摘要:
An inkjet head comprising a nozzle, an ink passage in communication with the nozzle, a diaphragm provided at one part of the ink passage, and an electrode provided in opposition to the diaphragm whereby an electrical pulse is applied between the diaphragm and electrode to deform the diaphragm by means of electrostatic force, thereby ejecting ink droplets from the nozzle. The actuator contains at least a vibration chamber formed by the diaphragm and electrode, and is sealed or made airtight with the volume V so that the ratio between the actuator volume V and the volume .DELTA.V eliminated by a distortion of the diaphragm during ink-jet head drive is within the range 2.ltoreq.V/.DELTA.V.ltoreq.8.
摘要翻译:一种喷墨头,包括喷嘴,与喷嘴连通的墨通道,设置在墨通道的一部分处的隔膜以及与隔膜相对设置的电极,由此在隔膜和电极之间施加电脉冲以使 通过静电力隔膜,从喷嘴喷出墨滴。 致动器至少包括由隔膜和电极形成的振动室,并且与体积V密封或制成气密,使得在喷墨期间通过隔膜的变形消除了致动器体积V和体积DELTA V之间的比率 磁头驱动器在2 V / DELTA V = 8的范围内。
摘要:
An ink jet head includes a common electrode formed on a semiconductor substrate. A charge is applied to the common electrode and an electrode disposed on another substrate in opposition to a diaphragm formed in the semiconductor substrate to electrostatically deform the diaphragm and eject ink. The common electrode comprises a single layer or multiple layer metallic coating forming ohmic contact on the semiconductor substrate. In addition, a group III or group V element is doped to a high concentration at the area on the semiconductor substrate where the common electrode is formed. The diaphragm can therefore vibrate at high speed. An ink jet head capable of high speed printing can be provided because supply and elimination of the charge to the diaphragm can be accomplished at high speed.
摘要:
A manufacturing method for a device having an electrostatic actuator for example inkjet head, whereby warping of the diaphragms does not occur as a result of anodic bonding is provided. The method comprises the steps of etching a first substrate on the first surface thereof to form a concave portion and a diaphragm provided in bottom walls of the concave portion, forming an electrode on a second substrate, and anodically bonding the second substrate to a second surface of the first substrate, opposite the first surface, such that the electrode is aligned adjacent to the diaphragm with a gap therebetween. The bonding temperature of the anodically bonding step is set within a temperature range whereby the contraction of the first substrate after bonding is equal to or greater than the contraction of the second substrate.
摘要:
An electrostatic actuator comprising opposing electrode members displaced relatively by an electrostatic force is provided with improved durability so that electrostatic attraction between opposing members does not drop and the opposing electrode members do not stick together. Hydrophobic films of hexamethyldisilazane (HMDS) are formed on a surface of segment electrode and a bottom surface of a diaphragm (common electrode) of an eletrostatic actuator wherein the diaphragm forms a wall of an ink chamber in an ink jet head. HMDS molecules are smaller than PFDA molecules, and a uniform, variation-free hydrophobic film can therefore be formed even when the gap between opposing electrodes is narrow. Durability and film stability of a HMDS hydrophobic film are also high. An electrostatic actuator with high durability and operating stability can thus be achieved.
摘要:
A high reliability ink jet head for an ink jet recording apparatus enabling consistent ink ejecting with no nozzle clogging. The ink jet head therefor comprises a substrate comprising plural ink passages, each comprising a nozzle, pressure generator continuous to the nozzle, and an orifice, and an ink supply member common to the plural ink passages. The substrate comprising an anisotropic crystalline material such as silicon, and a filter channel formed integrally to the ink supply member by anisotropic etching.
摘要:
Methods for manufacturing an electrostatic actuator that comprises electrode members having opposing surfaces with a gap disposed therebetween. In an ink jet head, a bottom surface of a diaphragm may be one of the electrodes (common electrode) of an eletrostatic actuator, the diaphragm forming a wall of an ink chamber in the ink jet head that is displaced relatively by an electrostatic force. A hydrophobic film, preferably hexamethyldisilazane (HMDS), is formed on at least one of the opposing electrode surfaces to improve the durability of the electrostatic actuator so that electrostatic attraction between opposing electrode members does not decrease and the opposing electrode members do not stick together. HMDS molecules are smaller than PFDA molecules, and a uniform, variation-free hydrophobic film can therefore be formed even when the gap between opposing electrodes is narrow. Durability and film stability of a HMDS hydrophobic film are also high. An electrostatic actuator with high durability and operating stability can thus be achieved.
摘要:
A high reliability ink jet head for an ink jet recording apparatus enabling consistent ink ejecting with no nozzle clogging. The ink jet head therefor comprises a substrate comprising plural ink passages, each comprising a nozzle, pressure generator continuous to the nozzle, and an orifice, and an ink supply member common to the plural ink passages. The substrate comprising an anisotropic crystalline material such as silicon, and a filter channel formed integrally to the ink supply member by anisotropic etching.
摘要:
An inkjet printer provided with an ink jet print head having a nozzle, an ink channel that is connected to the nozzle, and an electrostatic actuator that is composed of a diaphragm that is provided in a part of the ink channel and an electrode placed outside of the ink channel opposite to the diaphragm. The diaphragm is distorted by means of an electrostatic force generated by applying a first voltage to the electrostatic actuator. A second voltage, different than the first voltage, is applied to the actuator to relax the diaphragm and to discharge ejecting ink droplets from the nozzle.
摘要:
Proposed is dispensing technology capable of reliably spotting a biological sample on a solid phase. A head chip applies a voltage pulse between a diaphragm and separate electrodes based on a drive control signal output from a head driver IC, and discharges a solution containing protein filled in a pressurized chamber as a result of the elastic deformation of the diaphragm. A drive pulse generation circuit generates a drive voltage pulse and supplies this to the head chip in order to discharge a solution containing protein from the head chip. The drive current detection circuit detects a drive current flowing between the diaphragm and separate electrodes. Since the waveform of the detected drive current and the peak current value and so on differ in the case where the discharge status is normal and in the case where it is abnormal, a defective discharge can be discriminated by detecting such change.
摘要:
An ink jet printer provided with an ink jet print head having a nozzle, an ink channel that is connected to the nozzle, and an electrostatic actuator that is composed of a diaphragm that is provided in a part of the ink channel and an electrode placed outside of the ink channel opposite to the diaphragm. The diaphragm is distorted by means of an electrostatic force generated by applying voltage to the electrostatic actuator thereby performing printing with ink droplets ejected from the nozzle. The electrostatic actuator driver comprises a timing pulse generator, charge circuit and discharge circuit. The driver controls an amount of charge to be charged to the electrostatic actuator as well as charge rate thereof corresponding to the environmental operating condition of the ink jet printer.