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    Electrostatic actuator and manufacturing method therefor
    3.
    发明授权
    Electrostatic actuator and manufacturing method therefor 失效
    静电致动器及其制造方法

    公开(公告)号：US06190003B1

    公开(公告)日：2001-02-20

    申请号：US08993788

    申请日：1997-12-19

    申请人： Kazuhiko Sato ,  Hiroyuki Maruyama ,  Masahiro Fujii ,  Tadaaki Hagata ,  Koji Kitahara ,  Keiichi Mukaiyama

    发明人： Kazuhiko Sato ,  Hiroyuki Maruyama ,  Masahiro Fujii ,  Tadaaki Hagata ,  Koji Kitahara ,  Keiichi Mukaiyama

    IPC分类号： B41J206

    CPC分类号： B41J2/1632 ,  B41J2/14314 ,  B41J2/16 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1642 ,  B41J2/1646 ,  B41J2202/03

    摘要： An electrostatic actuator comprising opposing electrode members displaced relatively by an electrostatic force is provided with improved durability so that electrostatic attraction between opposing members does not drop and the opposing electrode members do not stick together. Hydrophobic films of hexamethyldisilazane (HMDS) are formed on a surface of segment electrode and a bottom surface of a diaphragm (common electrode) of an eletrostatic actuator wherein the diaphragm forms a wall of an ink chamber in an ink jet head. HMDS molecules are smaller than PFDA molecules, and a uniform, variation-free hydrophobic film can therefore be formed even when the gap between opposing electrodes is narrow. Durability and film stability of a HMDS hydrophobic film are also high. An electrostatic actuator with high durability and operating stability can thus be achieved.

    摘要翻译： 提供包括相对于静电力移动的相对电极构件的静电致动器，其具有改善的耐久性，使得相对构件之间的静电吸引力不会下降，并且相对的电极构件不会粘在一起。 在分段电极的表面和静电致动器的隔膜（公共电极）的底表面上形成六甲基二硅氮烷（HMDS）的疏水膜，其中隔膜在喷墨头中形成墨室的壁。 HMDS分子小于PFDA分子，因此即使在相对电极之间的间隙窄的情况下也可形成均匀的，无变化的疏水膜。 HMDS疏水膜的耐久性和膜稳定性也很高。 因此，可以实现具有高耐久性和操作稳定性的静电致动器。

    Methods for manufacturing an electrostatic actuator
    4.
    发明授权
    Methods for manufacturing an electrostatic actuator 有权
    静电致动器的制造方法

    公开(公告)号：US06410107B2

    公开(公告)日：2002-06-25

    申请号：US09727090

    申请日：2000-11-30

    申请人： Kazuhiko Sato ,  Hiroyuki Maruyama ,  Masahiro Fujii ,  Tadaaki Hagata ,  Koji Kitahara ,  Keiichi Mukaiyama

    发明人： Kazuhiko Sato ,  Hiroyuki Maruyama ,  Masahiro Fujii ,  Tadaaki Hagata ,  Koji Kitahara ,  Keiichi Mukaiyama

    IPC分类号： B05D512

    CPC分类号： B41J2/1632 ,  B41J2/14314 ,  B41J2/16 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1642 ,  B41J2/1646 ,  B41J2202/03

    摘要： Methods for manufacturing an electrostatic actuator that comprises electrode members having opposing surfaces with a gap disposed therebetween. In an ink jet head, a bottom surface of a diaphragm may be one of the electrodes (common electrode) of an eletrostatic actuator, the diaphragm forming a wall of an ink chamber in the ink jet head that is displaced relatively by an electrostatic force. A hydrophobic film, preferably hexamethyldisilazane (HMDS), is formed on at least one of the opposing electrode surfaces to improve the durability of the electrostatic actuator so that electrostatic attraction between opposing electrode members does not decrease and the opposing electrode members do not stick together. HMDS molecules are smaller than PFDA molecules, and a uniform, variation-free hydrophobic film can therefore be formed even when the gap between opposing electrodes is narrow. Durability and film stability of a HMDS hydrophobic film are also high. An electrostatic actuator with high durability and operating stability can thus be achieved.

