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1.发明授权公开(公告)号：US08640552B2
公开(公告)日：2014-02-04
申请号：US13226264
申请日：2011-09-06
IPC分类号： G01F1/86
CPC分类号： G01F1/6845 , G01F1/692 , G01F1/698 , G01F15/02
摘要： A MEMS airflow sensor die having a heater control circuit, differential instrumentation amplifier, temperature compensation, and/or offset correction circuitry integrated with an airflow sensor on the MEMS die. The added circuitry may be placed on space available on the basic airflow die with MEMS fabrication techniques without enlarging the sensor die. The die with the added circuitry may result in a device having a reduced form factor, improved reliability and lower cost.
摘要翻译： 具有与MEMS管芯上的气流传感器集成的加热器控制电路，差分仪表放大器，温度补偿和/或偏移校正电路的MEMS气流传感器管芯。 添加的电路可以放置在具有MEMS制造技术的基本气流模具上可用的空间上，而不需要扩大传感器芯片。 具有附加电路的裸片可能导致具有减小的形状因数，改进的可靠性和更低成本的器件。
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2.发明申请公开(公告)号：US20130055826A1
公开(公告)日：2013-03-07
申请号：US13226264
申请日：2011-09-06
IPC分类号： G01F1/86
CPC分类号： G01F1/6845 , G01F1/692 , G01F1/698 , G01F15/02
摘要： A MEMS airflow sensor die having a heater control circuit, differential instrumentation amplifier, temperature compensation, and/or offset correction circuitry integrated with an airflow sensor on the MEMS die. The added circuitry may be placed on space available on the basic airflow die with MEMS fabrication techniques without enlarging the sensor die. The die with the added circuitry may result in a device having a reduced form factor, improved reliability and lower cost.
摘要翻译： 具有与MEMS管芯上的气流传感器集成的加热器控制电路，差分仪表放大器，温度补偿和/或偏移校正电路的MEMS气流传感器管芯。 添加的电路可以放置在具有MEMS制造技术的基本气流模具上可用的空间上，而不需要扩大传感器芯片。 具有附加电路的裸片可能导致具有减小的形状因数，改进的可靠性和更低成本的器件。
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公开(公告)号：US08656772B2
公开(公告)日：2014-02-25
申请号：US13273473
申请日：2011-10-14
IPC分类号： G01F1/68
CPC分类号： B01D17/10 , G01F1/36 , G01F1/40 , G01F1/684 , G01F1/6842 , G01F15/125
摘要： This disclosure relates generally to flow sensors, and more particularly, to flow sensors that include a pressure related output signal. In one example, a flow sensor assembly may include a housing with an inlet flow port, an outlet flow port and a fluid channel extending therebetween, with a flow sensing element positioned in the housing and exposed to the fluid channel. A filter insert may be situated in the fluid channel, sometimes upstream of the flow sensor. When so configured, the flow sensor assembly may output a pressure or differential pressure based, at least in part, on a value of the flow rate through the fluid channel as sensed by the flow sensor.
摘要翻译： 本公开一般涉及流量传感器，更具体地涉及包括压力相关输出信号的流量传感器。 在一个示例中，流量传感器组件可以包括具有入口流动端口，出口流动端口和在其间延伸的流体通道的外壳，流体感测元件定位在壳体中并暴露于流体通道。 过滤器插入件可以位于流体通道中，有时位于流量传感器的上游。 当这样构造时，流量传感器组件可以至少部分地基于由流量传感器感测的通过流体通道的流量的值输出压力或压差。
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公开(公告)号：US20120035866A1
公开(公告)日：2012-02-09
申请号：US13273473
申请日：2011-10-14
CPC分类号： B01D17/10 , G01F1/36 , G01F1/40 , G01F1/684 , G01F1/6842 , G01F15/125
摘要： This disclosure relates generally to flow sensors, and more particularly, to flow sensors that include a pressure related output signal. In one example, a flow sensor assembly may include a housing with an inlet flow port, an outlet flow port and a fluid channel extending therebetween, with a flow sensing element positioned in the housing and exposed to the fluid channel. A filter insert may be situated in the fluid channel, sometimes upstream of the flow sensor. When so configured, the flow sensor assembly may output a pressure or differential pressure based, at least in part, on a value of the flow rate through the fluid channel as sensed by the flow sensor.
摘要翻译： 本公开一般涉及流量传感器，更具体地涉及包括压力相关输出信号的流量传感器。 在一个示例中，流量传感器组件可以包括具有入口流动端口，出口流动端口和在其间延伸的流体通道的外壳，流体感测元件定位在壳体中并暴露于流体通道。 过滤器插入件可以位于流体通道中，有时位于流量传感器的上游。 当这样构造时，流量传感器组件可以至少部分地基于由流量传感器感测的通过流体通道的流量的值输出压力或压差。
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