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    Filters using decoupled transversely-excited film bulk acoustic resonators
    2.
    发明授权
    Filters using decoupled transversely-excited film bulk acoustic resonators 有权

    公开(公告)号：US12126318B2

    公开(公告)日：2024-10-22

    申请号：US17533184

    申请日：2021-11-23

    Applicant: Murata Manufacturing Co., Ltd.

    Inventor： Sean McHugh

    IPC: H03H9/02 ,  H03H3/02 ,  H03H9/205 ,  H03H9/56

    CPC classification number: H03H9/02228 ,  H03H3/02 ,  H03H9/02015 ,  H03H9/02157 ,  H03H9/205 ,  H03H9/568

    Abstract: Filter devices and methods of fabrication are disclosed. An acoustic filter device includes a substrate and a piezoelectric plate, a first portion of the piezoelectric plate spanning a first cavity in the substrate and a second portion of the piezoelectric plate spanning a second cavity in the substrate. A decoupling dielectric layer on a front surface of the first and second portions of the piezoelectric plate has a first thickness td1 on the first portion and a second thickness td2, greater than the first thickness, on the second portion. Interleaved fingers of a first interdigital transducer (IDT) are on the decoupling dielectric layer over the first portion of the piezoelectric plate, and interleaved fingers of a second IDT are on the decoupling dielectric layer over the second portion of the piezoelectric plate.

    Low loss transversely-excited film bulk acoustic resonators and filters
    7.
    发明授权
    Low loss transversely-excited film bulk acoustic resonators and filters 有权

    公开(公告)号：US12040783B2

    公开(公告)日：2024-07-16

    申请号：US17956810

    申请日：2022-09-29

    Applicant: Murata Manufacturing Co., Ltd.

    Inventor： Bryant Garcia ,  Greg Dyer

    IPC: H03H9/56 ,  H03H9/13 ,  H03H9/17

    CPC classification number: H03H9/568 ,  H03H9/13 ,  H03H9/17

    Abstract: An acoustic resonator device includes a diaphragm a diaphragm comprising a portion of a piezoelectric plate spanning a cavity. A conductor pattern on a surface of the piezoelectric plate includes an interdigital transducer (IDT) with a first busbar, a second busbar, and a plurality of interleaved IDT fingers extending alternately from the first and second busbars. Overlapping portions of the plurality of interleaved fingers are on the diaphragm. The conductor pattern also includes a first reflector element on the diaphragm proximate and parallel to a first IDT finger, and a second reflector element on the diaphragm proximate and parallel to a last IDT finger. A center-to-center spacing of the first reflector element and the first IDT finger and the second reflector element and the last IDT finger is greater than an average center-to-center spacing between all adjacent pairs of IDT fingers.

    Composite filter device
    8.
    发明授权
    Composite filter device 有权

    公开(公告)号：US12040782B2

    公开(公告)日：2024-07-16

    申请号：US17557090

    申请日：2021-12-21

    Applicant: Murata Manufacturing Co., Ltd.

    Inventor： Masakazu Mimura ,  Hiroshi Muranaka

    IPC: H03H9/56 ,  H03H9/13 ,  H03H9/205

    CPC classification number: H03H9/568 ,  H03H9/13 ,  H03H9/205

    Abstract: A composite filter device includes a piezoelectric substrate made of LiNbO3, a first filter on the piezoelectric substrate, and including acoustic wave resonators, and a second filter including one end connected in common to one end of the first filter, wherein a pass band of the second filter is in a frequency band higher than a pass band of the first filter, and bulk wave radiation frequencies of all of the first and second resonators of the first filter are higher than the pass band of the second filter.

    ACOUSTIC RESONATOR LID FOR THERMAL TRANSPORT
    9.
    发明公开
    ACOUSTIC RESONATOR LID FOR THERMAL TRANSPORT 审中-公开

    公开(公告)号：US20240235525A9

    公开(公告)日：2024-07-11

    申请号：US18488277

    申请日：2023-10-17

    Applicant: Murata Manufacturing Co., Ltd.

    Inventor： John KOULAKIS ,  Greg DYER ,  Sean MCHUGH ,  Patrick TURNER

    IPC: H03H9/17 ,  H03H9/02 ,  H03H9/56

    CPC classification number: H03H9/174 ,  H03H9/02228 ,  H03H9/568

    Abstract: An apparatus for filtering radio frequency signals is provided. The apparatus includes a substrate and a membrane coupled to the substrate that includes piezoelectric material. The apparatus also includes an interdigital transducer (IDT) coupled to the membrane and includes a plurality of interleaved fingers. The apparatus also includes a lid, in which the membrane is arranged between the substrate and the lid with a first cavity having a first height between the lid and a first main surface of the membrane and a second cavity having a second height between the substrate and a second main surface of the membrane that opposes the first main surface. Moreover, the first height between the lid and the first main surface of the membrane is greater than a pitch of at least one pair of interleaved fingers of the plurality of interleaved fingers and at most four times greater than the second height.

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