公开(公告)号：US20240137005A1

公开(公告)日：2024-04-25

申请号：US18400668

申请日：2023-12-29

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Bryant GARCIA ,  Pintu ADHIKARI ,  Andrew GUYETTE

IPC: H03H9/205 ,  H03H3/02 ,  H03H9/02 ,  H03H9/56 ,  H03H9/60

CPC classification number: H03H9/205 ,  H03H3/02 ,  H03H9/02015 ,  H03H9/02157 ,  H03H9/02228 ,  H03H9/568 ,  H03H9/605

Abstract: A filter device has a first piezoelectric plate spanning a first and second cavity of a substrate. A first and second interdigital transducer (IDT) are on a front surface of the first piezoelectric plate over the first and second cavity. A dielectric layer is formed on the first piezoelectric plate and covers the first IDT and second IDT. A second piezoelectric plate is bonded to a front surface of the dielectric layer over the first cavity and the second cavity. A second dielectric layer is formed on a front surface of the second piezoelectric plate over the first cavity but not over the second cavity. The thickness of the dielectric layer, the first piezoelectric plate and the second piezoelectric plate can be selected to tune a shunt resonator over the first cavity and a series resonator over the second cavity.

公开(公告)号：US20240030895A1

公开(公告)日：2024-01-25

申请号：US18478193

申请日：2023-09-29

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Pintu ADHIKARI ,  Neal FENZI ,  Andrew GUYETTE

IPC: H03H9/56 ,  H03H3/02 ,  H03H9/17 ,  H03H9/54 ,  H03H9/02

CPC classification number: H03H9/564 ,  H03H3/02 ,  H03H9/174 ,  H03H9/542 ,  H03H9/02228 ,  H03H2003/023

Abstract: Radio frequency filters. A radio frequency filter includes a substrate attached to a piezoelectric plate, portions of the piezoelectric plate forming a plurality of diaphragms spanning respective cavities in the substrate. A conductor pattern formed on the piezoelectric plate includes a plurality of interdigital transducers (IDTs) of a respective plurality of resonators, interleaved fingers of each IDT disposed on a respective diaphragm of the plurality of diaphragms. The conductor pattern connects the plurality of resonators in a matrix filter circuit including a first sub-filter and a second sub-filter, each sub-filter comprising two or more resonators from the plurality of resonators.