    摘要翻译： 一种制造静电致动器的方法，该静电致动器包括具有设置在其间的间隙的具有相对表面的电极构件。 在喷墨头中，隔膜的底表面可以是静电致动器的电极（公共电极）之一，隔膜形成喷墨头中相对于静电力移动的墨室的壁。 在至少一个相对电极表面上形成疏水膜，优选六甲基二硅氮烷（HMDS），以提高静电致动器的耐久性，使得相对电极部件之间的静电吸引力不会降低，并且相对的电极部件不会粘在一起。 HMDS分子小于PFDA分子，因此即使在相对电极之间的间隙窄的情况下也可形成均匀的，无变化的疏水膜。 HMDS疏水膜的耐久性和膜稳定性也很高。 因此，可以实现具有高耐久性和操作稳定性的静电致动器。

    Method for manufacturing an electrostatic actuator
    8.
    发明授权
    Method for manufacturing an electrostatic actuator 有权
    静电致动器的制造方法

    公开(公告)号：US06799834B2

    公开(公告)日：2004-10-05

    申请号：US10215229

    申请日：2002-08-08

    申请人： Masahiro Fujii ,  Hiroyuki Maruyama ,  Kazuhiko Sato ,  Koji Kitahara ,  Tomohiro Makigaki ,  Shigeo Nojima ,  Taro Takekoshi

    发明人： Masahiro Fujii ,  Hiroyuki Maruyama ,  Kazuhiko Sato ,  Koji Kitahara ,  Tomohiro Makigaki ,  Shigeo Nojima ,  Taro Takekoshi

    IPC分类号： B41J204

    CPC分类号： B41J2/1626 ,  B41J2/14314 ,  B41J2/16 ,  B41J2/1623 ,  B41J2/164 ,  B41J2/1642 ,  B41J2/1646 ,  B41J2002/14387 ,  B41J2002/14411 ,  B41J2202/03 ,  Y10T29/42

    摘要： A method for manufacturing an electrostatic actuator comprises a vibrating plate, an electrode plate facing the vibrating plate, and a vibrating chamber formed between the electrode plate and the vibrating plate, wherein the vibrating plate is displaced by electrostatic force, by applying voltage between the vibrating plate and the electrode plate, the method comprises: a process for forming a pressure compensating chamber communicating with the vibrating chamber; a process for forming a displacement plate at a portion of the pressure compensating chamber, displaceable according to external atmospheric pressure, into a warped form curved so as to protrude in a direction away from the facing inner wall of the pressure compensating chamber; and a process for shutting off and sealing the pressure compensating chamber from the external atmosphere, along with the vibrating chamber.

    摘要翻译： 一种制造静电致动器的方法包括：振动板，面对振动板的电极板和形成在电极板和振动板之间的振动室，其中振动板通过静电力移动，通过在振动板 板和电极板，该方法包括：形成与振动室连通的压力补偿室的工艺; 在所述压力补偿室的能够根据外部大气压力移动的部分处形成位移板的方法，所述变形板弯曲成弯曲形式，以沿远离所述压力补偿室的相对的内壁的方向突出; 以及与振动室一起从外部大气中切断和密封压力补偿室的过程。

    Drive method for an electrostatic ink jet head for eliminating residual charge in the diaphragm
    9.
    发明授权
    Drive method for an electrostatic ink jet head for eliminating residual charge in the diaphragm 失效
    用于消除隔膜中残留电荷的静电喷墨头的驱动方法

    公开(公告)号：US5818473A

    公开(公告)日：1998-10-06

    申请号：US749874

    申请日：1996-11-14

    申请人： Masahiro Fujii ,  Hiroyuki Ishikawa ,  Shigeo Nojima ,  Hiroyuki Maruyama ,  Atsushi Yamaji

    发明人： Masahiro Fujii ,  Hiroyuki Ishikawa ,  Shigeo Nojima ,  Hiroyuki Maruyama ,  Atsushi Yamaji

    IPC分类号： B41J2/045 ,  B41J2/14 ,  B41J2/04 ,  B41J2/095

    CPC分类号： B41J2/04541 ,  B41J2/04551 ,  B41J2/04578 ,  B41J2/04588 ,  B41J2/14314

    摘要： A drive method of an ink-jet head is provided in which a diaphragm is deformed by means of electrostatic force to eject an ink droplet from a nozzle so as to prevent a residual charge from being created between a diaphragm and an individual electrode. The method has first and second drive modes. In a first drive mode a voltage of a first polarity is applied between a diaphragm of the inkjet head (common electrode) and an individual electrode to cause the diaphragm to be deformed and an ink droplet to be ejected from a nozzle. In the second drive mode a voltage of a second polarity opposite to the first polarity is applied between the diaphragm and the individual electrode to cause the diaphragm to be deformed and an ink droplet to be ejected from the nozzle at least once for each operation of ink droplet ejection performed in the first drive mode. According to this method, a residual charge created between the diaphragm and the electrode can be removed concurrently with performing the operation of ink droplet ejection by applying positive and negative drive voltage pulses.

