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公开(公告)号：US12264949B2
公开(公告)日：2025-04-01
申请号：US17764304
申请日：2020-10-16
Inventor： Hajime Yoshida , Yoshinori Takei , Kenta Arai , Mao Hirata , Tsutomu Hara , Jun Inomata
IPC: G06F11/30 , G01F1/34 , G01M3/28 , G06F113/08
Abstract: A flow rate of a gas is determined based on a predetermined relational expression including, as parameters: the flow rate of the gas; diameter and length of a hole; upstream and downstream pressures; and temperature, molecular weight, viscosity coefficient, and specific heat ratio of the gas. Additionally, setting conditions for a type and temperature of the gas, the length of the hole, and the pressures upstream and downstream from the hole are set; the relational expression is used to obtain the correspondence relationship between the diameter of the hole and the flow rate of the gas flowing through the hole; an approximation function approximating the obtained correspondence relationship is determined; the flow rate of a gas passing through a test piece having a hole of an unknown diameter is measured; and the diameter of the hole is estimated, based on the measured flow rate and the approximation function.
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2.发明授权公开(公告)号：US11119023B2
公开(公告)日：2021-09-14
申请号：US16488207
申请日：2018-02-26
Inventor： Shigeki Hara , Hajime Yoshida , Yoshikazu Takahashi , Yasushi Hosooka , Takahiro Imamura
IPC: G01N15/08
Abstract: An apparatus for evaluating gas barrier properties, a support having a polymer for supporting a sample, a chamber on a permeation side, and a detection unit, the support being joined to the opening of the chamber on a permeation side; in which a polymer film is provided between the support and a sample; a chamber on a supply side is provided, being disposed so as to be closably attachable to the sample and able to go up and down; and an external chamber covers a region interposed between the polymer film and the support; and a method of evaluating gas barrier properties using the same.
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公开(公告)号：US10254189B2
公开(公告)日：2019-04-09
申请号：US15723752
申请日：2017-10-03
Inventor： Hajime Yoshida , Kenta Arai , Tokihiko Kobata
Abstract: A static expansion method is performed by expanding a volume of a testing gas from V0 to V0+V1 between a second chamber of the volume V1 which is connected to an upstream side of a measurement chamber and a first chamber of the volume V0 which is connected to an upstream side of the second chamber, wherein the first camber is in communication with the second chamber via a first valve, wherein the second chamber is in communication with the measurement chamber via each of a second valve and an orifice or porous plug, respectively. When the first valve is opened and the second valve is closed, the testing gas flows from the first chamber via the second chamber into the measurement chamber only through the orifice or porous plug.
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公开(公告)号：US10094728B2
公开(公告)日：2018-10-09
申请号：US15329986
申请日：2015-07-29
Inventor： Hajime Yoshida
Abstract: Provided are: a vacuum gauge that, with a simple configuration, can accurately diagnose the degree of contamination of the vacuum gauge; and a contamination diagnosis method that, with a simple process, can accurately diagnose the degree of contamination of a vacuum gauge. Provided is a cold cathode ionization vacuum gauge that has a normal operation mode and a contamination diagnosis mode, the cold cathode ionization vacuum gauge comprising: an anode 1 and a cathode 3 that are for measuring vacuum pressure in the normal operation mode; an anode 7 and the cathode 3 that are for measuring the vacuum pressure in the contamination diagnosis mode; and a controller 10 that compares the size of a current measured between the anode 7 and the cathode 3 and the size of a current measured between the anode 1 and the cathode 3.
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