公开(公告)号：US20170159206A1

公开(公告)日：2017-06-08

申请号：US14961963

申请日：2015-12-08

Applicant: NATIONAL CHUNG SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： TA-CHING LI ,  DAI-LIANG MA ,  BANG-YING YU ,  BO-CHENG LIN

IPC: C30B23/02 ,  C30B29/36 ,  C30B23/00

CPC classification number: C30B23/025 ,  C30B29/36

Abstract: A method of making a photonic crystal includes step 1 providing a seed, followed by etching a surface of the seed to form thereon submicron voids; step 2 providing a graphite disk, followed by coating a side of the graphite disk with a graphite adhesive whereby the void-formed surface of the seed is attached to the graphite disk to form a seed holder; step 3 placing the seed holder above a growth chamber, followed by placing a raw material below the growth chamber; step 4 forming a thermal field in the growth chamber with a heating device to sublime the raw material; and step 5 controlling temperature, thermal field, atmosphere and pressure in the growth chamber to allow the gaseous raw material to be conveyed and deposited on the seed, thereby forming a photonic crystal.