Scanning electron microscope
    9.
    发明授权
    Scanning electron microscope 有权
    扫描电子显微镜

    公开(公告)号:US08809782B2

    公开(公告)日:2014-08-19

    申请号:US13387424

    申请日:2010-07-20

    摘要: A scanning electron microscope includes a main scanning electron microscope unit having an electron optical column and a sample chamber, a controller over the main scanning electron microscope unit, a single housing that houses both the main scanning electron microscope unit and the controller, and a bottom plate disposed under the single housing, the main scanning electron microscope unit and the controller. A first leg member is attached to a bottom face of the bottom plate on a side of the controller with a first opening hole provided through the bottom plate on a side of the main scanning electron microscope unit, and a damper is fixed to a bottom face of the main scanning electron microscope unit and disposed through the first opening hole.

    摘要翻译: 扫描电子显微镜包括具有电子光学柱和样品室的主扫描电子显微镜单元,主扫描电子显微镜单元上的控制器,容纳主扫描电子显微镜单元和控制器的单个壳体,底部 设置在单个壳体下方的主扫描电子显微镜单元和控制器。 第一腿部件在控制器的一侧的底板的底面上,在主扫描电子显微镜单元的一侧具有通过底板提供的第一开孔,并且阻尼器固定到底面 的主扫描电子显微镜单元,并且通过第一开孔设置。

    SCANNING ELECTRON MICROSCOPE
    10.
    发明申请
    SCANNING ELECTRON MICROSCOPE 有权
    扫描电子显微镜

    公开(公告)号:US20120127299A1

    公开(公告)日:2012-05-24

    申请号:US13387424

    申请日:2010-07-20

    IPC分类号: H04N7/18

    摘要: A scanning electron microscope includes a main scanning electron microscope unit having an electron optical column and a sample chamber, a controller over the main scanning electron microscope unit, a single housing that houses both the main scanning electron microscope unit and the controller, and a bottom plate disposed under the single housing, the main scanning electron microscope unit and the controller. A first leg member is attached to a bottom face of the bottom plate on a side of the controller with a first opening hole provided through the bottom plate on a side of the main scanning electron microscope unit, and a damper is fixed to a bottom face of the main scanning electron microscope unit and disposed through the first opening hole.

    摘要翻译: 扫描电子显微镜包括具有电子光学柱和样品室的主扫描电子显微镜单元,主扫描电子显微镜单元上的控制器,容纳主扫描电子显微镜单元和控制器的单个壳体,底部 设置在单个壳体下方的主扫描电子显微镜单元和控制器。 第一腿部件在控制器的一侧的底板的底面上,在主扫描电子显微镜单元的一侧具有通过底板提供的第一开孔,并且阻尼器固定到底面 的主扫描电子显微镜单元,并且通过第一开孔设置。