in a matrix, torsion bars coupling these micromirrors in the x-direction, and a frame coupled to both ends of the torsion bars. A glass electrode substrate has a central depression, a rim around the periphery thereof, pillars projecting from within the depression, and electrodes and wiring driving micromirrors formed within the depression in an inclining manner. Both ends of the torsion bars are bonded to the rim of the frame portion, and intermediate portions of the torsion bars are bonded to the pillars. Both ends of the torsion bars are cut away from the frame portion during dicing.

公开(公告)号：US6120124A

公开(公告)日：2000-09-19

申请号：US937559

申请日：1997-09-25

申请人： Mitsuro Atobe ,  Hiroshi Koeda ,  Shinichi Yotsuya

发明人： Mitsuro Atobe ,  Hiroshi Koeda ,  Shinichi Yotsuya

IPC分类号： B41J2/14 ,  B41J2/16 ,  C04B37/04 ,  B41J2/01

CPC分类号： B41J2/1629 ,  B41J2/14314 ,  B41J2/16 ,  B41J2/1623 ,  B41J2/1631 ,  B41J2/1645 ,  B41J2/1646 ,  C04B35/547 ,  C04B35/653 ,  C04B37/021 ,  B41J2002/14338 ,  B41J2202/11 ,  C04B2235/6562 ,  C04B2237/36 ,  C04B2237/525

摘要： An ink jet recording apparatus capable of ejecting ink droplets in which the volume is precisely and easily controlled. The gradient of the pixel to be printed, based on a digital gradient input signal, is provided for printing high resolution gradient images using a low drive voltage in this ink jet head. More specifically, the ink jet recording apparatus of the present invention will include a diaphragm formed at one part of a wall of each independent ejection chamber, with electrodes formed opposite each diaphragm and spaced therefrom at a predetermined gap distance. Ink droplets are selectively ejected from nozzle openings in the ejection chamber by applying a voltage to generate an electrostatic force which momentarily deforms the diaphragm. Moreover, plurality of independent electrodes oppose each diaphragm and a pulse voltage is applied to a predetermined number of electrodes according to a gradient signal to eject ink droplets of a volume determined by the gradient signal.

摘要翻译： 一种喷墨记录装置，能够喷射容积被精确且容易地控制的墨滴。 基于数字梯度输入信号的要打印的像素的梯度被提供用于在该喷墨头中使用低驱动电压打印高分辨率梯度图像。 更具体地，本发明的喷墨记录装置将包括形成在每个独立喷射室的壁的一部分处的隔膜，其中电极与每个隔膜形成并以预定的间隙距离隔开。 通过施加电压以产生使隔膜瞬间变形的静电力，墨滴从喷射室中的喷嘴开口选择性地喷射。 此外，多个独立电极与每个隔膜相对，并且根据梯度信号将脉冲电压施加到预定数量的电极，以喷射由梯度信号确定的体积的墨滴。

公开(公告)号：US06271955B1

公开(公告)日：2001-08-07

申请号：US09585880

申请日：2000-05-31

申请人： Mitsuro Atobe ,  Hiroshi Koeda ,  Shinichi Yotsuya

发明人： Mitsuro Atobe ,  Hiroshi Koeda ,  Shinichi Yotsuya

IPC分类号： G02B2600

CPC分类号： G02B26/0841

摘要： A spatial light modulator is constructed from a conductive silicon mirror substrate and a glass electrode substrate including sodium, anode-bonded together. The silicon mirror substrate has micromirrors arranged in a matrix, torsion bars coupling these micromirrors in the x-direction, and a frame coupled to both ends of the torsion bars. A glass electrode substrate has a central depression, a rim around the periphery thereof, pillars projecting from within the depression, and electrodes and wiring driving micromirrors formed within the depression in an inclining manner. Both ends of the torsion bars are bonded to the rim of the frame portion, and intermediate portions of the torsion bars are bonded to the pillars. Both ends of the torsion bars are cut away from the frame portion during dicing.

