公开(公告)号：US20110108729A1

公开(公告)日：2011-05-12

申请号：US12904877

申请日：2010-10-14

申请人： NAOKI ODA

发明人： NAOKI ODA

IPC分类号： H01L27/14 ,  H01L21/04

CPC分类号： H01L27/14649 ,  H01L27/14601

摘要： A THz wave detector including a thermal isolation structure in which a supporting unit containing electrode wirings connected to a readout circuit formed in an substrate supports a temperature detecting unit connected to the electrode wirings so that one face of said temperature detecting unit and said substrate are opposed to each other with a predetermined gap, wherein a reflective film reflecting THz waves is formed on the substrate so as to face the temperature detecting unit, an absorbing film absorbing the THz waves is formed on the temperature detecting unit, the reflective film and the temperature detecting unit form an optical resonant structure, the distance between the reflective film and the temperature detecting unit is set to 8 to 14 μm, and the sheet resistance of the absorbing film is set to 100 to 200 Ω/square.

摘要翻译： 一种太赫兹波检测器，包括热隔离结构，其中与形成在基板中的读出电路连接的包含电极配线的支撑单元支撑连接到电极配线的温度检测单元，使得所述温度检测单元和所述基板的一面相对 以预定的间隙彼此反射，其中在基板上形成反射薄膜的反射膜，以便面对温度检测单元，在温度检测单元，反射膜和温度上形成吸收THz波的吸收膜 检测单元形成光学谐振结构，反射膜和温度检测单元之间的距离设定为8〜14μm，吸收膜的薄层电阻为100〜200Ω·平方。

公开(公告)号：US20100006757A1

公开(公告)日：2010-01-14

申请号：US12496164

申请日：2009-07-01

申请人： NAOKI ODA

发明人： NAOKI ODA

IPC分类号： G01J5/00

CPC分类号： G01J5/20 ,  G01J5/08 ,  G01J5/0846 ,  G01J5/0853

摘要： A dual-wavelength thermal infrared sensor includes a first and a second type pixels that detect infrared in different wavelength ranges. The pixels of both types include a diaphragm supported by beams, an eave formed to spread outward from the diaphragm, and reflection film on the substrate. The diaphragm includes a thermoelectric conversion material thin film, an electrode, and protective films. The protective films and eaves are made of a material having larger absorption coefficient for infrared in the first wavelength range and a smaller absorption coefficient for infrared in second wavelength range. First-type pixels further have metal thin films formed on the top of the diaphragm and eaves. First-type pixels have sensitivity to infrared in a first wavelength range and in a second wavelength range defined by optical interference occurring between the metal thin films and the reflection film. Second-type pixels have sensitivity to first wavelength range infrared.

摘要翻译： 双波长热红外传感器包括检测不同波长范围的红外线的第一和第二类型像素。 两种像素包括由光束支撑的光阑，形成为从光阑向外展开的檐和在基底上的反射膜。 隔膜包括热电转换材料薄膜，电极和保护膜。 保护膜和屋檐由在第一波长范围内的红外线吸收系数较大的材料和第二波长范围内的红外线吸收系数较小的材料制成。 第一类像素还具有形成在隔膜和屋檐顶部上的金属薄膜。 第一类像素对于在第一波长范围内的红外线和在由金属薄膜和反射膜之间发生的光学干涉限定的第二波长范围内具有灵敏度。 第二类像素对第一波长范围的红外线具有灵敏度。