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公开(公告)号：US10990001B2
公开(公告)日：2021-04-27
申请号：US16224028
申请日：2018-12-18
发明人： Yosuke Ono , Atsushi Okubo , Kazuo Kohmura , Atsuko Sekiguchi , Yuichi Kato , Takeo Yamada
IPC分类号： G03F1/62 , G03F1/64 , C01B32/162 , C01B32/159 , G03F7/20 , H01L21/027
摘要： Provided are a pellicle film, a pellicle frame and a pellicle having a higher EUV transmittance. An exposure pattern plate capable of performing EUV lithography with the pellicle film, the pellicle frame or the pellicle, and a method for producing a semiconductor device, are provided. A pellicle film for exposure extendable over an opening of a support frame and having a thickness of 200 nm or less is provided. The film includes a carbon nanotube sheet. The carbon nanotube sheet includes bundles each including a plurality of carbon nanotubes, the bundles each have a diameter of 100 nm or shorter, and the bundles are aligned in a planar direction in the carbon nanotube sheet.
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2.发明授权Protein-enclosed carbon nanotube film, and sensor and power-generating device each equipped with the carbon nanotube film as electrode 有权蛋白质封闭碳纳米管薄膜，以及分别装有碳纳米管薄膜作为电极的传感器和发电装置公开(公告)号：US08921084B2
公开(公告)日：2014-12-30
申请号：US13727042
申请日：2012-12-26
发明人： Matsuhiko Nishizawa , Takeo Miyake , Syuhei Yoshino , Takeo Yamada , Kenji Hata
CPC分类号： C12N9/00 , B82Y30/00 , B82Y40/00 , C01B32/168 , C01B32/178 , C01B2202/04 , C01B2202/08 , C01B2202/34 , G01N27/3278 , H01M4/8846 , H01M4/9083 , H01M8/16 , Y02E60/527 , Y10S977/705 , Y10S977/714 , Y10S977/737 , Y10S977/747 , Y10S977/755
摘要： The present invention answers the demands of power generating device and biosensor development and provides a flexible, free-standing type protein containing carbon nanotube film, and a sensor and power generating device each equipped with the carbon nanotube film as an electrode. According to the present invention a carbon nanotube free standing film is provided including a carbon nanotube aggregate formed by aggregating a plurality of carbon nanotubes, and a plurality of enzymes included between the plurality of carbon nanotubes. The carbon nanotube film may include a different protein to the enzyme and may include a surfactant agent between the plurality of carbon nanotubes.
摘要翻译： 本发明解决了发电装置和生物传感器开发的需要，提供了一种含有碳纳米管膜的柔性，独立型蛋白质，以及配备有碳纳米管膜作为电极的传感器和发电装置。 根据本发明，提供了一种碳纳米管自立膜，其包括通过聚集多个碳纳米管而形成的碳纳米管集合体和包含在多个碳纳米管之间的多种酶。 碳纳米管膜可以包括与酶不同的蛋白质，并且可以在多个碳纳米管之间包括表面活性剂。
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公开(公告)号：US10017389B2
公开(公告)日：2018-07-10
申请号：US15003881
申请日：2016-01-22
CPC分类号： C01B32/158 , C25D5/50 , C25D5/54 , C25D15/00 , H01B1/04
摘要： A CNT metal composite material is provided depositing a metal into a plurality of CNTs is provided including 3% by weight or more and 70% by weight or less of the CNTs, a region is arranged with the metal uniformly distributed in a scanning electron microscope image magnified ten thousand times and the length of the region is at least 1 μm, a signal of the metal and a signal of carbon are not localized in a specific area in a two-dimensional elemental analysis image magnified ten thousand times, and a length of a region uniformly distributing the signal of the metal and the signal of carbon uniformly distributed is at least 1 μm, an allowable current density is at 6×106 A/cm2 or more, and volume resistivity is 1×10−6 Ω·cm or more and 5×10−3 Ω·cm or less.
