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公开(公告)号:US10217500B1
公开(公告)日:2019-02-26
申请号:US15722118
申请日:2017-10-02
Applicant: NATIONAL APPLIED RESEARCH LABORATORIES
Inventor: Yann-Wen Lan , Qiming Shao , Guoqiang Yu , Kang-Lung Wang , Wen-Kuan Yeh
Abstract: The present invention relates to an inductive spin-orbit torque device and the method for fabricating the same. The method comprises steps of depositing a two-dimensional thin film using chemical vapor deposition (CVD) and sputtering a ferromagnetic material on the thin film. The crystal structure of the two-dimensional thin film includes at least one lattice plane arranged asymmetrically. The thickness of the two-dimensional thin film includes at least one unit-cell layer. The sum of the at least one unit-cell layer is an odd number. By using the vertical magnetic torque generated by the two-dimensional thin film and the miniaturization in thickness, the device size and the fabrication costs may be reduced.