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公开(公告)号:US06217714B1
公开(公告)日:2001-04-17
申请号:US08672660
申请日:1996-06-28
申请人: Munekazu Nishihara , Teiichi Kimura , Isamu Aokura
发明人: Munekazu Nishihara , Teiichi Kimura , Isamu Aokura
IPC分类号: C23C1434
CPC分类号: C23C14/352 , H01J37/3408
摘要: In a sputtering apparatus, in a vacuum chamber having a gas supply and a gas discharge functions, a substrate is set to a supporting part therefor and a target is disposed at an electrode connected with a power source within a plane opposite to the substrate, so as to form a film while holding the substrate in a fixed state to the target. The electrode is divided into three or more electrode parts, the target is divided and disposed on the three or more electrode parts within the plane, and a magnet is arranged for each divided target at a position where a line of magnetic force on a surface of the each target is generated by each magnet.
摘要翻译: 在溅射装置中,在具有气体供给和气体放电功能的真空室中,将基板设定为支撑部,并且在与基板相反的平面内的与电源连接的电极上设置靶,因此 以便在将固定状态的基板保持在目标上的同时形成膜。 电极被分为三个或更多个电极部分,目标被分割并设置在平面内的三个或更多个电极部分上,并且在每个分割的靶上布置磁体, 每个目标由每个磁体产生。
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公开(公告)号:US06176980B1
公开(公告)日:2001-01-23
申请号:US09471509
申请日:1999-12-23
IPC分类号: C23C1434
CPC分类号: C23C14/3492 , C23C14/34 , H01J37/32449 , H01J37/32834
摘要: The film thickness of a thin film formed on substrate 14 is made symmetrical and uniform by eliminating currents of gas over target 9 by performing film deposition in a condition with gas supply and vacuum evacuation cut off, after adjusting the interior of vacuum chamber 1 to the predetermined pressure.
摘要翻译: 通过在将气体供给和真空抽真空切断的状态下进行膜沉积,在将真空室1的内部调节到了真空室1之后,通过在目标9上除去气体的电流,使形成在基板14上的薄膜的膜厚度对称和均匀 预定压力。
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公开(公告)号:US20070170399A1
公开(公告)日:2007-07-26
申请号:US10590079
申请日:2004-09-16
申请人: Takashi Goto , Teiichi Kimura , Hajime Suzuki , Keiichiro Jinushi
发明人: Takashi Goto , Teiichi Kimura , Hajime Suzuki , Keiichiro Jinushi
IPC分类号: H01B1/12
CPC分类号: H01M4/90 , G01N27/308 , G01N27/4075
摘要: A particle-dispersed complex which can serve as a very active electrochemical catalyst used as the sensor electrode of a solid electrolyte sensor such as an oxygen sensor and an exhaust gas sensor that are sensitive even at low temperature, or as the electrode or the like of an electrochemical device or the like such as an electrolysis or a battery or the like by dispersing without aggregating ruthenium system fine particles having a very small particle size into a carbon matrix phase to keep ruthenium system fine particles in a high catalyst active state. The particle-dispersed complex is characterized by comprising fine particles that have a particles size of 5-100 nm, contain ruthenium element as a constituent element, and are dispersed in a matrix mainly containing carbon, and by having conductivity.
摘要翻译: 可用作非常活跃的电化学催化剂的颗粒分散复合物,其用作即使在低温下也是敏感的固体电解质传感器如氧传感器和排气传感器的传感器电极,或者作为电极等 电解或电池等的电化学装置等,通过不将聚集了非常小粒径的钌系微细颗粒分散在碳基体相中,以使钌体系细颗粒保持在高催化剂活性状态。 颗粒分散复合物的特征在于包含粒径为5-100nm的微粒,含有钌元素作为构成元素,分散在主要含有碳的基质中并具有导电性。
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4.