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公开(公告)号：US11042085B2
公开(公告)日：2021-06-22
申请号：US16224028
申请日：2018-12-18
发明人： Yosuke Ono , Atsushi Okubo , Kazuo Kohmura , Atsuko Sekiguchi , Yuichi Kato , Takeo Yamada
IPC分类号： G03F1/62 , G03F1/64 , C01B32/162 , C01B32/159 , G03F7/20 , H01L21/027
摘要： Provided are a pellicle film, a pellicle frame and a pellicle having a higher EUV transmittance. An exposure pattern plate capable of performing EUV lithography with the pellicle film, the pellicle frame or the pellicle, and a method for producing a semiconductor device, are provided. A pellicle film for exposure extendable over an opening of a support frame and having a thickness of 200 nm or less is provided. The film includes a carbon nanotube sheet. The carbon nanotube sheet includes bundles each including a plurality of carbon nanotubes, the bundles each have a diameter of 100 nm or shorter, and the bundles are aligned in a planar direction in the carbon nanotube sheet.
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公开(公告)号：US20190129300A1
公开(公告)日：2019-05-02
申请号：US16224028
申请日：2018-12-18
发明人： Yosuke Ono , Atsushi Okubo , Kazuo Kohmura , Atsuko Sekiguchi , Yuichi Kato , Takeo Yamada
IPC分类号： G03F1/64 , G03F7/20 , C01B32/159 , H01L21/027
摘要： Provided are a pellicle film, a pellicle frame and a pellicle having a higher EUV transmittance. An exposure pattern plate capable of performing EUV lithography with the pellicle film, the pellicle frame or the pellicle, and a method for producing a semiconductor device, are provided. A pellicle film for exposure extendable over an opening of a support frame and having a thickness of 200 nm or less is provided. The film includes a carbon nanotube sheet. The carbon nanotube sheet includes bundles each including a plurality of carbon nanotubes, the bundles each have a diameter of 100 nm or shorter, and the bundles are aligned in a planar direction in the carbon nanotube sheet.
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公开(公告)号：US09126835B2
公开(公告)日：2015-09-08
申请号：US14095049
申请日：2013-12-03
发明人： Kenji Hata , Yuuhei Hayamizu , Takeo Yamada
CPC分类号： C01B31/022 , B81B2203/0127 , B81C1/0038 , B82Y30/00 , B82Y40/00 , C01B32/158 , C01B2202/08 , C01B2202/10 , Y10T156/1028 , Y10T156/1041 , Y10T428/24479 , Y10T428/24521 , Y10T428/24612 , Y10T428/24851 , Y10T428/249924 , Y10T428/30
摘要： A method of producing a carbon nanotube film structure having a substrate and a carbon nanotube layer, comprises a placing step of placing a carbon nanotube film comprising a plurality of carbon nanotubes aligned in one direction within a film plane on the substrate; and a densifying step of applying a densifying treatment to the carbon nanotube film thereby forming the carbon nanotube layer having the weight density of the carbon nanotube to 0.1 g/cm3 or more. Thus, a problem of island-like shrinkage caused while a highly densified CNT layer is being manufactured is solved, and a high-quality CNT film structure wherein the aligned CNT layer having a high density and uniform thickness is deposited on the substrate.
摘要翻译： 一种具有基板和碳纳米管层的碳纳米管膜结构体的制造方法，其特征在于，包括：在基板的膜面内配置包含在一个方向上排列的多个碳纳米管的碳纳米管膜的放置工序; 以及对碳纳米管膜进行致密处理的致密化步骤，从而形成碳纳米管的重量密度为0.1g / cm 3以上的碳纳米管层。 因此，解决了在制造高度致密化的CNT层时引起的岛状收缩的问题，并且在基板上沉积具有高密度和均匀厚度的排列CNT层的高质量CNT膜结构。
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