公开(公告)号：US08299812B2

公开(公告)日：2012-10-30

申请号：US12646776

申请日：2009-12-23

申请人： Mitsuru Nitta ,  Osamu Arai ,  Motoharu Kimura

发明人： Mitsuru Nitta ,  Osamu Arai ,  Motoharu Kimura

IPC分类号： G01R31/00

CPC分类号： G01R31/2875 ,  G01R31/2889

摘要： An embodiment of a probe card comprising: a probe base plate including a ceramic base plate and a plurality of conductive paths; and a plurality of contacts disposed on one face of the probe base plate and electrically connected to the conductive paths. The ceramic base plate may be provided with: a plurality of first layers having a heating element which generates heat by electric power and disposed at intervals in the thickness direction of the ceramic base plate; second layers each interposed between adjoining first layers; and a power supply path for supplying electric power for heating to the heating element.

摘要翻译： 一种探针卡的实施例，包括：探针基板，包括陶瓷基板和多个导电路径; 以及设置在探针基板的一个表面上并电连接到导电路径的多个触点。 陶瓷基板可以设置有多个第一层，其具有通过电力产生热量并且在陶瓷基板的厚度方向上间隔设置的加热元件; 第二层，各自插入相邻的第一层之间; 以及用于向加热元件供应用于加热的电力的电源路径。