摘要翻译： 空间光调制器由导电硅镜基板和包括阳极粘合在一起的钠的玻璃电极基板构成。 硅镜基板具有以矩阵形式布置的微镜，在x方向上连接这些微镜的扭杆以及耦合到扭杆的两端的框架。 玻璃电极基板具有中央凹部，围绕其周边的边缘，从凹部内突出的支柱，以及以倾斜方式形成在凹部内的微电子驱动微镜的电极和布线。 扭杆的两端粘接到框架部分的边缘，并且扭杆的中间部分结合到支柱上。 在切割期间，扭杆的两端被切割离开框架部分。

公开(公告)号：US5999306A

公开(公告)日：1999-12-07

申请号：US756463

申请日：1996-11-26

申请人： Mitsuro Atobe ,  Hiroshi Koeda ,  Shinichi Yotsuya

发明人： Mitsuro Atobe ,  Hiroshi Koeda ,  Shinichi Yotsuya

IPC分类号： G02B26/00 ,  G02B26/08 ,  G03B21/00 ,  G03B21/26 ,  H01L21/84

CPC分类号： G02B26/0841

摘要： A spatial light modulator is constructed from a conductive silicon mirror substrate and a glass electrode substrate including sodium, anode-bonded together. The silicon mirror substrate has micromirrors arranged in a matrix, torsion bars coupling these micromirrors in the x-direction, and a frame coupled to both ends of the torsion bars. A glass electrode substrate has a central depression, a rim around the periphery thereof, pillars projecting from within the depression, and electrodes and wiring driving micromirrors formed within the depression in an inclining manner. Both ends of the torsion bars are bonded to the rim of the frame portion, and intermediate portions of the torsion bars are bonded to the pillars. Both ends of the torsion bars are cut away from the frame portion during dicing.

公开(公告)号：US5912684A

公开(公告)日：1999-06-15

申请号：US795413

申请日：1997-02-03

申请人： Masahiro Fujii ,  Keiichi Mukaiyama ,  Hiroyuki Maruyama ,  Tadaaki Hagata ,  Mitsuro Atobe ,  Shinichi Kamisuki ,  Shinichi Yotsuya ,  Hiroshi Koeda ,  Yoshihiro Ohno ,  Hitoshi Tanbo

发明人： Masahiro Fujii ,  Keiichi Mukaiyama ,  Hiroyuki Maruyama ,  Tadaaki Hagata ,  Mitsuro Atobe ,  Shinichi Kamisuki ,  Shinichi Yotsuya ,  Hiroshi Koeda ,  Yoshihiro Ohno ,  Hitoshi Tanbo

IPC分类号： B41J2/14 ,  B41J2/16 ,  C04B37/04 ,  B41J2/04 ,  B41J2/045

CPC分类号： B41J2/14314 ,  B41J2/16 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/14338 ,  B41J2202/11

摘要： An inkjet head comprising a nozzle, an ink passage in communication with the nozzle, a diaphragm provided at one part of the ink passage, and an electrode provided in opposition to the diaphragm whereby an electrical pulse is applied between the diaphragm and electrode to deform the diaphragm by means of electrostatic force, thereby ejecting ink droplets from the nozzle. The actuator contains at least a vibration chamber formed by the diaphragm and electrode, and is sealed or made airtight with the volume V so that the ratio between the actuator volume V and the volume .DELTA.V eliminated by a distortion of the diaphragm during ink-jet head drive is within the range 2.ltoreq.V/.DELTA.V.ltoreq.8.

摘要翻译： 一种喷墨头，包括喷嘴，与喷嘴连通的墨通道，设置在墨通道的一部分处的隔膜以及与隔膜相对设置的电极，由此在隔膜和电极之间施加电脉冲以使 通过静电力隔膜，从喷嘴喷出墨滴。 致动器至少包括由隔膜和电极形成的振动室，并且与体积V密封或制成气密，使得在喷墨期间通过隔膜的变形消除了致动器体积V和体积DELTA V之间的比率 磁头驱动器在2

公开(公告)号：US06452712B2

公开(公告)日：2002-09-17

申请号：US09895694

申请日：2001-06-29

申请人： Mitsuro Atobe ,  Hiroshi Koeda ,  Shinichi Yotsuya

发明人： Mitsuro Atobe ,  Hiroshi Koeda ,  Shinichi Yotsuya

IPC分类号： G02B2600

CPC分类号： G02B26/0841

摘要： A spatial light modulator is constructed from a conductive silicon mirror substrate and a glass electrode substrate including sodium, anode-bonded together. The silicon mirror substrate has micromirrors arranged in a matrix, torsion bars coupling these micromirrors in the x-direction, and a frame coupled to both ends of the torsion bars. A glass electrode substrate has a central depression, a rim around the periphery thereof, pillars projecting from within the depression, and electrodes and wiring driving micromirrors formed within the depression in an inclining manner. Both ends of the torsion bars are bonded to the rim of the frame portion, and intermediate portions of the torsion bars are bonded to the pillars. Both ends of the torsion bars are cut away from the frame portion during dicing.

