Solenoid valve
    1.
    发明授权
    Solenoid valve 有权
    电磁阀

    公开(公告)号:US08936040B2

    公开(公告)日:2015-01-20

    申请号:US13135335

    申请日:2011-07-01

    摘要: A solenoid valve has a tapered valve seat disposed between a first flow passage and a second flow passage, a reduced diameter side of the valve seat that is connected with the first flow passage, and a valve body having a closing portion that reduces its diameter toward a tip facing the valve seat. The first flow passage and the second flow passage are connected/disconnected by sliding the valve body for contacting/detaching the closing portion to the valve seat, and a groove is disposed on the closing portion facing the direction of a fluid flow.

    摘要翻译: 电磁阀具有设置在第一流动通道和第二流动通道之间的锥形阀座,与第一流动通道连接的阀座的减小直径侧,以及具有闭合部分的阀体,该闭合部分将其直径减小到 尖端面向阀座。 第一流动通道和第二流动通道通过滑动阀体来将闭合部分接触/拆卸到阀座而被连接/断开,并且在封闭部分上设置有面向流体流动方向的凹槽。

    Solenoid valve
    2.
    发明申请
    Solenoid valve 有权
    电磁阀

    公开(公告)号:US20120001107A1

    公开(公告)日:2012-01-05

    申请号:US13135335

    申请日:2011-07-01

    IPC分类号: F16K31/02

    摘要: A solenoid valve has a tapered valve seat disposed between a first flow passage and a second flow passage, a reduced diameter side of the valve seat that is connected with the first flow passage, and a valve body having a closing portion that reduces its diameter toward a tip facing the valve seat. The first flow passage and the second flow passage are connected/disconnected by sliding the valve body for contacting/detaching the closing portion to the valve seat, and a groove is disposed on the closing portion facing the direction of a fluid flow.

    摘要翻译: 电磁阀具有设置在第一流动通道和第二流动通道之间的锥形阀座,与第一流动通道连接的阀座的减小直径侧,以及具有闭合部分的阀体,该闭合部分将其直径减小到 尖端面向阀座。 第一流动通道和第二流动通道通过滑动阀体来将闭合部分接触/拆卸到阀座而被连接/断开,并且在封闭部分上设置有面向流体流动方向的凹槽。

    Electromagnetic valve
    3.
    发明申请
    Electromagnetic valve 失效
    电磁阀

    公开(公告)号:US20070051839A1

    公开(公告)日:2007-03-08

    申请号:US11511251

    申请日:2006-08-29

    IPC分类号: A01K89/00

    摘要: A projection is provided in a flange of a resin spool, and a concave portion is provided in a yoke in a position facing the projection. The movement of the spool in the radial direction of the spool is restricted by inserting the projection into the concave portion. Because the inner circumferential surface of the concave portion and the outer circumferential surface of the projection are brought into contact, the movement of the spool in the axial direction of the spool is inhibited by frictional resistance at the points of contact.

    摘要翻译: 在树脂卷轴的凸缘中设置突起,并且在面向突起的位置处在轭中设置凹部。 通过将突起插入凹部来限制卷轴在卷轴的径向方向上的移动。 由于凹部的内周面和突起的外周面接触,因此在线轴的轴向上的线轴的移动被接触点的摩擦阻力抑制。

    Spin cleaning and drying apparatus and method of spin cleaning and drying
    4.
    发明授权
    Spin cleaning and drying apparatus and method of spin cleaning and drying 失效
    旋转清洗干燥装置及旋转清洗干燥方法

    公开(公告)号:US07434588B2

    公开(公告)日:2008-10-14

    申请号:US11206997

    申请日:2005-08-19

    IPC分类号: B08B3/00

    CPC分类号: H01L21/67028 B08B3/02

    摘要: The present invention provides a spin cleaning and drying apparatus of single-wafer processing type which cleans a substrate with a cleaning liquid from a rinse nozzle while rotating the substrate and dries the substrate after cleaning while rotating the substrate, comprising: a spin chuck which holds and rotates the substrates; a cup which has an opening on an upper side, a water discharge port and an exhaust gas port in a bottom portion, and encloses the spin chuck; a flow regulating plate which has a gas injection port in a middle and is provided so as to be able to move backward and forward to a position opposed to the substrate and spaced therefrom at a prescribed distance and to an upward or sideward retracted position; and an exhaust cover, having multiple slit holes each with a hood which opens to an upper surface, is provided below the spin chuck.

    摘要翻译: 本发明提供了一种单晶片加工型旋转清洗和干燥装置,其中,在旋转基板的同时旋转基板并在清洗之后使基板干燥,同时用清洗液从冲洗喷嘴清洗基板,同时旋转基板,包括:保持 并旋转基板; 在底部具有开口的杯子,排水口和排气口,并且包围旋转卡盘; 流量调节板,其在中间具有气体注入口,并且设置成能够向前后移动到与基板相对的位置并且以规定距离与其间隔开并且向上或向后缩回位置; 并且在旋转卡盘的下方设置有具有多个狭缝孔的排气罩,每个狭缝孔具有通向上表面的罩。

    Electromagnetic valve and mounting method thereof
    5.
    发明授权
    Electromagnetic valve and mounting method thereof 失效
    电磁阀及其安装方法

    公开(公告)号:US07150196B2

    公开(公告)日:2006-12-19

    申请号:US11137369

    申请日:2005-05-26

    IPC分类号: F16K31/02

    摘要: If a pressure sensor is increased in size and therefore the inside diameter of a yoke is increased, a stopper is provided with a large-diameter portion. The large-diameter portion makes it possible to reduce the air gap between the stopper and the yoke and therefore suppress an increase in magnetic resistance. Besides, a magnetic circuit member is provided at an outer peripheral side of a sleeve. The magnetic circuit member makes it possible to reduce the air gap between the yoke and an armature and therefore suppress an increase in magnetic resistance.