公开(公告)号:US08043491B2
公开(公告)日:2011-10-25
申请号:US10590079
申请日:2004-09-16
申请人: Takashi Goto , Teiichi Kimura , Hajime Suzuki , Keiichiro Jinushi
发明人: Takashi Goto , Teiichi Kimura , Hajime Suzuki , Keiichiro Jinushi
IPC分类号: G01N27/407
CPC分类号: H01M4/90 , G01N27/308 , G01N27/4075
摘要: A particle-dispersed complex which can serve as a very active electrochemical catalyst used as the sensor electrode of a solid electrolyte sensor such as an oxygen sensor and an exhaust gas sensor that are sensitive even at low temperature, or as the electrode or the like of an electrochemical device or the like such as an electrolysis or a battery or the like by dispersing without aggregating ruthenium system fine particles having a very small particle size into a carbon matrix phase to keep ruthenium system fine particles in a high catalyst active state. The particle-dispersed complex is characterized by comprising fine particles that have a particles size of 5-100 nm, contain ruthenium element as a constituent element, and are dispersed in a matrix mainly containing carbon, and by having conductivity.
摘要翻译: 可用作非常活跃的电化学催化剂的颗粒分散复合物,其用作即使在低温下也是敏感的固体电解质传感器(例如氧传感器和排气传感器)的传感器电极,或用作电极等 电解或电池等的电化学装置等,通过不将聚集了非常小粒径的钌系微细颗粒分散在碳基体相中,以使钌体系细颗粒保持在高催化剂活性状态。 颗粒分散复合物的特征在于包含粒径为5-100nm的微粒,含有钌元素作为构成元素,分散在主要含有碳的基质中并具有导电性。
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公开(公告)号:US07633464B2
公开(公告)日:2009-12-15
申请号:US10559728
申请日:2005-05-24
申请人: Kunihiro Mima , Masanori Kimura , Teiichi Kimura
发明人: Kunihiro Mima , Masanori Kimura , Teiichi Kimura
IPC分类号: G09G3/28
CPC分类号: G09G3/294 , G09G3/2965 , G09G2310/066 , G09G2320/0233
摘要: Driving a plasma display panel, in which generation of a region having brightness non-uniformity can be reduced over an entire screen without changing the voltage and pulse width of sustain pulses, to enable suppression of an increase in power consumption. This driving of the plasma display panel comprises (i) an initialization period for forming a discharge cell at an intersection where a scan electrode and a sustain electrode meet a data electrode and generating initialization discharge in the cell, (ii) a writing period for generating writing discharge in the discharge cell, and (iii) a sustain period for generating sustain discharge by alternately applying sustain pulses to the scan electrode and sustain electrode of the discharge cell. The rise time of the sustain pulses applied to the scan electrode and sustain electrode during the sustain period is shortened at a frequency of once every several times.
摘要翻译: 驱动等离子体显示面板,其中在不改变维持脉冲的电压和脉冲宽度的情况下,可以在整个屏幕上减少具有亮度不均匀性的区域的生成,从而能够抑制功耗的增加。 等离子体显示面板的这种驱动包括:(i)用于在扫描电极和维持电极与数据电极相交并在单元中产生初始化放电的交叉处形成放电单元的初始化周期,(ii)用于产生 在放电单元中写入放电,以及(iii)通过对维持放电单元的扫描电极和维持电极交替施加维持脉冲来产生维持放电的维持期间。 在维持期间施加到扫描电极和维持电极的维持脉冲的上升时间以每隔几次的频率缩短。
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公开(公告)号:US20070262923A1
公开(公告)日:2007-11-15
申请号:US11797949
申请日:2007-05-09
申请人: Kotaro Kobayashi , Teiichi Kimura , Jun Yokoyama
发明人: Kotaro Kobayashi , Teiichi Kimura , Jun Yokoyama
IPC分类号: G09G3/28
CPC分类号: G09G3/2927 , G09G3/006 , G09G3/298 , G09G2330/10
摘要: A plasma display panel including a plurality of discharge cells each having a display electrode pair made of a scan electrode and a sustain electrode formed in a row direction, and a data electrode formed in a column direction is driven in one field period including a plurality of subfields. The subfield has an initializing period of making initializing discharge occur in the discharge cell, a writing period of making writing discharge occur by selectively applying a write pulse voltage to the discharge cells, and a sustain period of making sustain discharges of the number according to luminance weight occur in a selected discharge cell in the writing period. A write pulse voltage is applied to a discharge cell to be tested in a predetermined subfield, and the write pulse voltage is not applied to the discharge cell to be tested at least in a next subfield after the predetermined subfield.