摘要翻译： 空间光调制器由导电硅镜基板和包括阳极粘合在一起的钠的玻璃电极基板构成。 硅镜基板具有以矩阵形式布置的微镜，在x方向上连接这些微镜的扭杆以及耦合到扭杆的两端的框架。 玻璃电极基板具有中央凹部，围绕其周边的边缘，从凹部内突出的支柱，以及以倾斜方式形成在凹部内的微电子驱动微镜的电极和布线。 扭杆的两端粘接到框架部分的边缘，并且扭杆的中间部分结合到支柱上。 在切割期间，扭杆的两端被切割离开框架部分。

公开(公告)号：US6107115A

公开(公告)日：2000-08-22

申请号：US398263

申请日：1999-09-17

申请人： Mitsuro Atobe ,  Hiroshi Koeda ,  Shinichi Yotsuya

发明人： Mitsuro Atobe ,  Hiroshi Koeda ,  Shinichi Yotsuya

IPC分类号： G02B26/00 ,  G02B26/08 ,  G03B21/00 ,  G03B21/26 ,  H01L21/84

CPC分类号： G02B26/0841

摘要： A spatial light modulator is constructed from a conductive silicon mirror substrate and a glass electrode substrate including sodium, anode-bonded together. The silicon mirror substrate has micromirrors arranged in a matrix, torsion bars coupling these micromirrors in the x-direction, and a frame coupled to both ends of the torsion bars. A glass electrode substrate has a central depression, a rim around the periphery thereof, pillars projecting from within the depression, and electrodes and wiring driving micromirrors formed within the depression in an inclining manner. Both ends of the torsion bars are bonded to the rim of the frame portion, and intermediate portions of the torsion bars are bonded to the pillars. Both ends of the torsion bars are cut away from the frame portion during dicing.

公开(公告)号：US6117698A

公开(公告)日：2000-09-12

申请号：US99483

申请日：1998-06-17

申请人： Mitsuro Atobe ,  Shinichi Kamisuki ,  Shinichi Yotsuya ,  Hiroshi Koeda ,  Yoshihiro Ohno ,  Hitoshi Tanbo

发明人： Mitsuro Atobe ,  Shinichi Kamisuki ,  Shinichi Yotsuya ,  Hiroshi Koeda ,  Yoshihiro Ohno ,  Hitoshi Tanbo

IPC分类号： B41J2/14 ,  B41J2/16 ,  C04B37/04 ,  H01L21/00

CPC分类号： B41J2/1632 ,  B41J2/14314 ,  B41J2/16 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/14338 ,  B41J2002/14403 ,  B41J2202/11 ,  Y10T29/49401

摘要： A laminated, multi-substrate ink jet head and methods creating the same, wherein the ink jet head includes nozzle holes, emitting chambers respectively led to the nozzle holes, diaphragms formed on a wall of the emitting chambers, a common ink cavity for supplying ink to the emitting chambers through orifices and electrodes placed so as to face to the diaphragms so as to drive the diaphragms by static electricity. The lower substrate which forms the electrodes may include a plurality of indentations for mounting the electrode therein to serve as a gap spacing element for respective diaphragm/electrode pairs when the head is assembled. Alternatively, areas immediately beneath the diaphragm may be etched away to expand the vibrating chamber to a predetermined gap distance, or a membrane of a predetermined thickness may interpose the respective diaphragm and electrode substrates.

摘要翻译： 一种层叠的多基板喷墨头及其制造方法，其中喷墨头包括喷嘴孔，分别引导到喷嘴孔的发射室，形成在发射室的壁上的隔膜，用于供应墨水的公共墨腔 通过放置成面向隔膜的孔和电极到发射室，以便通过静电来驱动隔膜。 形成电极的下基板可以包括用于将电极安装在其中的多个凹槽，以当头部组装时用作各个隔膜/电极对的间隙间隔元件。 或者，隔膜下方的区域可以被蚀刻掉以使振动室膨胀到预定的间隙距离，或者预定厚度的膜可以插入相应的隔膜和电极基板。

