公开(公告)号：US20230360876A1

公开(公告)日：2023-11-09

申请号：US18340690

申请日：2023-06-23

Applicant: Moxtek, Inc.

Inventor： Eric MILLER

IPC: H01J35/06

CPC classification number: H01J35/064

Abstract: A planar filament 11f can include multiple materials to increase electron emission in desired directions and to suppress electron emission in undesired directions. The filament 11f can include a core-material CM between a top-material TM and a bottom-material BM. The top-material TM can have a lowest work function WFt; the bottom-material BM can have a highest work function WFb; and the core-material CM can have an intermediate work function WFc (WFt Wb). This shape makes it easier to coat the edges 31e with the bottom-material BM, because the edges 31e tilt toward and partially face the sputter target. This shape also helps direct more electrons to a center of the target 14, and reduce electron emission in undesired directions.