    摘要翻译： 提供了一种喷墨头的驱动方法，其中隔膜通过静电力而变形以从喷嘴喷射墨滴，从而防止在隔膜和单独电极之间产生残余电荷。 该方法具有第一和第二驱动模式。 在第一驱动模式中，在喷墨头（公共电极）的隔膜和单独电极之间施加第一极性的电压，以使隔膜变形并从喷嘴喷出墨滴。 在第二驱动模式中，在隔膜和单独电极之间施加与第一极性相反的第二极性的电压，以使得隔膜变形，并且对于每个墨的操作，墨滴从喷嘴喷射至少一次 在第一驱动模式中执行液滴喷射。 根据该方法，通过施加正驱动电压脉冲和负驱动电压脉冲来执行墨滴喷射的操作，可以同时去除在膜片和电极之间产生的残留电荷。

    Electrostatic actuator, manufacturing method therefor, and liquid discharging device using the same
    10.
    发明授权
    Electrostatic actuator, manufacturing method therefor, and liquid discharging device using the same 有权
    静电致动器及其制造方法以及使用其的排液装置

    公开(公告)号：US06450625B1

    公开(公告)日：2002-09-17

    申请号：US09424163

    申请日：2000-02-29

    申请人： Masahiro Fujii ,  Hiroyuki Maruyama ,  Kazuhiko Sato ,  Koji Kitahara ,  Tomohiro Makigaki ,  Shigeo Nojima ,  Taro Takekoshi

    发明人： Masahiro Fujii ,  Hiroyuki Maruyama ,  Kazuhiko Sato ,  Koji Kitahara ,  Tomohiro Makigaki ,  Shigeo Nojima ,  Taro Takekoshi

    IPC分类号： B41J2045

    CPC分类号： B41J2/1626 ,  B41J2/14314 ,  B41J2/16 ,  B41J2/1623 ,  B41J2/164 ,  B41J2/1642 ,  B41J2/1646 ,  B41J2002/14387 ,  B41J2002/14411 ,  B41J2202/03 ,  Y10T29/42

    摘要： An electrostatic ink-jet head (1) in which the present invention is applied comprises a pressure chamber (6) communicating with an ink nozzle (21), and an atmospheric pressure chamber (12) opened to the atmosphere, with a vibrating plate (5) being provided on the base plane of the pressure chamber (6). Voltage applied between the vibrating plate (5) and an electrode (43) causes the vibrating plate (5) to vibrate due to electrostatic force, thereby discharging ink droplets. A vibrating chamber (41) communicates with a pressure compensating chamber (49), and a displacement plate (16) capable of being displaced in the direction outward from the plane according to fluctuations in the external, atmospheric pressure is formed at the base plane of the pressure compensating chamber (49). Displacement of the displacement plate (16) increases/decreases the volume of the pressure compensating chamber (49), and the internal pressure of the vibrating chambers (41) communicating thereof is adjusted to match the external atmospheric pressure. Accordingly, the vibration properties of the vibrating plate (5) can be maintained constant even when the external atmospheric pressure fluctuates, and proper ink droplet discharging action can be maintained.

    摘要翻译： 应用本发明的静电喷墨头（1）包括与油墨喷嘴（21）连通的压力室（6）和向大气开放的大气压室（12），振动板 5）设置在压力室（6）的基面上。 施加在振动板（5）和电极（43）之间的电压使得振动板（5）由于静电力而振动，从而排出墨滴。 振动室（41）与压力补偿室（49）连通，并且能够根据外部大气压力的波动从平面向外的方向位移的位移板（16）形成在 压力补偿室（49）。 位移板（16）的位移增加/减小了压力补偿室（49）的体积，并且调节与其连通的振动室（41）的内部压力以匹配外部大气压力。 因此，即使外部大气压力波动，也能够使振动板（5）的振动特性保持恒定，能够维持适当的墨滴排出动作。