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公开(公告)号：US20240288326A1
公开(公告)日：2024-08-29
申请号：US18574386
申请日：2022-06-24
发明人： Hiroshi Kodama , Eiji Takeda , Takamitsu Yoshizawa
IPC分类号： G01L9/04
CPC分类号： G01L9/04
摘要： A sensor module includes: a diaphragm including a first region and a second region that includes a position at which a strain ε that occurs by an effect of a physical quantity caused by a measurement target fluid is zero and has a smaller effect of the physical quantity caused by the measurement target fluid than the first region; strain detecting elements disposed in the first region; and an electric conductor that is at least partially disposed in the second region and electrically couples the strain detecting elements to each other to configure a bridge circuit. The electric conductor includes a resistance adjuster, at a position corresponding to the second region, that adjusts a resistance of the electric conductor.
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公开(公告)号：US20170356814A1
公开(公告)日：2017-12-14
申请号：US15614708
申请日：2017-06-06
发明人： Hiroshi Kodama , Eiji Takeda , Takamitsu Yoshizawa
IPC分类号： G01L1/22
CPC分类号： G01L1/2287 , G01L9/0051
摘要： A strain detector includes a strain-causing portion, an insulation film formed on the strain-causing portion, a strain gauge formed on the insulation film and configured to detect the strain generated by the strain-causing portion as electric signals, an electrode connected to the strain gauge, a bonding pad extending from the electrode, a bonding wire connected to the bonding pad, and an insulative resin layer covering the strain gauge without covering the bonding pad and the bonding wire.
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公开(公告)号：US11940347B2
公开(公告)日：2024-03-26
申请号：US17508249
申请日：2021-10-22
发明人： Hiroshi Kodama , Naoki Yoshida , Kaori Miyashita , Eiji Takeda , Nobuaki Yamada , Yoshihiro Tomomatsu , Yasushi Yanagisawa , Yusuke Midorikawa , Shirou Kamanaru , Kenichi Yokoyama , Inao Toyoda , Hisayuki Takeuchi , Naohisa Niimi , Masao Takahashi , Yasutake Ura , Kouji Asano , Yukihiro Kamada
CPC分类号： G01L9/04 , G01L19/0061 , G01L19/147 , G01L19/148
摘要： A pressure sensor has a stem in which a pressure introduction hole into which a pressure medium is introduced and a diaphragm deformable according to the pressure of the pressure medium are formed, and a strain detecting element which is arranged on the diaphragm via an insulating film and being configured to output a detection signal according to the deformation of the diaphragm. The strain detecting element is configured to have a portion made of polysilicon. A low doping layer having a higher electrical resistivity than polysilicon and a higher crystallinity than the insulating film is arranged between the insulating film and the strain detecting element.
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公开(公告)号：US10067010B2
公开(公告)日：2018-09-04
申请号：US15614708
申请日：2017-06-06
发明人： Hiroshi Kodama , Eiji Takeda , Takamitsu Yoshizawa
IPC分类号： G01L1/22
CPC分类号： G01L1/2287 , G01L9/0051
摘要： A strain detector includes a strain-causing portion, an insulation film formed on the strain-causing portion, a strain gauge formed on the insulation film and configured to detect the strain generated by the strain-causing portion as electric signals, an electrode connected to the strain gauge, a bonding pad extending from the electrode, a bonding wire connected to the bonding pad, and an insulative resin layer covering the strain gauge without covering the bonding pad and the bonding wire.
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