公开(公告)号：US20230223915A1

公开(公告)日：2023-07-13

申请号：US18187376

申请日：2023-03-21

Applicant: Murata Manufacturing Co., Ltd.

Inventor： John KOULAKIS ,  William LU

IPC: H03H9/02 ,  H03H9/00

CPC classification number: H03H9/02228 ,  H03H9/0014 ,  H03H9/02015

Abstract: An acoustic resonator device includes a substrate having a surface; an 82Y-cut lithium niobate piezoelectric plate attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in an intermediate dielectric layer of the substrate; an interdigital transducer (IDT) at the piezoelectric plate such that interleaved fingers of the IDT are at the diaphragm; and a plurality of stripes of a dielectric material extending over ends of the interleaved fingers and portions of gaps between the ends of the interleaved fingers and opposing busbars of the IDT.