公开(公告)号：US20250026631A1

公开(公告)日：2025-01-23

申请号：US18910213

申请日：2024-10-09

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Hiroshi MATSUBARA ,  Shinsuke IKEUCHI ,  Ryosuke NIWA ,  Gou SAITOU

IPC: B81B7/00 ,  B81C1/00 ,  H10N30/045

Abstract: A MEMS device is provided that includes a piezoelectric element including a piezoelectric membrane including a ferroelectric and configured to vibrate based on an application of a voltage. A device may include a diode portion electrically connected in parallel to the piezoelectric element and including a diode.

公开(公告)号：US20250067612A1

公开(公告)日：2025-02-27

申请号：US18947345

申请日：2024-11-14

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Gou SAITOU

IPC: G01L19/00 ,  G01L9/00

Abstract: A pressure sensor device that includes: a base substrate; a detecting element mounted on an upper surface of the base substrate and that includes a detecting portion that detects pressure; a resin package on the upper surface of the base substrate and that has an exposure hole that exposes the detecting portion, the detecting element being embedded in the resin package; and an on-off valve disposed so as to close the exposure hole, the on-off valve including: a membrane having an outer surface facing an outside of the pressure sensor device, and a communication path that is partly formed by an inner surface of the membrane and allows the detecting portion to communicate with the outside of the pressure sensor device, the inner surface being opposite the outer surface, and wherein the inner surface closes the communication path when the membrane is flexed by pressure acting upon the outer surface.