摘要翻译: 一种等离子体显示面板包括多个放电单元,每个放电单元具有由行扫描电极和行列方向形成的维持电极构成的显示电极对,以及沿列方向形成的数据电极,在包括多个 子场 子场具有在放电单元中发生初始化放电的初始化周期,通过选择性地向放电单元施加写入脉冲电压而产生写入放电的写入周期,以及根据亮度进行维持放电的维持周期 在写入期间,在所选择的放电单元中发生重量。 写入脉冲电压在预定的子场中被施加到待测试的放电单元,并且写入脉冲电压至少在预定子场之后的下一个子场中不施加到待测试的放电单元。
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公开(公告)号:US20070097031A1
公开(公告)日:2007-05-03
申请号:US10559728
申请日:2005-05-24
申请人: Kunihiro Mima , Masanori Kimura , Teiichi Kimura
发明人: Kunihiro Mima , Masanori Kimura , Teiichi Kimura
IPC分类号: G09G3/28
CPC分类号: G09G3/294 , G09G3/2965 , G09G2310/066 , G09G2320/0233
摘要: A method for driving a plasma display panel is disclosed in which generation of a region having brightness non-uniformity can be reduced over an entire screen without changing the voltage and pulse width of sustain pulses thus enabling suppression of an increase in power consumption. This method for driving a plasma display panel comprises an initialization period for forming a discharge cell at an intersection where scan electrode and sustain electrode meet data electrode and generating initialization discharge in the cell, a writing period for generating writing discharge in the discharge cell, and a sustain period for generating sustain discharge by alternately applying sustain pulses to the scan electrode and sustain electrode of the discharge cell, and rise time of the sustain pulses to be applied to the scan electrode and sustain electrode during the sustain period is shortened at a frequency of once every several times.
摘要翻译: 公开了一种用于驱动等离子体显示面板的方法,其中可以在整个屏幕上减少具有亮度不均匀性的区域的生成,而不改变维持脉冲的电压和脉冲宽度,从而能够抑制功耗的增加。 用于驱动等离子体显示面板的方法包括用于在扫描电极和维持电极与数据电极相交并在单元中产生初始化放电的交叉处形成放电单元的初始化时段,用于在放电单元中产生写入放电的写入周期,以及 用于通过对维持周期的扫描电极和维持电极交替施加维持脉冲而产生维持放电的维持周期,并且在维持周期期间将被施加到扫描电极和维持电极的维持脉冲的上升时间缩短为频率 每隔几次。
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公开(公告)号:US06875698B2
公开(公告)日:2005-04-05
申请号:US09892023
申请日:2001-06-26
IPC分类号: C23F4/00 , H01L21/302 , H01L21/3065 , H01L21/3213
CPC分类号: H01J37/32082 , C23F4/00 , H01L21/32135
摘要: In dry etching process wherein a substrate having a multi-layer film is etched, the etching process is monitored by determining a layer being processed. CHF3 gas is added to the processing gas during a period from the time when the lowermost layer on the substrate is etched until the etching is completed.
摘要翻译: 在其中蚀刻具有多层膜的衬底的干式蚀刻工艺中,通过确定被处理层来监测蚀刻工艺。 在从蚀刻基板的最下层到蚀刻完成之间的期间,将CHF 3气体加入到处理气体中。
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