公开(公告)号：US6113218A

公开(公告)日：2000-09-05

申请号：US477681

申请日：1995-06-07

申请人： Mitsuro Atobe ,  Shinichi Kamisuki ,  Shinichi Yotsuya ,  Hiroshi Koeda ,  Yoshihiro Ohno ,  Hitoshi Tanbo

发明人： Mitsuro Atobe ,  Shinichi Kamisuki ,  Shinichi Yotsuya ,  Hiroshi Koeda ,  Yoshihiro Ohno ,  Hitoshi Tanbo

IPC分类号： B41J2/14 ,  B41J2/16 ,  C04B37/04

CPC分类号： B41J2/1632 ,  B41J2/14314 ,  B41J2/16 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/14338 ,  B41J2002/14403 ,  B41J2202/11 ,  Y10T29/49401

摘要： A laminated, multi-substrate ink jet head and methods creating the same, wherein the ink jet head includes nozzle holes, emitting chambers respectively led to the nozzle holes, diaphragms formed on a wall of the emitting chambers, a common ink cavity for supplying ink to the emitting chambers through orifices and electrodes placed so as to face to the diaphragms so as to drive the diaphragms by static electricity. The lower substrate which forms the electrodes may include a plurality of indentations for mounting the electrode therein to serve as a gap spacing element for respective diaphragm/electrode pairs when the head is assembled. Alternatively, areas immediately beneath the diaphragm may be etched away to expand the vibrating chamber to a predetermined gap distance, or a membrane of a predetermined thickness may interpose the respective diaphragm and electrode substrates.

摘要翻译： 一种层叠的多基板喷墨头及其制造方法，其中喷墨头包括喷嘴孔，分别引导到喷嘴孔的发射室，形成在发射室的壁上的隔膜，用于供应墨水的公共墨腔 通过放置成面向隔膜的孔和电极到发射室，以便通过静电来驱动隔膜。 形成电极的下基板可以包括用于将电极安装在其中的多个凹槽，以当头部组装时用作各个隔膜/电极对的间隙间隔元件。 或者，隔膜下方的区域可以被蚀刻掉以使振动室膨胀到预定的间隙距离，或者预定厚度的膜可以插入相应的隔膜和电极基板。

公开(公告)号：US5734395A

公开(公告)日：1998-03-31

申请号：US481528

申请日：1995-09-11

申请人： Shinichi Kamisuki ,  Mitsuro Atobe ,  Hiroshi Koeda ,  Shinichi Yotsuya ,  Masahiro Fujii ,  Naoki Kobayashi

发明人： Shinichi Kamisuki ,  Mitsuro Atobe ,  Hiroshi Koeda ,  Shinichi Yotsuya ,  Masahiro Fujii ,  Naoki Kobayashi

IPC分类号： B41J2/045 ,  B41J2/16 ,  B41J2/05

CPC分类号： B41J2/04541 ,  B41J2/04578 ,  B41J2/16 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1646 ,  B41J2002/14379 ,  B41J2202/03

摘要： An ink jet head includes a common electrode formed on a semiconductor substrate. A charge is applied to the common electrode and an electrode disposed on another substrate in opposition to a diaphragm formed in the semiconductor substrate to electrostatically deform the diaphragm and eject ink. The common electrode comprises a single layer or multiple layer metallic coating forming ohmic contact on the semiconductor substrate. In addition, a group III or group V element is doped to a high concentration at the area on the semiconductor substrate where the common electrode is formed. The diaphragm can therefore vibrate at high speed. An ink jet head capable of high speed printing can be provided because supply and elimination of the charge to the diaphragm can be accomplished at high speed.

摘要翻译： PCT No.PCT / JP93 / 01849 Sec。 371 1995年9月11日第 102（e）1995年9月11日PCT PCT 1993年12月21日PCT公布。 公开号WO94 / 15791 日期1994年7月21日喷墨头包括形成在半导体衬底上的公共电极。 相对于在半导体衬底中形成的隔膜相对于公共电极和设置在另一衬底上的电极，电荷使隔膜静电变形并喷射墨水。 公共电极包括在半导体衬底上形成欧姆接触的单层或多层金属涂层。 此外，在形成公共电极的半导体衬底上的区域上，将III族或V族元素掺杂到高浓度。 因此隔膜可以高速振动。 可以提供能够高速打印的喷墨头，因为可以高速地实现对隔膜的电荷的供应和消除。