公开(公告)号：US20160167193A1

公开(公告)日：2016-06-16

申请号：US14904832

申请日：2014-06-18

Applicant: NAGOYA INSTITUTE OF TECHNOLOGY ,  SINTOKOGIO, LTD.

Inventor： Osama ERYU ,  Eiji YAMAGUCHI

IPC: B24B37/24 ,  B24D18/00

CPC classification number: B24B37/24 ,  B22F3/11 ,  B24D18/0009 ,  C22C47/14 ,  H01L21/02024

Abstract: A metallic abrasive pad for use in a smoothing operation applied to a worked surface of a workpiece by a catalyst-supported chemical machining method, the metallic abrasive pad including a compression-formed compact of one or more metal fibers made of a transition-metal catalyst, wherein a contact spot of the one or more metal fibers intersecting each other is sintered, the one or more metal fibers are fixed to each other, and the metallic abrasive pad has a prescribed void ratio.

Abstract translation: 一种用于通过催化剂负载的化学机械加工方法对工件的加工面进行的平滑化处理的金属研磨垫，所述金属研磨垫包括一个或多个由过渡金属催化剂制成的金属纤维的压缩成形体 其中，所述一个或多个彼此相交的金属纤维的接触点被烧结，所述一个或多个金属纤维彼此固定，并且所述金属研磨垫具有规定的空隙率。