公开(公告)号：US20210324851A1

公开(公告)日：2021-10-21

申请号：US17363912

申请日：2021-06-30

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yoshio YAMANAKA ,  Masahiro SASAKI ,  Kenjiro OKAGUCHI ,  Shinichiro MATSUMOTO ,  Shizuka UEDA

IPC: F04B53/08 ,  H01L41/04 ,  H01L41/09 ,  F04B43/04

Abstract: A pump unit (100) includes a plurality of piezoelectric pumps (1), a flow path-defining member (50), and a heat-dissipating part (60). The plurality of piezoelectric pumps (1) each include a first flow path for sucking and discharging of fluid. The flow path-defining member (50) includes a second flow path for connection to the first flow paths in the plurality of piezoelectric pumps (1). Heat generated in the plurality of piezoelectric pumps (1) is dissipated through the heat-dissipating part (60). The heat-dissipating part (60) is disposed between the flow path-defining member (50) and each of the plurality of piezoelectric pumps (1). The heat-dissipating part (60) has through-holes through which the first flow paths are connected to the second flow path.