    摘要翻译: 如果压力传感器的尺寸增加,因此轭的内径增加,则止动器设置有大直径部分。 大直径部分可以减小止动器和轭之间的气隙,从而抑制磁阻的增加。 此外,在套筒的外周侧设置有磁路部件。 磁路部件能够减小磁轭和电枢之间的气隙,从而抑制磁阻的增大。

    Electromagnetic valve
    6.
    发明授权
    Electromagnetic valve 失效
    电磁阀

    公开(公告)号:US07458557B2

    公开(公告)日:2008-12-02

    申请号:US11511251

    申请日:2006-08-29

    IPC分类号: F16K31/02

    摘要: A projection is provided in a flange of a resin spool, and a concave portion is provided in a yoke in a position facing the projection. The movement of the spool in the radial direction of the spool is restricted by inserting the projection into the concave portion. Because the inner circumferential surface of the concave portion and the outer circumferential surface of the projection are brought into contact, the movement of the spool in the axial direction of the spool is inhibited by frictional resistance at the points of contact.

    摘要翻译: 在树脂卷轴的凸缘中设置突起,并且在面向突起的位置处在轭中设置凹部。 通过将突起插入凹部来限制卷轴在卷轴的径向方向上的移动。 由于凹部的内周面和突起的外周面接触,因此在线轴的轴向上的线轴的移动被接触点的摩擦阻力抑制。

    Electromagnetic valve and fluid control apparatus
    7.
    发明授权
    Electromagnetic valve and fluid control apparatus 失效
    电磁阀和流体控制装置

    公开(公告)号:US07441562B2

    公开(公告)日:2008-10-28

    申请号:US11137436

    申请日:2005-05-26

    IPC分类号: F16K31/02

    摘要: A stopper formed of a magnetic material and forming a portion of a magnetic circuit has a deformable portion that deforms in accordance with the pressure in a space within a sleeve. The deformable portion is provided with a pressure sensor that measures the amount of deformation of the deformable portion. The deformable portion, corresponding to a diaphragm, is formed in the stopper, which is a conventional electromagnetic valve component part. Therefore, it is no longer necessary to provide a diaphragm or a seal member.

    摘要翻译: 由磁性材料形成并形成磁路的一部分的止动件具有可根据套筒内的空间内的压力变形的可变形部分。 可变形部分设置有测量可变形部分的变形量的压力传感器。 对应于隔膜的可变形部分形成在作为常规电磁阀部件的止动件中。 因此,不再需要设置隔膜或密封构件。

    Spin cleaning and drying apparatus and method of spin cleaning and drying
    9.
    发明申请
    Spin cleaning and drying apparatus and method of spin cleaning and drying 失效
    旋转清洗干燥装置及旋转清洗干燥方法

    公开(公告)号:US20060042666A1

    公开(公告)日:2006-03-02

    申请号:US11206997

    申请日:2005-08-19

    IPC分类号: B08B3/00

    CPC分类号: H01L21/67028 B08B3/02

    摘要: The present invention provides a spin cleaning and drying apparatus of single-wafer processing type which cleans a substrate with a cleaning liquid from a rinse nozzle while rotating the substrate and dries the substrate after cleaning while rotating the substrate, comprising: a spin chuck which holds and rotates the substrates; a cup which has an opening on an upper side, a water discharge port and an exhaust gas port in a bottom portion, and encloses the spin chuck; a flow regulating plate which has a gas injection port in a middle and is provided so as to be able to move backward and forward to a position opposed to the substrate and spaced therefrom at a prescribed distance and to an upward or sideward retracted position; and an exhaust cover, having multiple slit holes each with a hood which opens to an upper surface, is provided below the spin chuck.

    摘要翻译: 本发明提供了一种单晶片加工型旋转清洗和干燥装置,其中,在旋转基板的同时旋转基板并在清洗之后使基板干燥,同时用清洗液从冲洗喷嘴清洗基板,同时旋转基板,包括:保持 并旋转基板; 在底部具有开口的杯子,排水口和排气口,并且包围旋转卡盘; 流量调节板,其在中间具有气体注入口,并且设置成能够向前后移动到与基板相对的位置并且以规定距离与其间隔开并且向上或向后缩回位置; 并且在旋转卡盘的下方设置有具有多个狭缝孔的排气罩,每个狭缝孔具有通向上表面的罩。

    Electromagnetic valve and mounting method thereof
    10.
    发明申请
    Electromagnetic valve and mounting method thereof 失效
    电磁阀及其安装方法

    公开(公告)号:US20050274192A1

    公开(公告)日:2005-12-15

    申请号:US11137369

    申请日:2005-05-26

    摘要: If a pressure sensor is increased in size and therefore the inside diameter of a yoke is increased, a stopper is provided with a large-diameter portion. The large-diameter portion makes it possible to reduce the air gap between the stopper and the yoke and therefore suppress an increase in magnetic resistance. Besides, a magnetic circuit member is provided at an outer peripheral side of a sleeve. The magnetic circuit member makes it possible to reduce the air gap between the yoke and an armature and therefore suppress an increase in magnetic resistance.

    摘要翻译: 如果压力传感器的尺寸增加,因此轭的内径增加,则止动器设置有大直径部分。 大直径部分可以减小止动器和轭之间的气隙,从而抑制磁阻的增加。 此外,在套筒的外周侧设置有磁路部件。 磁路部件能够减小磁轭和电枢之间的气隙,从而抑制磁阻的增大。